79 2.2.3 Microscope électronique à balayage, p.80 ,
80 2.2.5 Microscope électronique à transmission, Diffraction des électrons rétrodiffusés, p.81 ,
, Système de mesure des propriétés électriques, p.85
,
, Dans ce contexte, une attention particulière a été portée sur l'élaboration de films cohérents ultraminces (< 8nm) de nitrure de niobium. Toutefois, la description des limites du procédé et son optimisation a révélé que le procédé recèle un formidable potentiel pour répondre à une grande variété de besoins en films minces épitaxiés et supraconducteurs. L'étude bibliographique a permis d'exposer la complexité du système Nb-N. Il présente 9 phases polymorphiques toutes issues de structures cubiques ou hexagonales. Elles s'obtiennent par l'introduction de défauts lacunaires ordonnés. Ces phases sont pour la plupart supraconductrices, mais la phase cubique face centrée Fm-3m ?-NbN possède les meilleures caractéristiques supraconductrices du système (T c = 17 K) et a été la phase d'intérêt de cette étude. Le système Nb-N est non stoechiométrique et plusieurs phases existent sous de grandes plages de composition. Ces phases sont composées de défauts lacunaires statistiques. Le ?-NbN x en particulier, L'objectif de cette thèse visait à développer une nouvelle voie d'élaboration des films de nitrure de niobium monocristallins par la technique de dépôt chimique en phase vapeur. L'application finale visée est la détection de photons uniques
Sa très faible longueur de cohérence (? 5 nm) permet son utilisation en couche ultra-mince. Le matériau est un supraconducteur de type II avec une longueur de pénétration ?, pp.170-370 ,
, Le ?-NbN est polyvalent. Il peut former une solution solide de substitution avec différents métaux de, Le matériau est donc adapté aux applications qui requièrent l'utilisation de champs magnétiques
, Le ?-NbN est un matériau aux propriétés supraconductrices très variables
, Cette disparité des résultats observés dans la littérature a motivé l'étude des relations entre les caractéristiques structurales et les propriétés supraconductrices des films. La possibilité de former des films épitaxiés de très haute qualité cristalline a permis de s'affranchir de plusieurs artefacts provenant de la présence d'autres phases ou de polycristaux, cette étude, les mécanismes d'épitaxie du NbN ont été observés, discutés et modélisés. Une étude phénoménologique couplant des analyses de structure (DRX, TEM, EBSD) et de surface (MEB, AFM) a été réalisée
il a été démontré la possibilité d'épitaxier la phase ?-NbN sur un substrat ?-Al 2 O 3 orienté selon l'axe c. Les analyses effectuées par MET Bibliographie ,
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