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Nouveaux MEMS C-BAR : résonateurs capacitifs à ondes élastiques de volume piégées sur substrat Silicium.

Abstract : This PhD work describes the study and realization of capacitive Bulk Acoustic Waves MEMS resonators (C-BAR) exploiting the thicknessextensional vibration modes at 9, 45MHz of a mono-crystalline silicon plate (100). The aim of this research consists in translated to the domain of capacitive MEMS the good performances of BAW resonators for embedded frequency sources. The proposed work proposes new resonant structures bearing some originality from electric and acoustic viewpoints : capacitive full Si-MEMS have some immediate interest in the field of material availability, low cost per item, volume production and robustness, notwithstanding their know ability for electronic integration ; This research was motivated by the need to eliminate structural losses to reach the limits imposed by the material itself. With help of a study of dispersion curves, we managed a control of acoustic confinement by means of a local patterning of the surface of the vibrating element. By a proper mastering of the stop band of guided elastic waves in the structure, we can overcome the intrinsic limitations of structural MEMS. The first lock of this work is dedicated to the modeling of the C-BARs. It uses a combination of analytic and FEA calculations to frame the actual design of the resonators. This permits us to determine the limits imposed to the performances of such structures. This part especially points out the contradictory requirements of the C-BARs in terms of electromechanical coupling factor and of surtension coefficient. The second lock describes the issues of the micro-fabrication of the C-BARs at MIMENTO clean room facility.
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Nesrine Belkadi. Nouveaux MEMS C-BAR : résonateurs capacitifs à ondes élastiques de volume piégées sur substrat Silicium.. Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2016. Français. ⟨NNT : 2016BESA2088⟩. ⟨tel-02466459⟩

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