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Theses

Développement d'un nouveau procédé de dépôt en couche épaisse de matériaux piézoélectriques sans plomb par dépôt d'aérosol (Aerosol Deposition Method) pour la fabrication de micro­dispositifs de récupération d'énergie

Abstract : This thesis focuses on new process development by aerosol deposition coating, so-called ADM (Aerosol Deposition Method), allowing thick layers realisation from lead-free piezoelectric materials for the manufacturing of energy harvesting micro-devices. The suitable powder preparation for ADM was carried out by studying two synthesis ways of NBT-6BT composition material and an additional treatment based on milling, sieving and drying. The study and optimisation of deposition parameters allowed obtaining the desired thick layers on a Kovar® substrate. Despite high electrical losses, the films obtained exhibit a good dielectric behaviour with a relative permittivity estimated at 100. The high resistivity values (1010 Ω.m) and the breakdown voltage deficiency under a high electric field (E> 10 kV/mm) reflect good densities and microstructures of films obtained without annealing. Among the post-deposition thermal treatments studied, annealing at 700°C under argon made it possible to avoid substrates and films damaging with changes in P(E) cycles shape from a paraelectric (for a non-annealed film) to a hysteresis type. Despite the absence of real ferroelectric cycles, studies suggest piezoelectric properties at a local scale (nanometric) rather than at a macroscopic scale. The objectives were achieved through, on one hand, the control and the reproducibility to obtain thick layers up to 100 μm and, on the other hand, the development of a simple energy harvesting device with electromechanical conversion.
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https://tel.archives-ouvertes.fr/tel-03234403
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Submitted on : Tuesday, May 25, 2021 - 12:24:11 PM
Last modification on : Wednesday, May 26, 2021 - 3:26:01 AM

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Innocent Nomel. Développement d'un nouveau procédé de dépôt en couche épaisse de matériaux piézoélectriques sans plomb par dépôt d'aérosol (Aerosol Deposition Method) pour la fabrication de micro­dispositifs de récupération d'énergie. Matériaux. Université de Limoges, 2021. Français. ⟨NNT : 2021LIMO0023⟩. ⟨tel-03234403⟩

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