. Median--40, , p.5

. Sa-i, S. Sa-ii, and . Diversity, The table also provides the average and the median over all the LI instances of the relative deviations to the best values (maximum value for D and minimum value for S P)

J. Adams, E. Balas, and D. Zawack, The shifting bottleneck procedure for job shop scheduling, Management Science, vol.34, issue.3, pp.391-401, 1988.

R. Aggoune, Ordonnancement d'ateliers sous contraintes de disponibilité des machines, 2002.

R. M. Aiex, S. Binato, and M. G. Resende, Parallel grasp with path-relinking for job shop scheduling, Parallel Computing, vol.29, issue.4, pp.393-430, 2003.

A. Allahverdi, The third comprehensive survey on scheduling problems with setup times/costs, European Journal of Operational Research, vol.246, issue.2, pp.345-378, 2015.

A. Allahverdi, C. Ng, T. E. Cheng, and M. Y. Kovalyov, A survey of scheduling problems with setup times or costs, European journal of operational research, vol.187, issue.3, pp.985-1032, 2008.

E. Angel, E. Bampis, and L. Gourvés, Approximating the pareto curve with local search for the bicriteria tsp (1, 2) problem, Theoretical Computer Science, vol.310, issue.1-3, pp.135-146, 2004.

R. N. Anthony, Planning and control systems: A framework for analysis, 1965.

. .. Division-of-research-;-harvard, Graduate School of Business Administration

C. Artigues, M. Huguet, and P. Lopez, Generalized disjunctive constraint propagation for solving the job shop problem with time lags, Engineering Applications of Artificial Intelligence, vol.24, issue.2, pp.220-231, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00491986

C. Artigues, S. D. Péres, A. Derreumaux, O. Sibille, Y. et al., A batch optimization solver for diffusion area scheduling in semiconductor manufacturing, IFAC Proceedings Volumes, vol.39, pp.733-738, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00135012

S. Azem, R. Aggoune, and S. Dauzère-pérès, Heuristics for job shop scheduling with limited machine availability, IFAC Proceedings Volumes, vol.45, pp.1395-1400, 2012.

X. Bai, S. B. Gershwin, . Massachusetts, . Of, . Cambridge et al., A manufacturing scheduler's perspective on semiconductor fabrication, 1989.

K. R. Baker and G. D. Scudder, Sequencing with earliness and tardiness penalties: a review, Operations research, vol.38, issue.1, pp.22-36, 1990.

S. Bandyopadhyay, S. Saha, U. Maulik, D. , and K. , A simulated annealingbased multiobjective optimization algorithm: Amosa, IEEE transactions on evolutionary computation, vol.12, issue.3, pp.269-283, 2008.

M. Basseur, R. Zeng, and J. Hao, Hypervolume-based multi-objective local search, Neural Computing and Applications, vol.21, issue.8, pp.1917-1929, 2012.

A. Bitar, Ordonnancement sur machines parallèles appliqué à la fabrication de semi-conducteurs : ateliers de photolithographie, 2015.

A. Bitar, S. Dauzère-pérès, C. Yugma, and R. Roussel, A memetic algorithm to solve an unrelated parallel machine scheduling problem with auxiliary resources in semiconductor manufacturing, Journal of Scheduling, vol.19, issue.4, pp.367-376, 2016.
URL : https://hal.archives-ouvertes.fr/emse-01278268

J. B?a?ewicz, W. Domschke, and E. Pesch, The job shop scheduling problem: Conventional and new solution techniques, European journal of operational research, vol.93, issue.1, pp.1-33, 1996.

J. Blazewicz, K. H. Ecker, E. Pesch, G. Schmidt, and J. Weglarz, Handbook on scheduling: from theory to applications, 2007.

A. Blot, M. Kessaci, J. , and L. , Survey and unification of local search techniques in metaheuristics for multi-objective combinatorial optimisation, Journal of Heuristics, vol.24, issue.6, pp.853-877, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01840111

C. Blum and A. Roli, Metaheuristics in combinatorial optimization: Overview and conceptual comparison, ACM computing surveys (CSUR), vol.35, issue.3, pp.268-308, 2003.

E. H. Bowman, The schedule-sequencing problem, Operations Research, vol.7, issue.5, pp.621-624, 1959.

P. Brandimarte, Routing and scheduling in a flexible job shop by tabu search, Annals of Operations research, vol.41, issue.3, pp.157-183, 1993.

D. Brockhoff and E. Zitzler, Dimensionality reduction in multiobjective optimization: The minimum objective subset problem, Operations Research Proceedings, pp.423-429, 2006.

P. Brucker, Scheduling algorithms, 2007.

P. Brucker, A. Gladky, H. Hoogeveen, M. Y. Kovalyov, C. N. Potts et al., Scheduling a batching machine, Journal of scheduling, vol.1, issue.1, pp.31-54, 1998.

P. Brucker and R. Schlie, Job-shop scheduling with multi-purpose machines, Computing, vol.45, issue.4, pp.369-375, 1990.

M. Bureau, S. Dauzère-pérès, and Y. Mati, Scheduling challenges and approaches in semiconductor manufacturing, IFAC Proceedings Volumes, vol.39, pp.739-744, 2006.

A. Caumond, P. Lacomme, and N. Tchernev, A memetic algorithm for the job-shop with time-lags, Computers & Operations Research, vol.35, issue.7, pp.2331-2356, 2008.
URL : https://hal.archives-ouvertes.fr/hal-02086252

S. Chang, L. Lee, L. Pang, T. Chen, Y. Weng et al., Iterative capacity allocation and production flow estimation for scheduling semiconductor fabrication, Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium.'Manufacturing Technologies-Present and Future, pp.508-512, 1995.

I. A. Chaudhry and A. A. Khan, A research survey: review of flexible job shop scheduling techniques, International Transactions in Operational Research, vol.23, issue.3, pp.551-591, 2016.

K. Chuang and K. Lin, Target generation system based on unlimited capacity allocation, US Patent, vol.6, p.655, 2003.

R. Cigolini, M. Perona, A. Portioli, and T. Zambelli, A new dynamic look-ahead scheduling procedure for batching machines, Journal of scheduling, vol.5, issue.2, pp.185-204, 2002.

T. H. Cormen, C. E. Leiserson, R. L. Rivest, and C. Stein, Introduction to algorithms, 2009.

S. Dauzère-péres and J. Lasserre, An integrated approach in production planning and scheduling, vol.411, 2012.

S. Dauzère-pérès and J. Paulli, An integrated approach for modeling and solving the general multiprocessor job-shop scheduling problem using tabu search, Annals of Operations Research, vol.70, pp.281-306, 1997.

S. Dauzere-péres, J. Rouveyrol, C. Yugma, and P. Vialletelle, A smart sampling algorithm to minimize risk dynamically, 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pp.307-310, 2010.

K. De-bontridder, Minimizing total weighted tardiness in a generalized job shop, Journal of Scheduling, vol.8, issue.6, pp.479-496, 2005.

M. Dorigo, D. Caro, and G. , Ant colony optimization: a new meta-heuristic, Proceedings of the 1999 congress on evolutionary computation-CEC99 (Cat. No. 99TH8406), vol.2, pp.1470-1477, 1999.

M. A. Dümmler, Using simulation and genetic algorithms to improve cluster tool performance, Proceedings of the 31st Conference on Winter Simulation: Simulation, WSC '99, pp.875-879, 1999.

M. Ehrgott and D. Tenfelde-podehl, Computation of ideal and nadir values and implications for their use in mcdm methods, European Journal of Operational Research, vol.151, issue.1, pp.119-139, 2003.

S. Eppe, M. López-ibáñez, T. Stützle, and Y. D. Smet, An experimental study of preference model integration into multi-objective optimization heuristics, 2011 IEEE Congress of Evolutionary Computation (CEC), pp.2751-2758, 2011.

D. Eppstein, Parallel recognition of series-parallel graphs. Information and Computation, vol.98, pp.41-55, 1992.

I. Essafi, Y. Mati, and S. Dauzère-pérès, A genetic local search algorithm for minimizing total weighted tardiness in the job-shop scheduling problem, Computers & Operations Research, vol.35, issue.8, pp.2599-2616, 2008.
URL : https://hal.archives-ouvertes.fr/emse-00520349

G. W. Evans, An overview of techniques for solving multiobjective mathematical programs, Management Science, vol.30, issue.11, pp.1268-1282, 1984.

T. A. Feo and M. G. Resende, Greedy randomized adaptive search procedures, Journal of Global Optimization, vol.6, issue.2, pp.109-133, 1995.

J. E. Fieldsend, R. M. Everson, and S. Singh, Using unconstrained elite archives for multiobjective optimization, IEEE Transactions on Evolutionary Computation, vol.7, issue.3, pp.305-323, 2003.

C. M. Fonseca and P. J. Fleming, Multiobjective genetic algorithms, Genetic algorithms for control systems engineering, pp.6-7, 1993.

C. M. Fonseca, L. Paquete, and M. Lopez-ibanez, An improved dimension-sweep algorithm for the hypervolume indicator, 2006 IEEE International Conference on Evolutionary Computation, pp.1157-1163, 2006.

J. M. Framinan, R. Leisten, and R. R. García, Manufacturing Scheduling Systems: An Integrated View on Models, 2014.

J. M. Framinan, R. Leisten, R. García, and R. , Multi-Objective Scheduling, pp.261-288, 2014.

J. Gao, M. Gen, and L. Sun, Scheduling jobs and maintenances in flexible job shop with a hybrid genetic algorithm, Journal of Intelligent Manufacturing, vol.17, issue.4, pp.493-507, 2006.

A. García-león, S. Dauzère-pérès, and Y. Mati, Minimizing regular criteria in the flexible job-shop scheduling problem, 7th Multidisciplinary International Conference on Scheduling: Theory & Applications, pp.443-456, 2015.

A. A. García-león, S. Dauzère-pérès, and Y. Mati, An efficient pareto approach for solving the multi-objective flexible job-shop scheduling problem with regular criteria, Computers & Operations Research, vol.108, pp.187-200, 2019.

M. R. Garey, D. S. Johnson, and R. Sethi, The complexity of flowshop and jobshop scheduling. Mathematics of operations research, vol.1, pp.117-129, 1976.

C. D. Geiger, K. G. Kempf, and R. Uzsoy, A tabu search approach to scheduling an automated wet etch station, Journal of Manufacturing Systems, vol.16, issue.2, pp.102-116, 1997.

F. Glover, Tabu search-part i, ORSA Journal on computing, vol.1, issue.3, pp.190-206, 1989.

D. E. Goldberg and J. H. Holland, Genetic algorithms and machine learning. Machine learning, vol.3, pp.95-99, 1988.

J. F. Gonçalves, J. J. De-magalhães-mendes, and M. G. Resende, A hybrid genetic algorithm for the job shop scheduling problem, European journal of operational research, vol.167, issue.1, pp.77-95, 2005.

M. A. González, C. R. Vela, I. González-rodríguez, and R. Varela, Lateness minimization with tabu search for job shop scheduling problem with sequence dependent setup times, Journal of Intelligent Manufacturing, vol.24, issue.4, pp.741-754, 2013.

M. A. González, A. Oddi, R. Rasconi, and R. Varela, Scatter search with path relinking for the job shop with time lags and setup times, Computers & Operations Research, vol.60, pp.37-54, 2015.

N. Govind, E. W. Bullock, L. He, B. Iyer, M. Krishna et al., Operations management in automated semiconductor manufacturing with integrated targeting, near real-time scheduling, and dispatching, IEEE Transactions on Semiconductor Manufacturing, vol.21, issue.3, pp.363-370, 2008.

J. Grabowski, E. Nowicki, and S. Zdrza?ka, A block approach for single-machine scheduling with release dates and due dates, European Journal of Operational Research, vol.26, issue.2, pp.278-285, 1986.

R. L. Graham, E. L. Lawler, J. K. Lenstra, and A. R. Kan, Optimization and approximation in deterministic sequencing and scheduling: a survey, Annals of discrete mathematics, vol.5, pp.287-326, 1979.

R. L. Graham, E. L. Lawler, J. K. Lenstra, R. Kan, and A. , Optimization and approximation in deterministic sequencing and scheduling: a survey, Annals of Discrete Mathematics, vol.5, pp.287-326, 1977.

N. G. Hall and C. Sriskandarajah, A survey of machine scheduling problems with blocking and no-wait in process, Operations research, vol.44, issue.3, pp.510-525, 1996.

M. Ham and J. W. Fowler, Scheduling of wet etch and furnace operations with next arrival control heuristic, The International Journal of Advanced Manufacturing Technology, vol.38, issue.9, pp.1006-1017, 2008.

M. Ham, M. Raiford, F. Dillard, W. Risner, M. Knisely et al., Dynamic wet-furnace dispatching/scheduling in wafer fab, The 17th Annual SEMI/IEEE ASMC 2006 Conference, pp.144-147, 2006.

P. Hansen and N. Mladenovi?, Variable neighborhood search for the p-median, Location Science, vol.5, issue.4, pp.207-226, 1997.

Z. He, T. Yang, and A. Tiger, An exchange heuristic imbedded with simulated annealing for due-dates job-shop scheduling, European Journal of Operational Research, vol.91, issue.1, pp.99-117, 1996.

K. Huang and C. Liao, Ant colony optimization combined with taboo search for the job shop scheduling problem, Computers & operations research, vol.35, issue.4, pp.1030-1046, 2008.

J. Hurink, B. Jurisch, and M. Thole, Tabu search for the job-shop scheduling problem with multi-purpose machines, Operations-Research-Spektrum, vol.15, issue.4, pp.205-215, 1994.

H. Ishibuchi, Y. Sakane, N. Tsukamoto, and Y. Nojima, Evolutionary manyobjective optimization by nsga-ii and moea/d with large populations, SMC 2009. IEEE International Conference on, pp.1758-1763, 2009.

A. S. Jain and S. Meeran, Deterministic job-shop scheduling: Past, present and future, European journal of operational research, vol.113, issue.2, pp.390-434, 1999.

S. M. Johnson, Optimal two-and three-stage production schedules with setup times included, Naval research logistics quarterly, vol.1, issue.1, pp.61-68, 1954.

C. Johnzén, S. Dauzère-pérès, and P. Vialletelle, Flexibility measures for qualification management in wafer fabs, Production Planning and Control, vol.22, issue.1, pp.81-90, 2011.

Y. Kao and S. Chang, Setting daily production targets with novel approximation of target tracking operations for semiconductor manufacturing, Journal of manufacturing systems, vol.49, pp.107-120, 2018.

H. Kim, J. Lee, and T. Lee, Scheduling a wet station using a branch and bound algorithm, 2012 IEEE International Conference on Systems, Man, and Cybernetics (SMC), pp.2097-2102, 2012.

H. Kim, J. Lee, and T. Lee, Non-cyclic scheduling of a wet station, IEEE Transactions on Automation Science and Engineering, vol.11, issue.4, pp.1262-1274, 2014.

S. Kirkpatrick, Optimization by simulated annealing: Quantitative studies, Journal of statistical physics, vol.34, issue.5-6, pp.975-986, 1984.

T. Kis, Job-shop scheduling with processing alternatives, European Journal of Operational Research, vol.151, issue.2, pp.307-332, 2003.

A. Klemmt and L. Mönch, Scheduling jobs with time constraints between consecutive process steps in semiconductor manufacturing, Proceedings of the 2012 Winter Simulation Conference (WSC), 2012.

S. Knopp, Complex Job-Shop Scheduling with Batching in Semiconductor Manufacturing, 2016.
URL : https://hal.archives-ouvertes.fr/tel-01665198

S. Knopp, S. Dauzère-pérès, Y. , and C. , Flexible job-shop scheduling with extended route flexibility for semiconductor manufacturing, Proceedings of the 2014 Winter Simulation Conference, WSC '14, pp.2478-2489, 2014.
URL : https://hal.archives-ouvertes.fr/emse-01792290

S. Knopp, S. Dauzère-pérès, Y. , and C. , A batch-oblivious approach for complex job-shop scheduling problems, European Journal of Operational Research, vol.263, issue.1, pp.50-61, 2017.
URL : https://hal.archives-ouvertes.fr/hal-02067305

J. Knowles and D. Corne, Bounded pareto archiving: Theory and practice, Metaheuristics for multiobjective optimisation, pp.39-64, 2004.

R. Kohn and O. Rose, The impact of accuracy in lot arrival prediction on solution quality for the parallel batch machine scheduling problem in wafer fabrication, pp.121-132, 2013.

P. Lacomme, N. Tchernev, and M. Huguet, Job-shop with generic time lags: a heuristic based approach, 9th International Conference of Modeling, Optimization and Simulation-MOSIM, vol.12, pp.6-08, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00728690

C. Lee, Two-machine flowshop scheduling with availability constraints, European Journal of Operational Research, vol.114, issue.2, pp.420-429, 1999.

C. Lee, R. Uzsoy, and L. A. Martin-vega, Efficient algorithms for scheduling semiconductor burn-in operations, Operations Research, vol.40, issue.4, pp.764-775, 1992.

T. Lee, A review of scheduling theory and methods for semiconductor manufacturing cluster tools, Proceedings of the 40th conference on winter simulation, pp.2127-2135, 2008.

T. Lee, H. Lee, and S. Lee, Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots, International Journal of Production Research, vol.45, issue.3, pp.487-507, 2007.

Y. Lee, Z. Jiang, Z. Huai, C. Ko, M. Zambri et al., A study of multiple objectives real-time dispatcher for wafer fabrication, 2008 International Symposium on Semiconductor Manufacturing (ISSM), pp.163-166, 2008.

Y. Lee, C. Lin, P. Hsu, K. Lo, M. Hsu et al., An integrated photolithography system framework for automatic manufacturing in mass production 300mm fab, International Symposium on Semiconductor Manufacturing, pp.1-4, 2007.

A. Liefooghe, Métaheuristiques pour l'optimisation multiobjectif: Approches coopératives, prise en compte de l'incertitude et application en logistique, 2009.

Y. Liu, N. Zhu, K. Li, M. Li, J. Zheng et al., An angle dominance criterion for evolutionary many-objective optimization, Information Sciences, 2019.

H. R. Lourenço, O. C. Martin, and T. Stützle, Iterated local search, Handbook of metaheuristics, pp.320-353, 2003.

S. C. Lu, D. Ramaswamy, and P. R. Kumar, Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants, IEEE Transactions on Semiconductor Manufacturing, vol.7, issue.3, pp.374-388, 1994.

Y. Ma, C. Chu, and C. Zuo, A survey of scheduling with deterministic machine availability constraints, Computers & Industrial Engineering, vol.58, issue.2, pp.199-211, 2010.

R. T. Marler and J. S. Arora, Survey of multi-objective optimization methods for engineering. Structural and multidisciplinary optimization, vol.26, pp.369-395, 2004.

A. Mascis and D. Pacciarelli, Job-shop scheduling with blocking and no-wait constraints, European Journal of Operational Research, vol.143, issue.3, pp.498-517, 2002.

S. Mason, J. Fowler, W. Carlyle, M. , and D. , Heuristics for minimizing total weighted tardiness in complex job shops, International Journal of Production Research, vol.43, issue.10, pp.1943-1963, 2005.

S. J. Mason and K. Oey, Scheduling complex job shops using disjunctive graphs: a cycle elimination procedure, International Journal of Production Research, vol.41, issue.5, pp.981-994, 2003.

M. Mastrolilli and L. M. Gambardella, Effective neighbourhood functions for the flexible job shop problem, Journal of Scheduling, vol.3, issue.1, pp.3-20, 2000.

M. Mathirajan and A. Sivakumar, A literature review, classification and simple metaanalysis on scheduling of batch processors in semiconductor, The International Journal of Advanced Manufacturing Technology, vol.29, issue.9, pp.990-1001, 2006.

Y. Mati, Minimizing the makespan in the non-preemptive job-shop scheduling with limited machine availability, Computers & Industrial Engineering, vol.59, issue.4, pp.537-543, 2010.

Y. Mati, S. Dauzère-pérès, and C. Lahlou, A general approach for optimizing regular criteria in the job-shop scheduling problem, European Journal of Operational Research, vol.212, issue.1, pp.33-42, 2011.
URL : https://hal.archives-ouvertes.fr/emse-00613008

L. Michel and P. Van-hentenryck, Maintaining longest paths incrementally, Principles and Practice of Constraint Programming-CP 2003, pp.540-554, 2003.

L. Mönch and R. Drießel, A distributed shifting bottleneck heuristic for complex job shops, Computers & Industrial Engineering, vol.49, issue.3, pp.363-380, 2005.

L. Mönch, J. Fowler, and S. Mason, Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems, Operations Research Computer Science Interfaces Series, vol.52, 2012.

L. Mönch, J. W. Fowler, S. Dauzère-pérès, S. J. Mason, R. et al., A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations, Journal of Scheduling, vol.14, issue.6, pp.583-599, 2011.

L. Mönch and O. Rose, Shifting-Bottleneck-Heuristik für komplexe Produktionssysteme: Softwaretechnische Realisierung und Leistungsbewertung. Quantitative Methoden in ERP und SCM, DSOR Beiträge zur Wirtschaftsinformatik, vol.2, pp.145-159, 2004.

L. Mönch, R. Schabacker, D. Pabst, and J. W. Fowler, Genetic algorithm-based subproblem solution procedures for a modified shifting bottleneck heuristic for complex job shops, European Journal of Operational Research, vol.177, issue.3, pp.2100-2118, 2007.

J. M. Moore, An n job, one machine sequencing algorithm for minimizing the number of late jobs, Management science, vol.15, issue.1, pp.102-109, 1968.

L. Mönch and S. Roob, A matheuristic framework for batch machine scheduling problems with incompatible job families and regular sum objective, Applied Soft Computing, vol.68, pp.835-846, 2018.

B. Naderi, S. F. Ghomi, A. , and M. , A high performing metaheuristic for job shop scheduling with sequence-dependent setup times, Applied Soft Computing, vol.10, issue.3, pp.703-710, 2010.

H. Niedermayer and O. Rose, Approximation of the cycle time of cluster tools in semiconductor manufacturing, Proceedings of the industrial engineering research conference, pp.1-6, 2004.

J. M. Novas and G. P. Henning, A comprehensive constraint programming approach for the rolling horizon-based scheduling of automated wet-etch stations, Computers & Chemical Engineering, vol.42, pp.189-205, 2012.

E. Nowicki and C. Smutnicki, A fast taboo search algorithm for the job shop problem, Management science, vol.42, issue.6, pp.797-813, 1996.

I. M. Ovacik and R. Uzsoy, Decomposition methods for complex factory scheduling problems, 2012.

D. J. Pearce and P. H. Kelly, A dynamic topological sort algorithm for directed acyclic graphs, Journal of Experimental Algorithmics (JEA), vol.11, pp.1-7, 2007.

M. Pinedo, Scheduling: Theory, Algorithms, and Systems, 2016.

M. Pinedo and M. Singer, A shifting bottleneck heuristic for minimizing the total weighted tardiness in a job shop, Naval Research Logistics (NRL), vol.46, issue.1, pp.1-17, 1999.

C. N. Potts and M. Y. Kovalyov, Scheduling with batching: a review, European Journal of Operational Research, vol.120, issue.2, pp.228-249, 2000.

L. Rachmawati and D. Srinivasan, Preference incorporation in multi-objective evolutionary algorithms: A survey, Evolutionary Computation, 2006. CEC 2006. IEEE Congress on, pp.962-968, 2006.

M. G. Resendel and C. C. Ribeiro, Grasp with path-relinking: Recent advances and applications, Metaheuristics: progress as real problem solvers, pp.29-63, 2005.

G. L. Rodriguez-verjan, S. Dauzère-pérès, and J. Pinaton, Optimized allocation of defect inspection capacity with a dynamic sampling strategy, Computers & Operations Research, vol.53, pp.319-327, 2015.
URL : https://hal.archives-ouvertes.fr/emse-01555584

A. Rotondo, P. Young, and J. Geraghty, Sequencing optimisation for makespan improvement at wet-etch tools, Computers & Operations Research, vol.53, pp.261-274, 2015.

A. Rotondo, P. Young, and J. Geraghty, Sequencing optimisation for makespan improvement at wet-etch tools, Computers & Operations Research, vol.53, pp.261-274, 2015.

M. Rowshannahad, S. Dauzere-peres, and B. Cassini, Capacitated qualification management in semiconductor manufacturing, Omega, vol.54, pp.50-59, 2015.
URL : https://hal.archives-ouvertes.fr/emse-01278273

B. Roy and B. Sussmann, Les problèmes d'ordonnancement avec contraintes disjonctives. Note ds, p.9, 1964.

R. Sadeghi, Consistency of global and local scheduling decisions in semiconductor manufacturing, 2017.

R. Sadeghi, S. Dauzère-pérès, C. Yugma, and L. Vermarien, Consistency between global and local scheduling decisions in semiconductor manufacturing: an application to time constraint management, International Symposium on Semiconductor Manufacturing Intelligence (ISMI), p.5, 2015.

G. Schmidt, Scheduling with limited machine availability, European Journal of Operational Research, vol.121, issue.1, pp.1-15, 2000.

J. R. Schott and ;. Oh, Fault tolerant design using single and multicriteria genetic algorithm optimization, 1995.

L. Shen, A tabu search algorithm for the job shop problem with sequence dependent setup times, Computers & Industrial Engineering, vol.78, pp.95-106, 2014.

L. Shen, S. Dauzère-pérès, and J. S. Neufeld, Solving the flexible job shop scheduling problem with sequence-dependent setup times, European Journal of Operational Research, vol.265, issue.2, pp.503-516, 2018.
URL : https://hal.archives-ouvertes.fr/emse-01792233

O. Sobeyko and L. Mönch, Heuristic approaches for scheduling jobs in large-scale flexible job shops, Computers & Operations Research, vol.68, pp.97-109, 2016.

E. D. Taillard, Parallel taboo search techniques for the job shop scheduling problem, ORSA journal on Computing, vol.6, issue.2, pp.108-117, 1994.

K. Tamssaouet, S. Dauzère-pérès, Y. , and C. , Metaheuristics for the job-shop scheduling problem with machine availability constraints, Computers & Industrial Engineering, vol.125, pp.1-8, 2018.
URL : https://hal.archives-ouvertes.fr/emse-02023995

K. Tamssaouet, S. Dauzère-pérès, Y. , and C. , Minimizing makespan on parallel batch processing machines, 16th International Conference on Project Management and Scheduling, pp.229-232, 2018.

K. Tamssaouet, S. Dauzère-pérès, C. Yugma, S. Knopp, and J. Pinaton, A study on the integration of complex machines in complex job shop scheduling, Winter Simulation Conference (WSC), pp.3561-3572, 2018.
URL : https://hal.archives-ouvertes.fr/emse-02023947

V. T'kindt and J. Billaut, Multicriteria scheduling: theory, models and algorithms, 2006.

E. Ulungu, J. Teghem, P. Fortemps, and D. Tuyttens, Mosa method: a tool for solving multiobjective combinatorial optimization problems, Journal of Multi-Criteria Decision Analysis, vol.8, issue.4, pp.221-236, 1999.

R. Uzsoy, C. Lee, and L. A. Martin-vega, A review of production planning and scheduling models in the semiconductor industry part ii: Shop-floor control, IIE transactions, vol.26, issue.5, pp.44-55, 1994.

P. J. Van-laarhoven, E. H. Aarts, and J. K. Lenstra, Job shop scheduling by simulated annealing, Operations research, vol.40, issue.1, pp.113-125, 1992.

C. Voudouris and E. Tsang, Guided local search and its application to the traveling salesman problem, European journal of operational research, vol.113, issue.2, pp.469-499, 1999.

G. Wu, K. Wei, C. Tsai, S. Chang, N. Wang et al., Tss: a daily production target setting system for fabs, Semiconductor Manufacturing Technology Workshop (Cat. No. 98EX133), pp.86-98, 1998.

K. Wu, A Unified View on Planning, Scheduling and Dispatching in Production Systems. ArXiv e-prints, 2014.

C. Yugma, J. Blue, S. Dauzère-pérès, and A. Obeid, Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook, Journal of Scheduling, vol.18, issue.2, pp.195-205, 2015.
URL : https://hal.archives-ouvertes.fr/emse-01555604

C. Yugma, S. Dauzère-pérès, C. Artigues, A. Derreumaux, and O. Sibille, A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing, International Journal of Production Research, vol.50, issue.8, pp.2118-2132, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00515701

X. Zhang, Scheduling with Time Lags, 2010.

E. Zitzler, Evolutionary algorithms for multiobjective optimization: Methods and applications, vol.63, 1999.

E. Zitzler, L. Thiele, M. Laumanns, C. M. Fonseca, and V. G. Da-fonseca, Performance assessment of multiobjective optimizers: an analysis and review, IEEE Transactions on Evolutionary Computation, vol.7, issue.2, pp.117-132, 2003.

J. Zoghby, J. W. Barnes, and J. J. Hasenbein, Modeling the reentrant job shop scheduling problem with setups for metaheuristic searches, European Journal of Operational Research, vol.167, issue.2, pp.336-348, 2005.

N. Zribi, A. El-kamel, and P. Borne, Minimizing the makespan for the mpm job-shop with availability constraints, International Journal of Production Economics, vol.112, issue.1, pp.151-160, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00836661