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Microcrystalline silicon based thin film transistors fabricated on flexible substrate

Abstract : This work deals with the development of microcrystalline silicon thin film transistors (TFTs) fabricated on flexible substrate at low temperature (T=180 °C). The first step of this work consists in studying the electrical stability of TFTs. The N-type TFTs fabricated on glass substrate are electrically stable under gate bias stress VGStress= +50V at T=50 °C. The threshold voltage shift (ΔVTH) was only 1.2 V during 4 hours. This electrical instability of TFTs is mainly due to carrier trapping inside the silicon nitride gate insulator. The second step of this work lies in the study of the mechanical behavior of the TFTs. Both tensile and compressive strains were applied on TFTs. The minimum curvature radius is r=1.5 mm for both tension and compression. The main limitation of TFTs comes from the mechanical strain εlimit of silicon nitride used as gate insulator of TFTs. Also, these TFTs are mechanically reliable: the variation of ION current was only 1% after 200 cycles mechanical bending. These results obtained open the way to the development of flexible electronics that can be folded in half.Finally, TFTs have been fabricated using different gate insulators in order to improve the mobility. Unfortunately, all the gate insulators used couldn’t improve mobility without sacrificing electrical stability of TFT. More detailed studies and complementary optimization of these gate insulators are necessary.
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Hanpeng Dong. Microcrystalline silicon based thin film transistors fabricated on flexible substrate. Electronics. Université Rennes 1, 2015. English. ⟨NNT : 2015REN1S173⟩. ⟨tel-02384928⟩

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