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Introduction in French Situés entre deux domaines bien développés, à savoir les micro-ondes et l'infrarouge, les radiations térahertz ont attiré l'attention des observateurs pour leurs propriétés a priori séduisantes, parmi lesquelles on peut classer leur nature non ionisante, leur capacité à pénétrer à travers des matériaux optiquement opaques, ou encore leur sensibilité aux discontinuités diélectriques. Le développement des techniques spectroscopiques dans le régime du térahertz s'est progressivement étendu à l'imagerie, ce qui permet aujourd'hui aux domaines académique et industriel de réaliser un large panel de tests non destructifs allant du contrôle qualité à l, 2017. ,
, D'un point de vue pratique, un système de mesure du térahertz compact en mode réflexion plutôt qu'en géométrie de transmission est plus avantageux. Plus précisément, par rapport à la configuration de transmission qui impose des restrictions sur la forme et les propriétés d'un objet testé, une géométrie de réflexion est plus adaptée à une grande variété d'échantillons. Ceci étant dit, bien qu'elle soit plus susceptible d'être utilisée sur une grande variété d'objets, la complexité et la compréhension de la réponse qui accompagnent une configuration en mode réflexion est par conséquent plus élevée. En fait, les géométries de réflexion nécessitent généralement la mise en oeuvre d'éléments quasi-optiques supplémentaires tels que des lentilles ou des séparateurs de faisceau. En plus d'induire des travaux supplémentaires pour obtenir un alignement correct le long du chemin de propagation, ces ajouts entravent les possibilités d'atteindre la compacité et l'intégration de tels systèmes. Pour remédier à ce problème, la mise en oeuvre de guides d'ondes térahertz est proposée dans le présent travail comme une solution prometteuse pour conduire les signaux d'interrogation vers la zone ciblée d'un échantillon. Une fois qu'un canal de communication unique sans optique est établi par un guide d'ondes entre l'émetteur-récepteur et l'échantillon, la structure des guides d'ondes stipule directement le chemin de propagation, Il est clair que les configurations des systèmes jouent un rôle important dans les utilisations pratiques, ce qui a un impact sur le champ d'application de la technologie térahertz
, L'objectif principal du présent travail est de mettre en oeuvre un système compact de réflectométrie guidée par ondes térahertz (TGR) après une sélection exigeante dans la vaste bibliothèque de composants existants
, En effet, grâce aux progrès des technologies des semi-conducteurs et des techniques de conditionnement en 3D, de nombreux dispositifs à grande vitesse ont été proposés au cours de la dernière décennie. Pour vérifier et valider les nouveaux concepts avant la production en série, le processus de recherche et de développement des TMIC doit inclure des mesures sur plaquettes. Par rapport aux sources à ondes continues accordables classiques, un signal impulsionnel généré par une source optoélectronique couvre une plus grande région de fréquence dans le spectre, ce qui permet d'obtenir les paramètres de diffusion dans une bande extra-large par une seule mesure. Non seulement le processus de mesure peut être simplifié par le déploiement d'une source optoélectronique, mais le coût de la plate-forme de mesure dans une gamme de fréquences extrêmement large peut également être réduit. Par conséquent, une partie de ce manuscrit est consacrée à la mise en oeuvre d'un système de réflectométrie sur plaquette en utilisant une sonde RF sur plaquette en association avec un émetteur-récepteur large bande à double ACP. Comme il s'agit de la première tentative à délivrer un signal d'impulsion dans un échantillon sur plaquette, les principaux défis à relever sont de savoir comment coupler efficacement un signal d, Outre la construction d'un système TGR à des fins de détection et d'imagerie, les mesures au niveau des plaquettes/emballages dans la bande térahertz présentent un grand intérêt en raison du développement rapide des circuits intégrés monolithiques térahertz (TMIC)
, Le premier chapitre offre une vue d'ensemble des développements de la technologie térahertz, y compris les progrès des dispositifs térahertz (sources, détecteurs et guides d'ondes), les configurations des systèmes et les applications. Par rapport à deux sources et détecteurs distincts, un émetteur-récepteur compact permet d'alléger la configuration du système en supprimant le séparateur ou le coupleur de faisceau utilisé pour séparer le faisceau incident et le faisceau réfléchi. Par conséquent, les études sur les émetteurs-récepteurs en térahertz sont passées en revue de manière approfondie, Compte tenu des objectifs susmentionnés, l'ensemble du manuscrit est composé de quatre chapitres qui sont décrits succinctement ci-après
Sur la base des études préliminaires, les guides d'ondes anti-résonants à noyau creux sont considérés comme un candidat approprié pour assurer la transmission du signal entre les émetteurs-récepteurs et un échantillon. Leurs bandes de transmission sont vérifiées par des mesures THz-TDS, correspondant à une bande de fréquence de fonctionnement optimisée de l'émetteur-récepteur à double ACP (de 400 GHz à 500 GHz), à la fois en mode transmission et en mode réflexion. La technique de fabrication additive (impression 3D), qui permet une chaîne de développement rapide, trois unités d'émission-réception sélectionnées, c'est-à-dire un émetteurrécepteur à double ACP sans lentille, un module FMCW basé sur la technologie III-V et un radar basé sur la technologie Si, sont testés séparément pour évaluer leurs performances ,
, En ce qui concerne les systèmes TGR-P, deux guides d'ondes diélectriques à noyau creux sélectionnés sont testés pour établir un canal de communication unique sans optique entre l'émetteur-récepteur à double ACP et un échantillon. En plus de la caractérisation de la forme d'onde dans le domaine temporel, les applications d'imagerie et de détection des systèmes sont également délimitées. Alors que le système TGR-G exploitant un guide d'ondes à noyau creux en silice de 3 mm de diamètre affiche un pouvoir de résolution d'environ 700 ?m, les autres systèmes TGR-G comprenant un guide d'ondes en plastique de 6 mm de diamètre affichent le potentiel de détection de la profondeur des liquides. En ce qui concerne les systèmes TGR-FMCW, Le troisième chapitre présente les systèmes TGR construits et leurs performances correspondantes en tirant parti des émetteurs-récepteurs et des guides d'ondes susmentionnés
, L'effet fantôme indésirable est ensuite corrigé par l'intégration d'une lentille hémisphérique supplémentaire de terminaison, ce qui permet d'améliorer la capacité d'imagerie. En plus des installations et des applications expérimentales, des recherches sur les propriétés du champ à l'intérieur du système sont menées à l'aide de la simulation 3D pleine onde, ce qui permet d'analyser les comportements de propagation des ondes le long du guide d'ondes
Outre les mesures sur les plaquettes, la détection des défauts au niveau de l'emballage a bénéficié des progrès des dispositifs optoélectroniques. La technique EOTPR exploitant des dispositifs PCA avec une sonde RF, est particulièrement détaillée. Inspirées par le système EOTPR, deux sondes RF dans la bande de fréquences de 140-220 GHz et 330 GHz à 500 GHz sont déployées séparément pour diriger un signal d'impulsion du double émetteur-récepteur PCA vers un échantillon sur la plaquette ,
, La mise en oeuvre et l'analyse des systèmes de réflectométrie térahertz guidée ont été réalisées dans le laboratoire de l'IMS sous la supervision du Dr. Patrick Mounaix et du Dr, Les travaux présentés dans ce manuscrit ont été réalisés dans le cadre d'une collaboration qui a rassemblé plusieurs équipes de recherche
La conception et la fabrication des guides d'ondes à courbure négative imprimés en 3D ont été réalisées par le professeur Cristiano M.B. Cordeiro de l'UNICAMP (Brésil), Georges Humbert de l'Institut de recherche XLIM ,
, Guided terahertz pulse reflectometry with double photoconductive antenna Mingming Pan, vol.59, pp.1641-1647, 2020.
, Iterative Tree Algorithm to Evaluate Terahertz Signal Contribution of Specific Optical Paths Within Multilayered Materials
, IEEE Transactions on Terahertz Science and Technology, vol.9, issue.6, pp.684-694, 2019.
, Guided Reflectometry Imaging Unit using Millimeter Wave FMCW Radars M. Pan, 2020.
, Teragogic: Open source platform for low cost millimeter wave sensing, terahertz imaging and control (submission)
, Conferences and communication 1. Guided terahertz FMCW radars for reflectometry probing purposes, 2020.
, 9th International Workshop on Terahertz Technology and Applications, 2019.
, 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), pp.1-1, 2019.
, THz imaging with a hollow core waveguide (Oral)
, 2019 French-German THz Conference, 2019.
, Comparative study of terahertz waveguide in reflective mode configuration (Oral)
, 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves, pp.1-2, 2018.
, Réflectométrie dans le domaine temporel pour l'optique guidée terahertz
, , 2018.
, Guided terahertz pulsed reflectometry: a remote probe for near-field imaging (Oral)
, Proc. SPIE 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI, 105310L, 2018.
, Guided terahertz waves in reflection mode (Poster)
, GDR NanoTeraMIR, 2017.
, Guided terahertz pulsed reflectometry simulation with near field probe (Oral)
, 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, pp.1-2, 2017.