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Risk minimization through metrology in semiconductor manufacturing

Abstract : This thesis consists in analyzing the different properties of metrology workshops, proposing novel approaches to optimize sampling rates and developing new dynamic strategies for risk reduction in semiconductor manufacturing.A thorough analysis of metrology workshops in the site of Rousset of STMicroelectronics has been carried out. Their physical properties and also their characteristics, such as measure qualification, lot sampling and dispatching strategy and risk levels, are considered. Also, a new procedure is developed that helps to determine which sampling strategy fits better according to the metrology workshop characteristics and risk values.New approaches are then proposed to optimize the sampling rates for different types of metrology tools respecting the metrology capacity and taking into account parameters such as throughput rates of process machines and metrology tools, and the failure probabilities of process machines. The numerical experiments show that the metrology capacity is better used and process machines are efficiently controlled, depending on their characteristics, paying more attention the critical machines.In the final part of the thesis, simulation models of several metrology workshops are developed. These models reproduce the behaviour of the workshops to better understand them and to evaluate the impact of proposed improvements.
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  • HAL Id : tel-02878704, version 1



Juan Alejandro Sendon Perez. Risk minimization through metrology in semiconductor manufacturing. Other. Université de Lyon, 2017. English. ⟨NNT : 2017LYSEM022⟩. ⟨tel-02878704⟩



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