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Elaboration et caractérisation de AZO 2% en couches minces et son application à la détection de gaz par la mesure du bruit basse fréquence

Abstract : In this work, we realized and characterized thin films of AZO for ultra-sensitive sensor applications operating at ambient temperature. The gas detection method chosen is the method of measuring low frequency noise (LF). The development of the material is carried out by means of a magnetron RF sputtering frame. We investigated the effect of different deposition parameters on electrical resistivity in order to find a compromise between them and lead us to a low resistivity. For this, we studied the influence of the thickness of thin films of AZO (50 nm to 450 nm) on the structural, morphological, electrical properties (in continuous and noise LF). Then a study of the effect of RF deposition power and post-deposit annealing on the different properties is presented. The detection properties of the AZO series with varying thicknesses at room temperature in the presence of argon or oxygen at different pressures by the LF noise method are exposed. A gas analysis platform containing all the instrumentation associated with our sensor has been developed and presented. We have studied in detail the response of the AZO series as a function of the thickness under different injected oxygen pressures, and evaluated the performance of different sensors. The results obtained showed that the detection of oxygen by the measurement of LF noise is more sensitive than by the continuous method. We concluded from this study that: i) the noise level in 1/f measured for a given direct current in the presence of oxygen decreased compared to its level reached in the ambient air, ii) the sensitivity Gₙₒᵢₛₑ increases with the increase in the thickness of the active layer of AZO of the sensor, iii) the sensitivity Gₙₒᵢₛₑ increases with the pressure of oxygen then saturates, iv) the response time increases with increasing thickness of the active layer.
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Abicha Agnaou. Elaboration et caractérisation de AZO 2% en couches minces et son application à la détection de gaz par la mesure du bruit basse fréquence. Science des matériaux [cond-mat.mtrl-sci]. Université du Littoral Côte d'Opale, 2019. Français. ⟨NNT : 2019DUNK0548⟩. ⟨tel-02879097⟩

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