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Conception et élaboration de substrats semiconducteurs nanostructurés : nouvelles applications en nanosciences

Abstract : New nano-structured substrates being used as templates for the growth and study of nanoobjects were developed. Crystalline surfaces can naturally show regular patterns (reconstructions, superstructures, steps on vicinal surfaces...) but on scales not exceeding a few hundreds of nm2. However some physical measurements and the possible applications require large surfaces. New techniques were developed in order to create nano-structured surfaces on large scales, by imposing regular pattern with parallel processes. The obtained substrates were subsequently functionalized and could be used in various applications.
In the case of vicinal surfaces of Si(111), the intrinsic crystallographic properties of silicon make it possible to obtain uni-dimensionnal patternd in the form of very regular, parallels and equidistant step-bunches. These patterns are functionalized by a subsequent gold deposition, forming uni-dimensional networks of monodisperse gold silicides dots, arranged according to the preexistant pattern, and separated by Si-rich terraces. After a cobalt deposition on such surfaces, only the dots have magnetic properties.
In the case of silicon carbide (SiC) substrates, networks of several cm2 of faceted, vertical and hexagonally shaped nano-channels are obtained. The pattern of a porous alumina membrane is transferred by reactive ion etching on the SiC surface. Hydrogen etching at high temperature leads to the final faceted shape. An alternative technique based on the catalytic reaction of a platinium dots network with hydrogen makes it possible to obtain substrates of porous SiC at lower temperatures of erosion. These networks have potential applications in magnetism and biology.
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Contributor : Hal Cinam <>
Submitted on : Tuesday, December 4, 2007 - 11:44:57 AM
Last modification on : Thursday, January 18, 2018 - 1:38:01 AM
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  • HAL Id : tel-00193655, version 1



Eric Moyen. Conception et élaboration de substrats semiconducteurs nanostructurés : nouvelles applications en nanosciences. Physique [physics]. Université de la Méditerranée - Aix-Marseille II, 2007. Français. ⟨tel-00193655⟩



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