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Design and fabrication of a MEMS scanner for OCT imaging endo-microscopic probe

Abstract : The work presented in this manuscript consists in the conception of an electro-thermo-mechanical optical micro-scanner. In a first time, a design and a model are proposed and the micro-device was fabricated, characterized and a draft of integration onto a Mirau micro-interferometer was carried out in order to build an endoscopic probe for the detection of early stage gastrointestinal cancers using an imaging technique called Optical Coherence Tomography (OCT). The very contribution of the thesis is the development and the fabrication of micro actuators driven electrothermally to control the angular position a micro mirror plate conceived in this purpose. Different architectures of micro-scanners are proposed to best comply with the specifications determined by both the optical expectations and the medical standards requirements of the final apparatus emph{in vivo}.This work, part of a project called textquote{DEMO4} was financed by the French LabEx Action funding source in cooperation between the departments AS2M and MN2S of the French research institute Femto-ST as well as the university of Florida in the USA to deliver a first demonstrator of endoscopic OCT probe.Several batches of fabrication were realized my means of techniques of ac{CMOS}-based microfabrication in exchange between Femto-ST and the university of Florida before being assembled (for lack of monolithic integration capability) onto a micro-interferometer using automated processes specifically developed in this purpose.Finally, an experimental setup is proposed to characterize in order to evaluate the performances achieved and initiate the first tests of optical imaging using the micro-system.
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Submitted on : Thursday, May 28, 2020 - 11:28:17 AM
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  • HAL Id : tel-02639175, version 1


Quentin Tanguy. Design and fabrication of a MEMS scanner for OCT imaging endo-microscopic probe. Micro and nanotechnologies/Microelectronics. Université Bourgogne Franche-Comté, 2018. English. ⟨NNT : 2018UBFCD035⟩. ⟨tel-02639175⟩



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