Etude de la gravure du SiN contrôlée a l'échelle atomique par implantation d'O2 suivi de gravure ultra-sélective SiO2/SiN en plasma déporté NF3/NH3

Abstract : Since the beginning of microelectronics, the industry has continuously developed new plasma etching technologies to reduce the size of devices while reducing the cost of manufacturing and increase the performance of integrated circuits. Today, transistors such as 22nm FDSOI or 10nm FinFET must be engraved with sub-nanometric precision and without damaging the underlayment on more than one atomic layer. To achieve this, new technologies are developing, including the Smart Etch. This two-step technology involves modifying the surface of the material under the action of a plasma and then removing selectively the modified material from the unmodified material. The aim of this thesis is to study the feasibility of replacing the He and H2 plasmas used in the Smart Etch by O2 plasmas. The interest is the oxidation of the material, that it is a real chemical modification, allowing latter the selective elimination by RPS. Moreover, unlike He / H2 plasma, the O2 plasma does not damage the reactor walls and releases much less impurities into the plasma. Firstly, we studied the gaseous mixtures NF3 / H2 and NF3 / NH3 used in the step of RPS remove. Thouse studies were done through VUV absorption spectroscopy and UV emission. We have demonstrated the creation of HF in both mixtures and we have indirectly highlighted the creation of NH4F (this species plays a key role in the formation of salts) from NH3 and HF. In addition we observed the presence of F and H which are responsible for the etching of SiO2 and SiN when H2
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Robert Soriano Casero. Etude de la gravure du SiN contrôlée a l'échelle atomique par implantation d'O2 suivi de gravure ultra-sélective SiO2/SiN en plasma déporté NF3/NH3. Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT003⟩. ⟨tel-02296389⟩

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