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Theses

Sciences de données pour la microélectronique : analyse de topographie

Mehdi Kessar 1, 1, 1 
1 G-SCOP_ROSP - Recherche Opérationnelle pour les Systèmes de Production
G-SCOP - Laboratoire des sciences pour la conception, l'optimisation et la production
Abstract : The evolution of technology is pushing microelectronics to increasingly restrictive dimensional constraints. The size of transistors is constantly decreasing, and their density on chips doubles every 18 months, following Moore's Law. Chip manufacturing processes must be precise, having process windows of a few tens of nanometers. Nanotopography on a wafer has become critical for the photolithography process, and the integration of topography measurements analysis into manufacturing processes is a growing challenge. The thesis proposes to integrate the topography measurements of the KLA PWG measurement tool in the already existing data lake of STMicroelectronics. Starting by understanding the components of the measurement, then carrying out a predictive model of the topography at the chip scale, then by transforming these data to make them more intelligible for neural networks as well as for engineers.
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Submitted on : Thursday, June 23, 2022 - 8:19:11 AM
Last modification on : Saturday, June 25, 2022 - 3:06:20 AM

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Mehdi Kessar. Sciences de données pour la microélectronique : analyse de topographie. Modélisation et simulation. Université Grenoble Alpes [2020-..], 2021. Français. ⟨NNT : 2021GRALM075⟩. ⟨tel-03702304⟩

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