, 32 -Observations MEB (a) d'une première réalisation de motifs sur diamant, (b) de la surface après une première croissance, (c) de la réalisation des micro-aiguilles, (d) d'une étape intermédiaire de la coalescence du diamant
, Cette méthode de croissance a permis à l'équipe de A. Sawabe d'obtenir un film de diamant de très haute qualité cristalline avec une désorientation polaire de 0,10 ? pour une épaisseur de 75 µm [112] sur un pseudo-substrat Ir/MgO(001). Cependant, elle nécessite de nombreuses étapes (première croissance, masque de gravure, gravure, seconde croissance
, C'est pourquoi cette équipe a employé une deuxième méthode pour réaliser la croissance ELO : la structuration des domaines
, La deuxième stratégie employée par l'équipe de Sawabe consiste à structurer les domaines obtenus après l'étape de BEN par une gravure par faisceau d'électrons
, Cette méthode a l'avantage d'être plus rapide et permet de réaliser des motifs de forme ou d
, 33 -Observations par MEB de motifs (a) carré et (b) en bande
, cette surface composée d'iridium monocristallin et polycristallin, permettant d'obtenir des domaines sur les parties composées d'iridium monocristallin (5)
, FIGURE 4.36 -Schéma représentant les étapes nécessaires à la nucléation sélective du diamant hétéroépitaxié sur iridium
, Nous avons alors mis en oeuvre ce procédé sur un pseudo-substrat de SrTiO, vol.3
, Un dépôt d'iridium polycristallin d'épaisseur proche de 300 nm a ensuite été réalisé par PVD en utilisant un masque métallique. Ce dépôt nous a permis de réaliser des motifs carrés d'iridium polycristallin d'environ 150x150 µm 2 espacés de 100 µm ((b) sur la Figure 4.37). Ces zones sont celles sur lesquelles nous ne souhaitons pas obtenir de domaines, Mise en oeuvre du procédé de nucléation sélective Un film d'iridium monocristallin de 158 nm d'épaisseur a été déposé sur un pseudo-substrat de SrTiO, vol.3
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