3 (a) The basic mechanical components of the conventional servo system (b) Exploded view of microactuator/slider assembly [71], vol.10 ,
, As the coupling warms, it creates a reliable metal-to-metal seal
Magnetostrictive materials working principle [72], vol.13 ,
, Schematic representation of direct and inverse piezoelectric effect [8]
, Direct piezoelectricity effect ay molcular level
15 2.9 Schematic of Atomic Force Microscope (AFM) working flow [154], p.20 ,
, Example of Hysteresis in piezoelectric cantilever, p.21
, Varying the voltage input to correct for hysteresis. courtesy, DoITPoMS, University of Cambridge, p.22
, Compensation of creep and hysteresis effects at 1 Hz scanning. Parallel white lines are markers for comparison between plots [73]
, , p.26
, 2 Classification of some feedforward control schemes, p.27
, An inversion-based feedforward method to compensate for dynamics G, creep C and hysteresis H in piezoactuators, p.28
Feedforward controller for perfect tracking, p.30 ,
, Feedforward controller for zero phase error tracking, p.31
, , p.33
, Multiple Time-Delay feedforward controller equivalent series, vol.34
, , vol.34, p.122
, Block diagram of a feedforward control of oscillation by an input shaping technique
, , p.38
, Scheme of constructing robust CSVS commands, p.39
, , vol.46
Positive TS shaper region [106], p.48 ,
49 4.4 Sensitivity curves for extra insensitive method shapers, zero vibrations, ?. ? .? extra insensitive, .... two-hump extra insensitive, ? ? ?? three-hump extra insensitive, EI shapers sensitivity curves -Simulation, p.50 ,
, Sensitivity curves of the ZVDD and two-hump EI shapers (b) Sensitivity curves of the ZVDDD and three-hump EI shapers [108]
, 6 (a) Frequency sampling to suppress a range of frequencies (b) Three-dimensional sensitivity curve of an SI shaper designed to suppress a range of Frequencies and damping ratios
, Constraint generation for exact SI shaper when H=2 and V tol = 5% [144]
, Convolution process of two shapers: (a) arbitrary two shapers, (b) two identical MIS ZV shapers, (c) two different MIS ZV shapers [103]
11 (a) Input-Shaping Process to Generate Time-Optimal Commands, (b) Input Shaping Process to Generate Fuel-Efficient On/Off Commands, vol.4 ,
13 (a) Specified insensitivity shapers flexibility (b) Input shaper robustness vs. shaper duration, vol.59 ,
, Feedforward control of badly damped vibrations. (a) control of MISO (multiple-input single-output) systems, vol.116
, (b) generalized control for MIMO (multiple-input multipleoutput) systems
Multiple actuators flexible system [116, p.64 ,
, Shapers impulse amplitudes versus T for a system with three inputs and four impulses per shaper, p.67
,
, 6 (a) 5-DOF piezoelectric positioner CAD model (b) Structure deformations [149]
76 6.1 (a) The experimental setup diagram (b) The 2-DOF piezocantilever ,
, Low frequency and low-rate characteristics of the 2-DOF piezoactuator
, Step responses observed during a very short duration time, vol.87
, The cantilever system model
, Top view, showing four external electrodes and an internal ground electrode, separated by piezoelectric material; (b) A perspective view of the piezoelectric tube; (c) deflection along X axis; (d) deflection along Y axis, and (e) elongation along Z axis, Piezoelectric tube structure and operation:(a), p.90
, , p.90
, Hysteresis characterization with input sinusoidal signals of amplitude 200V and of frequency 0.1Hz
Creep characterization over a period of 600s, p.93 ,
11 (a) The setup CAD drawing (b) The actual piezoelectric tube setup, Dynamics characterization observed during 20ms, vol.94 ,
, All the components used in the experimental setup, p.96
, Schematic of the experimental setup working flow, p.97
YY responses at 4 different temperatures (Experimental) ,
YY modelled at 4 different temperatures, p.99 ,
, Exciting one input and showing the cross coupling effect simulation
, Exciting one input and showing the cross coupling effect experimental results
Exciting both inputs and showing both outputs, compensated and non-compensated -simulation, p.101 ,
, Exciting both inputs and showing both outputs, compensated and non-compensated experimental
, Compensated (green) and un-compensated (blue) system frequency responses
, 104 6.22 Shapers impulse amplitudes versus T for 3-impulses and 4-impulses, Shapers impulse amplitudes versus T for (a) 3-impulses and (b) 4-impulses
, 105 6.24 Step responses for the uncompensated and 4-impulse compensated responses experimental
, 26 XX and YY responses with controller derived at 35 C (Simulation)
Compensated responses at different temperatures (Simulation) ,
YY responses at different temperatures with controller designed at 25 C (Experimental), p.110 ,
YY responses at different temperatures with controller designed at 30 C (Experimental), p.110 ,
YY responses at different temperatures with controller designed at 35 C (Experimental), p.111 ,
YY responses at different temperatures with controller designed at 40 C (Experimental), p.111 ,
YY responses at 25 C with controller designed at different temperatures (Experimental), p.112 ,
YY responses at 30 C with controller designed at different temperatures (Experimental), p.112 ,
35 (a) The system with the vibrations compensator (shaper). (b) the detailed shaper. (c) simulation results, vol.113, p.114 ,
37 (a) Introduction of a DOB to remove the input disturbance b(s). (b) an output feedback control scheme, vol.115 ,
118 List of Tables 6.1 ? n , ? and Poles at four temperatures, Zoom of the different step responses, vol.109 ,
The navigation and control technology inside the ar. drone micro uav, IFAC Proceedings Volumes, vol.44, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00646496
A smart microrobot on chip: design, identification, and control, IEEE/ASME Transactions on Mechatronics, vol.9, issue.3, pp.508-519, 2004. ,
Small Step Size Is Key to Big Science, Aerotech InMotion Blog. N.p, 2012. ,
, Piezoelectric Devices Market by Material, Product and Application -Global Forecast to 2022, 2017.
Research challenges and applications for underwater sensor networking, Wireless Communications and Networking Conference, vol.1, 2006. ,
High performance, high temperature perovskite piezoelectrics, 14th IEEE International Symposium on, 2004. ,
Origin of the high piezoelectric response in PbZr 1 x Ti x O 3, Physical Review Letters, vol.84, p.5423, 2000. ,
Piezoelectric transducers for vibration control and damping, 2006. ,
Smart materials-based actuators at the micro/nano-scale, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00866899
Characterization, Modeling and H-inf Control of n-DOF Piezoelectric Actuators: Application to a 3-DOF Precise Positioner, Asian Journal of Control, vol.18, issue.5, pp.1-20, 2016. ,
Plurilinear modeling and discrete -synthesis control of a hysteretic and creeped unimorph piezoelectric cantilever, IEEE International Conference on Automation, Robotics, Control and Vision, pp.57-64, 2006. ,
URL : https://hal.archives-ouvertes.fr/hal-00334255
Quadrilateral modelling and robust control of a nonlinear piezoelectric cantilever, IEEE Transactions on Control Systems Technology, vol.17, issue.3, pp.528-539, 2009. ,
URL : https://hal.archives-ouvertes.fr/hal-00400364
Further Results on Hysteresis Compensation of Smart Micro-Positioning Systems with the Inverse Prandtl-Ishlinskii Compensator, IEEE Transactions on Control Systems Technology, 2016. ,
URL : https://hal.archives-ouvertes.fr/hal-01303492
Handbook of giant magnetostrictive materials, Gran Engdahl, 1999. ,
Shape memory materials, 1999. ,
Engineering aspects of shape memory alloys, 2013. ,
Industrial applications for shape memory alloys, Proceedings of the international conference on shape memory and superelastic technologies, 2000. ,
, The Top Uses of Piezoelectricity in Everyday Applications, APC International Ltd. APC, 2015.
Precision pointing and tracking between satellite-borne optical systems, Optical Engineering, vol.27, pp.274325-274325, 1988. ,
Review of smart-materials actuation solutions for aeroelastic and vibration control, Journal of Intelligent Material Systems and Structures, vol.11, pp.525-544, 2000. ,
Atomic force microscope, Physical review letters, vol.56, p.930, 1986. ,
Scanning tunneling microscopy, Surface science, vol.126, issue.1-3, pp.236-244, 1983. ,
Scanning tunneling microscopy, vol.27, 1993. ,
Scanning probe microscopy, Analytical chemistry, vol.70, pp.425-476, 1998. ,
Introduction, classification and applications of smart materials: an overview, American Journal of Applied Sciences, vol.10, p.876, 2013. ,
Smart materials and structures, Proceedings of the National Academy of Sciences, vol.96, pp.8330-8331, 1999. ,
An electrochemical investigation of solid cadmium-gold alloys, Journal of the American Chemical Society, vol.54, pp.3819-3833, 1932. ,
Shape memory alloys, Annual Review of Materials Science, vol.18, pp.25-45, 1988. ,
Automation, miniature robotics, and sensors for nondestructive testing and evaluation, vol.4, p.189, 2000. ,
Non-medical applications of shape memory alloys, Materials Science and Engineering: A, vol.273, pp.134-148, 1999. ,
Shape memory alloy technology. cameron.slb, 2017. ,
Kirk-Othmer Encyclopedia of Chemical Technology, 1982. ,
Photostrictive materials, Applied Physics Reviews, vol.2, issue.1, p.11301, 2015. ,
Use of piezoelectric actuators as elements of intelligent structures, AIAA journal, vol.25, pp.1373-1385, 1987. ,
Piezoelectric ultrasonic motors: overview, Smart materials and structures, vol.7, p.273, 1998. ,
Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage, International Journal of Machine Tools and Manufacture, vol.47, pp.946-961, 2007. ,
Piezoelectric actuators and sensors location for active control of flexible structures, Proceedings of the 17th IEEE, vol.2, 2000. ,
Flexible building blocks method for the optimal design of compliant mechanisms using piezoelectric material, 12th IFToMM World Congress, 2007. ,
Experiment on vibration control of a two-link flexible manipulator using an input shaper and adaptive positive position feedback, Advances in Mechanical Engineering, vol.7, p.1687814015610466, 2015. ,
A flexure-based mechanism and control methodology for ultra-precision turning operation, Precision Engineering, vol.33, pp.160-166, 2009. ,
AFM Artifacts-Scanner Artifacts -Effects due to the peculiarities of the piezoelectric scanner, 2007. ,
Multivariable Control Designs for Piezoelectric tubes, IFAC Proceedings Volumes, vol.44, pp.2030-2035, 2011. ,
Intelligent Hysteresis Modeling and Control of Piezoelectric Actuators, pp.171-185, 2013. ,
Generalized Preisach model for hysteresis nonlinearity of piezoceramic actuators, Precision engineering, vol.20, pp.99-111, 1997. ,
Adaptive variable structure control of a class of nonlinear systems with unknown Prandtl-Ishlinskii hysteresis, IEEE Transactions on automatic control, vol.50, pp.2069-2074, 2005. ,
Generalized Prandtl-Ishlinskii hysteresis model: Hysteresis modeling and its inverse for compensation in smart actuators, CDC 2008. 47th IEEE Conference on, 2008. ,
Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application, Proceedings of the 2000, vol.3, 2000. ,
Compensation of scanner creep and hysteresis for AFM nanomanipulation, IEEE Transactions on Automation Science and Engineering, vol.5, pp.197-206, 2008. ,
, Hysteresis and Aging-SPM Training Guide, 2017.
A survey of control issues in nanopositioning, IEEE Transactions on Control Systems Technology, vol.15, pp.802-823, 2007. ,
Feedback control of piezoelectric tube scanners, Proceedings of the 33rd IEEE Conference on, vol.2, 1994. ,
Experiment on vibration control of a two-link flexible manipulator using an input shaper and adaptive positive position feedback, Advances in Mechanical Engineering, vol.7, p.1687814015610466, 2015. ,
Smart Materials-Based Actuators at the Micro/Nano-Scale, pp.89-120, 2013. ,
Robust adaptive control of coupled parallel piezo-flexural nanopositioning stages, IEEE/ASME Transactions on mechatronics, vol.14, pp.11-20, 2009. ,
Adaptive robust precision motion control of a piezoelectric positioning stage, IEEE Transactions on Control Systems Technology, vol.16, pp.1039-1046, 2008. ,
Comparison of robust input shapers, Journal of Sound and Vibration, vol.315, pp.797-815, 2008. ,
Emerging actuator technologies : a micromechatronic approach, 2005. ,
Simultaneous displacement and force selfsensing in piezoelectric actuators and applications to robust control of the displacement, IEEE/ASME -Transactions on Mechatronics (Tmech), vol.20, pp.519-531, 2015. ,
Quasi-static displacement self-sensing measurement for a 2-DOF piezoelectric cantilevered actuator, IEEE -Transactions on Industrial Electronics (TIE), 2017. ,
Designing with Active Materials: An Impedance Based Approach, 1998. ,
course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, MIT Open-CourseWare, 2007. ,
Bent-beam electrothermal actuators for high force applications, IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), pp.31-36, 1999. ,
Bent-beam electrothermal actuators-Part II: Linear and rotary microengines, Journal of Microelectromechanical Systems, vol.10, issue.2, pp.255-262, 2001. ,
A multi-axis electrothermal micromirror for a miniaturized OCT system, Sensors and Actuators A: Physical, vol.167, pp.152-161, 2011. ,
Time constant and lateral resonances of thermal vertical bimorph actuators, Journal of Micromechanics and Microengineering, vol.12, p.410, 2002. ,
A novel electro-thermal actuated micro position lock, Proceedings. 7th International Conference on, vol.3, 2004. ,
Multistate latching MEMS variable optical attenuator, IEEE Photonics Technology Letters, vol.16, pp.191-193, 2004. ,
Electrostatic motors(Synchronous and asynchronous electrostatic motors based on action of electric fields charges, discussing design and construction), vol.6, pp.178-194, 1969. ,
Microfabricated electrostatic actuators for hard disk drives, IEEE/ASME transactions on mechatronics, vol.3, pp.175-183, 1998. ,
, Kinetic Energy Harvesting by Magnetostrictive Materials, 2017.
Creep hysteresis and vibration compensation for piezoactuators: Atomic force microscopy application, ASME J. Dyn. Syst. Control, vol.123, issue.1, pp.35-43, 2001. ,
Mathematical Models of Hysteresis, 1991. ,
Systems with hysteresis, 1989. ,
URL : https://hal.archives-ouvertes.fr/inria-00074001
Scanning Probe Microscopy and Spectroscopy, 1994. ,
Scanning probe microscopy, IEEE Control Systems Magazine, vol.28, issue.2, pp.65-83, 2008. ,
Vibration compensation for high speed scanning tunneling microscopy, Rev. Sci. Instr, vol.70, issue.12, p.46004605, 1999. ,
A fi-nite-element approach to control the end-point motion of a single-link flexible robot, IEEE Trans. Automat. Contr, vol.50, issue.6, p.6375, 1987. ,
An inverse dynamic method yielding flexible manipulator state trajectories, ASME J. Dyna. Syst., Meas., Control, vol.116, issue.2, p.193200, 1990. ,
Nonlinear inversion-based output tracking, IEEE Trans. Automat. Contr, vol.41, p.930943, 1996. ,
Noncausal inverses for linear systems, IEEE Trans. Automat. Contr, vol.41, p.608611, 1996. ,
Stable inversion and parame-ter variations, Syst. Control Lett, vol.34, p.203207, 1998. ,
, Parameter variations, relative degree, and stable inversion, vol.37, p.871880, 2001.
Zero Phase Error Tracking Algorithm for Digital Control, ASME Journal of Dynamic Systems, Measurement, and Control, vol.109, pp.65-68, 1987. ,
,
Continuous zero phase error tracking controller with gain error compensation, Proc. of the American Control Conference, vol.5, pp.3554-3558 ,
Robust Time-Delay Control, ASME J. of Dynamic Systems, Measurement, and Control, vol.115, pp.303-306, 1993. ,
Posicast Control of Damped Oscillatory Systems, Proceedings of the IRE, pp.1249-1255, 1957. ,
Input shaping/time delay control of maneuvering flexible structures, Proceedings of the 2002 American Control Conference, vol.3, pp.1717-1731, 2002. ,
Closed-Form Deflection-Limiting Commands, pp.2104-2109, 2005. ,
Preshaping Command Inputs to Reduce System Vibration, Journal of Dynamic Systems, Measurement and Control, vol.112, pp.76-82, 1990. ,
Convolved and Simultaneous Two-Mode Input Shapers, IEE Proc. Control Theory Appl, vol.144, issue.6, pp.515-520, 1997. ,
Effects of Input Shaping on Two-Dimensional Trajectory Following, IEEE Trans. on Robotics and Automation, vol.12, issue.6, pp.881-887, 1996. ,
Optimal Input Shaper Design for High-Speed Robotic Workcells, J. Vibration and Control, vol.9, p.13591376, 2003. ,
A comparison of input shaping and time-optimal flexible-body control, Control Engineering Practice, vol.5, pp.459-467, 1997. ,
Control Using Equal Length Shaped Commands to Reduce Vibration, IEEE Trans. on Control Sys. Tech, vol.11, issue.1, pp.62-72, 2003. ,
Cooperative multi-input shaping for arbitrary inputs, vol.1, 2001. ,
A zero-placement technique for designing shaped inputs to suppress multiplemode vibration, Proceedings of the American Control Conference, p.25332537, 1994. ,
Design and implementation of time-optimal negative input shapers, Intl. Mechanical Engineering Congress and Exposition, pp.151-158, 1994. ,
Comparison of command shaping methods for reducing residual vibration, Third European Control Conf, pp.1126-1131, 1995. ,
Command generation using specified-negative amplitude input shapers, Proceedings of the American Control Conference, p.6165, 1999. ,
Design and sensitivity analysis of an input shaping filter in the z-plane, Journal of Sound and Vibration, vol.243, p.157171, 2001. ,
Modified input shaping for a rotating single-link flexible manipulator, Journal of Sound and Vibration, vol.285, issue.12, p.187207, 2005. ,
Optimal Unity-Magnitude Input Shaper Duration Analysis, Archive of Applied Mechanics, vol.77, issue.1, pp.63-71, 2007. ,
Three-Step Input Shaper for Damping Tubular Step Motor Vibrations, J. of Mechanical Engineering Science, vol.221, issue.1, pp.1-9, 2007. ,
Improved three-step input shaping control of crane system, constraints, vol.6, p.10, 2008. ,
Residual vibration reduction using vector diagrams to generate shaped inputs, Journal of Mechanical Design, vol.116, issue.2, p.654659, 1994. ,
Vibration reduction using multi-hump input shapers, ASME Journal of Dynamic Systems Measurement and Control, vol.119, issue.2, p.320326, 1997. ,
Concurrent Design of Input Shaping and Feedback Control for Insensitivity to Parameter Variations, Sixth Int. Workshop on Advanced Motion Control, 2000. ,
Concurrent Design of Input Shaping and Proportional Plus Derivative Feedback Control, Accepted to the ASME, J. of Dynamic Systems, Measurement, and Control. BIBLIOGRAPHIC REFERENCES ,
Solutions to Point-to-Point Control Problems Using Laplace Transform Technique, ASME J. Dyn. Syst. Meas. Control, vol.113, p.425431, 1991. ,
Using Input Command Pre-Shaping to Suppress Multiple Mode Vibration, Proceedings of the IEEE Robotics and Automation Conference, p.26042609, 1991. ,
Multiple-Mode Input Shaping Sequences for Reducing Residual Vibrations, Proceedings of the 23rd Biennial Mechanisms Conference, p.1114 ,
, , p.1116, 1994.
Robust Time-Optimal Control: A Frequency Domain Approach, Proc. AZAA Guid. Navig. Control Conf, 1994. ,
On optimal control strategy of maneuver of satellites with flexible appendages, Proc. PISSTA, p.530539, 1987. ,
Multiple Input-Shaping Design for Vibration Reduction, Automatica, vol.35, p.8189, 1999. ,
Multi-Mode Vibration Suppression in 2-DOF Piezoelectric Systems Using Zero Placement Input Shaping Technique, Proc. SPIE, p.9494, 2015. ,
A Survey of Control Issues in Nanopositioning, IEEE Trans. Con-trol Syst. Technol, vol.15, p.802823, 2007. ,
A Modified Method for Multiple Actuator Input Shaping, Proc. of the American Control Conf, pp.66-70, 1999. ,
Feedforward control of piezoactuators in atomic force microscope systems, IEEE Control Systems, vol.29, pp.70-82, 2009. ,
, Zeros of Sampled Systems, Autornatica, vol.20, issue.1, pp.31-38, 1984.
Nonminimum phase dynamic inversion for settle time applications, IEEE Trans. Ctrl. Sys. Tech, 2008. ,
The effect of nonminimum-phase zero locations on the performance of feedforward model-inverse control techniques in discrete-time systems, pp.2696-2702, 2008. ,
The Application of Input Shaping to a System with Varying Parameters, Japan/USA Symposium on Flexible Automation, 1992. ,
Planar, Time-Optimal, Rest-to-Rest Slewing Maneuvers of Flexible Spacecraft, J. of Guidance, Control, and Dynamics, vol.12, issue.1, pp.71-81, 1989. ,
Time-Optimal Slewing of Flexible Spacecraft, J. of Guidance, Control, and Dynamics, vol.15, issue.2, pp.360-367, 1992. ,
Robust Time-Optimal Control of Uncertain Flexible Spacecraft, J. of Guidance, Control, and Dynamics, vol.15, issue.3, pp.597-604, 1992. ,
Fuel/Time Optimal Control of Flexible Structures: A Frequency Domain Approach, Journal of Vibration and Control, vol.5, issue.5, pp.795-817, 1999. ,
Command shaping for flexible systems: A review of the first 50 years, International Journal of Precision Engineering and Manufacturing, vol.10, pp.153-168, 2009. ,
Fuel-Efficient Pulse Command Profiles for Flexible Spacecraft, J. of Guidance, Control, and Dynamics, vol.19, pp.954-960, 1996. ,
Fuel/Time Optimal Control of the Benchmark Problem, J. of Guidance, Control, and Dynamics, vol.18, pp.1225-1231, 1995. ,
Robust Fuel-and Time-Optimal Control of Uncertain Flexible Space Structures, Proc. Guidance, Navigation, and Control Conference, pp.939-948, 1993. ,
On-Off Control with Specified Fuel Usage, Journal Dynamic Systems, Measurement, and Control, vol.121, pp.206-212, 1999. ,
Slewing Flexible Spacecraft with Deflection-Limiting Input Shaping, J. of Guidance, Control, and Dynamics, vol.20, pp.291-298, 1997. ,
Adaptive Precompensators for Flexible-Link Manipulator Control, 28th IEEE Conference on Decision and Control, vol.3, pp.2083-2088, 1989. ,
An Adaptive Input Shaping Control Scheme for Vibration Suppression in Slewing Flexible Structures, IEEE Transactions on Control Systems Technology, vol.1, pp.114-121, 1993. ,
Experiments of Rigid-Body Based Controllers with Input Preshaping for a Two-Link Flexible Manipulator, Proc. American Control Conf, pp.2957-2961, 1992. ,
Adaptive Nonlinear Control and Input Preshaping for Flexible-Link Manipulators, Proc. American Control Conf, pp.2705-2709, 1993. ,
Adaptive Time-delay Command Shaping Filter for Flexible Manipulator Control, IEEE/ASME Trans. on Mechatronics, vol.9, pp.619-626, 2004. ,
Extraction of Optimal Time-delay in Adaptive Command Shaping Filter for Flexible Manipulator Control, J. of Inst. of Control, Robotics and System, vol.14, pp.564-572, 2008. ,
Adaptive Command Shaping Using Adaptive Filter Approach in Time Domain, Proc. American Control Conference, pp.81-85, 1999. ,
Noise Effect on Time-domain Adaptive Command Shaping Methods for Flexible Manipulator Control, IEEE Trans. of Control Systems Technology, vol.9, pp.84-92, 2001. ,
An extension of command shaping methods for controlling residual vibration using frequency sampling, Proceedings 1992 IEEE International Conference on Robotics and Automation, vol.1, pp.800-805, 1992. ,
Input shaping for vibration reduction with specified insensitivity to modeling errors, Japan-USA Sym. on Flexible Automation, vol.1, pp.307-320, 1996. ,
Micromanipulateur pizolectrique notamment pour microrobotique', french Patent, FR0211934, 2002. ,
BIBLIOGRAPHIC REFERENCES 139 'Robotic Microassembly and micromanipulation at FEMTO-ST', Journal of Micro-Bio Robotics (JMBR), vol.8, issue.2, pp.91-106, 2013. ,
System identification toolbox 7 user's guide, The Mathworks, 2008. ,
Robust feedforward-feedback control of a nonlinear and oscillating 2-DOF piezocantilever, IEEE Transactions on Automation Science and Engineering, vol.8, issue.3, pp.506-519, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00635680
Design, static modeling and simulation of a 5-DOF precise piezoelectric positioner, SPIE Commercial+ Scientific Sensing and Imaging. International Society for Optics and Photonics, 2016. ,
A four-degree-of-freedom microprehensile microrobot on chip, Assembly Automation, vol.24, pp.33-42, 2004. ,
Dual-frequency piezoelectric transducers for contrast enhanced ultrasound imaging Sensors, vol.14, pp.20825-20842, 2014. ,
Piezoelectric cantilevered structures: modeling control and measurement/estimation aspects ,
Robust Performance Enhancement Using Disturbance Observers for Hysteresis Compensation Based on Generalized PrandtlIshlinskii Model, ASME Journal of Dynamic Systems, Measurement, and Control, p.135, 2013. ,
, Optimal control, 2012.
Feedforward and IMCfeedback control of a nonlinear 2-DOF piezoactuator dedicated to automated micropositioning tasks, 2011 IEEE Conference on Automation Science and Engineering (CASE), pp.393-398, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00709779
Nichtlineare Integralgleic hungen nebst Anwendungen, Acta Math, vol.54, pp.117-176, 1930. ,
Nonlinear Problems in Random Theory, 1958. ,
Energy Harvesting Technologies, 2009. ,