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Traitements laser UV de couches de carbone amorphe adamantin (DLC) obtenues par ablation laser pulsée (PLD) : application à la synthèse d'électrodes transparentes

Abstract : One of the biggest challenge that optoelectronic and photovoltaic devices will have to face is the necessity to provide a reliable alternative to transparent conducting oxide (TCO) and especially to Indium Thin Oxide (ITO) widely used in display technologies. This thesis presents an alternative solution based on laser processes and carbon materials only. In a first step, Diamond-Like Carbon (DLC) is grown with a pulsed laser deposition (PLD) process. DLC is an amorphous form of carbon sharing many properties with diamond like very high transparency in the visible range and being a perfect electrical insulator. Therefore, in a second step, DLC thin films are annealed with UV laser. These surface treatments lead to the modification of the first DLC atomic layers. With this step, dominating diamond bindings (sp3) responsible of insulating properties of DLC are broken and atoms will be reorganized in graphitic bindings (sp2) leading to surface conductivity appearance. Within only surface modifications (over a few atomic layers), the interesting property of transparency is conserved with an additional attractive surface conductivity. Obtained performances clearly approach and reach ITO values. This only laser-based process offers very interesting perspectives with keeping an important compatibility with standard microelectronics technical steps.
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Submitted on : Thursday, March 26, 2020 - 12:48:12 PM
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  • HAL Id : tel-02519837, version 2

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François Stock. Traitements laser UV de couches de carbone amorphe adamantin (DLC) obtenues par ablation laser pulsée (PLD) : application à la synthèse d'électrodes transparentes. Micro et nanotechnologies/Microélectronique. Université de Strasbourg, 2019. Français. ⟨NNT : 2019STRAD035⟩. ⟨tel-02519837v2⟩

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