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Conception et réalisation d'un transducteur acoustique miniature

Abstract : This work is devoted to the development of capacitive miniature acoustic sensor to be integrated in an RFID system in order to exceed some of its current limitations.The unusual configuration of the studied sensor offers the benefits of having a significant performance while keeping a simple form that can be easily achieved with standard MEMS techniques and thus successively marketed in perspective. This transducer consists of a circular or square membrane, a centered backing electrode with the same shape, but with smaller dimensions which define a thin fluid layer between them, and a small cavity at the periphery of the backing electrode whose external dimensions are very close to the ones of the membrane. The architecture of the developed sensor is the subject of a deep theoretical study of its behavior. This investigation is based upon two original mathematical approaches (analytical and numerical ones) whose results show a high convergence despite the different-levels of simplifying assumptions on which these models are based.Finally, the transducer is made with the use of a hybrid technology, that includes the MEMS process associated with conventional printed circuit manufacturing techniques, which is presented step by step. The developed prototype is characterized experimentally and the measured results correspond to the ones predicted by theoretical models.
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Submitted on : Thursday, August 20, 2020 - 9:43:54 AM
Last modification on : Friday, August 21, 2020 - 3:26:04 AM


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  • HAL Id : tel-02917936, version 1


Alexey Podkovskiy. Conception et réalisation d'un transducteur acoustique miniature. Acoustique [physics.class-ph]. Université du Maine, 2015. Français. ⟨NNT : 2015LEMA1003⟩. ⟨tel-02917936⟩



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