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Study of an integrated on-chip interferometer. Application for the characterization of innovative transducers.

Abstract : This work concerns the study of two elements of a system of nanopositioning and micromanipulation: a) integrated on-chip interferometric sensor; its characteristics, peculiarities and potential are studied in detail; b) an element usable in sensor and actuator mode: an electro-active flexural polymer.The PicoMove interferometer is the result of the collaboration between LISV and the company TeemPhotonics. This interferometer, which operates in the mid-infrared range (1.55 μm), is based on optical guide technology that gives a high degree of robustness to the external environment. Its architecture is based on a modified Michelson-Young structure. Experiments have been implemented to characterize its performance. It has been demonstrated nanometric resolution and very low noise level. A spectral power density of 100 fm/√Hz was reached under static conditions.In addition, its robustness to the environmental conditions is demonstrated, and the metrological specificities are discussed with details about the specific error sources. It is applied to a nanopositioning stage using mobile coil and flexible guidance.The second point of this PhD work concerns the study of electromechanical properties of an ionic electroactive polymer (IEAP) in a flexible cantilever configuration. It is able to operate in actuator mode and in sensor mode. For the actuator part, its stiffness and its natural frequency are studied. For the sensor part, its bandwidth, resolution and transfer function are experimentally studied.The micrometric capabilities of this polymer in actuator and sensor mode are demonstrated and discussed.
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Walid Adel Merzouk. Study of an integrated on-chip interferometer. Application for the characterization of innovative transducers.. Automatic. Université Paris-Saclay, 2019. English. ⟨NNT : 2019SACLV014⟩. ⟨tel-02320395⟩

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