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Micro-résonateurs intégrés pour des applications capteurs

Abstract : Micro-resonators have become key element for integrated optical sensor because they offer the advantage of significantly minimizing the device size, which allows an easily integration on lab-on-chip and greatly reduces the amount of molecules to be detected. Moreover, micro-resonators are extremely sensitive to the effective index variation induced by the presence of molecules in the detection medium. The thesis focuses on two different materials: polymers and porous silicon. Firstly, polymers, easily implementable with a low cost fabrication, are used to validate the simulation tools developed for the study of micro-resonators characteristics in order to perform sensing application based on the detection by evanescence. Then, porous silicon is investigated in order to operate another type of detection, the detection by volume. The molecules to be detected and present in the medium detection infiltrate into the material and interact directly with the light. Using simulation tools and by adapting the photolithographic process used for polymers micro-resonators fabrication, the first micro-resonators based on porous silicon ridge waveguides are obtained and characterized. The work contained in this thesis demonstrate experimentally the possibility of sensing concentrations of glucose with a sensitivity of 600 nm/RIU, using volume detection, which is higher than the state of the art, for domains using the sensing and analysis of molecules (health, food industries, security and environment).
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  • HAL Id : tel-02384939, version 1


Pauline Girault. Micro-résonateurs intégrés pour des applications capteurs. Optique [physics.optics]. Université Rennes 1, 2016. Français. ⟨NNT : 2016REN1S144⟩. ⟨tel-02384939v1⟩



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