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Investigation of the electrochromic properties of V2O5 thin films deposited by sputtering : comparison of High Power Impulse Magnetron Sputtering (HiPIMS) vs conventional Radio Frequency Magnetron Sputtering (RFMS)

Abstract : Vanadium oxide thin films were deposited on ITO coated glass substrate at room temperature using three different deposition conditions, namely radio frequency magnetron sputtering (RFMS) with V metallic target (V2O5RF-metal) or V2O5 oxide target (V2O5RF-oxide) and High Power Impulse Magnetron Sputtering (HiPIMS) with V metallic target (V2O5HiPIMS), respectively. Significant difference in structure and morphologies are reported. V2O5RF-metal films are crystalline and dense with a disturbed surface which is thickness dependent, while V2O5RF-oxide and V2O5HiPIMS films are amorphous and porous or dense respectively. V2O5 thin films show reversible electrochromism with 4 colors, which are orange, green, blue and gray, in reduction/oxidation states when cycled in Li and Na based electrolytes. However, depending on the deposition method, V2O5 films show different cycling stability, recorded up to 1000 cycles, that is attributed to a modification of the morphology (i.e. increase of the surface area due to cracks and increase porosity, as well as a progressive amorphization particularly in lithium electrolyte. The different behaviors during the electrochromic process were investigated with GIXRD, XPS, TOF-SIMS, AES and RBS/NRA indicating a mechanism more complex than a simple insertion/deinsertion. Finally, two types of ECDs using either transparent electrolyte membrane or opaque are fabricated coupling V2O5 thin films to WO3 or to V2O5 in a symmetrical device aiming at application in smart windows and displays, respectively.
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Giljoo Song. Investigation of the electrochromic properties of V2O5 thin films deposited by sputtering : comparison of High Power Impulse Magnetron Sputtering (HiPIMS) vs conventional Radio Frequency Magnetron Sputtering (RFMS). Material chemistry. Université de Bordeaux, 2019. English. ⟨NNT : 2019BORD0062⟩. ⟨tel-03221282⟩

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