, Table des propriétés : propriétés à vérifier de la plaquette, système de métrologie associé, étapes de production contrôlées, nombre de machines de production contrôlées, difficulté à qualifier les machines de métrologie pour effectuer la mesure
, Temps et politiques d'échantillonnage : temps moyens de mesure et de file d'attente pour chaque atelier de métrologie, nombre d'opérations de métrologie précédentes exécutées et politiques d'échantillonnage actuelles
, Identification des propriétés du système de métrologie
, Analyse du lien entre le groupe de machines de production et les machines de métrologie
, Vérification de l'écart possible à améliorer et sélection des indicateurs de performance clés
, Identification de la stratégie d'échantillonnage actuelle, analyse de la mise en oeuvre d'une nouvelle stratégie d'échantillonnage et calcul de nouveaux taux d'échantillonnage
, Advanced Process Control): Set of techniques used for controlling machines and processes: SPC, FDC, R2R and VM
Time spent by a lot in a workshop or in the entire fab ,
Individual chip cut from a silicon wafer ,
The way that lots are sent to the next route step, it involves the decision of selecting a given process machine or metrology tool among a group of candidates ,
Out of control specification on a process or machine ,
Semiconductor fabrication plant, where integrated circuits are manufactured ,
,
Fault Detection and Classification technique): Technique which consists in statistically monitoring process variations by analyzing process machine parameters ,
Integrated circuit): Collection of electronic circuits built on a single piece of silicon substrate ,
Last-In, First-Out, i.e. the last lot arriving in a area is the first one to leave. ? Lot: Group of wafers ,
A lot that belongs to a product which recipe exists in the metrology tool and thus can be measured ,
Science of measurement, and the term is related to control operations performed by metrology tools to gather specific properties of wafers ,
Possibility for a metrology tool to measure a given lot by registering on it the recipe for measuring the product of the lot ,
Time spent by a lot between the process operation finishes and the measure operation starts ,
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