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Détecteurs de rayonnement (IR->THz) innovants à base d'oxydes fonctionnels

Vanuza Marques Do Nascimento 1
1 Equipe Electronique - Laboratoire GREYC - UMR6072
GREYC - Groupe de Recherche en Informatique, Image, Automatique et Instrumentation de Caen
Abstract : This work evaluates the potential of LSMO thin films deposited on a silicon substrate as a radiation detector at room temperature, by exploiting the variation of its electrical resistance. The fabrication of suspended structures and electro-thermal (R(T), thermal conductance, response time) and optical characterizations are presented as well as and noise performance. Optical measurements with different radiation sources (635 nm, 3.39 μm, black body, and synchrotron beam) were performed. The obtained performances are very interesting because the noise equivalent power (NEP) can reach pW·Hz-1/2 to 300 K. The optical characterizations realized show that these detectors are at the state-of-the-art level. The bolometer is sensitive in these different ranges while it was not coupled to an antenna. An electro-thermal model and finite element simulations are presented, they make possible the understanding of the behaviour of the bolometers as a function of the chosen operating point (polarization current, temperature). The thermal time constants (around 1 ms) and the electrical consumptions (a few tens of μW) are low. These performances are very promising compared to the state-of-the-art of uncooled detectors. The applications envisaged are those requiring a small number of sensitive detectors, in the infrared range up to THz.
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Vanuza Marques Do Nascimento. Détecteurs de rayonnement (IR->THz) innovants à base d'oxydes fonctionnels. Micro et nanotechnologies/Microélectronique. Normandie Université, 2019. Français. ⟨NNT : 2019NORMC244⟩. ⟨tel-02866992v2⟩

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