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Capteurs à ondes acoustiques de surface fonctionnant à 104 et 208 MHz. : modélisation, développement et application à la détection d’ions lourds métalliques

Abstract : Surface Acoustic Wave (SAW) sensors have many advantages mainly a high sensitivity, which is a key parameter in various applications. Two strategies were explored, in this thesis, to enhance the sensitivity of SAW devices: switching to Love mode, with a waveguide layer in SU-8 epoxy resin, and frequency increase from 104 to 208 MHz. Prior to the realization of such devices in a clean room and their further use as chemical sensors, numerical simulations were done, first with MATLAB software, and then with the finite element method, via COMSOL Multiphysics software. The optimum thickness of the waveguide layer, allowing a significant gain in sensitivity, was estimated. A disagreement between experience and simulation was found highlighting the need to continue optimization steps. A confrontation between calculations / experiments was carried out for the SH-SAW structures. These devices were functionalized with an anthracene derivate for zinc ions detection in aqueous media. Gravimetric results indicate that increasing the operating frequency from 104 MHz to 208 MHz permits a gain in sensitivity by a factor of 2.3.
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Submitted on : Thursday, October 29, 2020 - 3:32:08 PM
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  • HAL Id : tel-02983267, version 1

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Bilel Achour. Capteurs à ondes acoustiques de surface fonctionnant à 104 et 208 MHz. : modélisation, développement et application à la détection d’ions lourds métalliques. Acoustique [physics.class-ph]. Université du Maine, 2020. Français. ⟨NNT : 2020LEMA1017⟩. ⟨tel-02983267⟩

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