, La photonique SiN pour l'optique non, p.136

, Banc de caractérisation, p.139

, 1.2.2. Optimisation des guides d'onde, pp.141-142

, 1.3.2. Optimisation de la dispersion, Génération de supercontinuum, pp.146-147

L. Intégrée, En effet, le fort confinement optique des guides d'onde, le coefficient non linéaire élevé ainsi que la possibilité de travailler avec des structures résonantes sont autant d'arguments en faveur du développement de circuits compacts, peu onéreux et surtout fonctionnant avec des intensités optiques de l'ordre du milliwatt. Le circuit SiN présenté dans ce manuscrit a été développé dans un environnement industriel, et co-intégré avec un circuit silicium comprenant des composants actifs. La démonstration d'effets non linéaires dans ces guides serait un pas supplémentaire vers la réalisation d'une plateforme intégrée comprenant des fonctions d'ONL. Une série de caractérisations préliminaires ont donc été réalisées sur des guides d'onde en SiN de différentes largeurs, et deux phénomènes ont pu être observés. En utilisant une correspondance d'indice effectif entre le mode optique de la pompe et un mode d'ordre supérieur, un signal de troisième harmonique optique a été généré avec un pic pouvant se situer, selon la longueur d'onde de la pompe, du vert (523nm) jusqu'à l'UV (360nm). Puis, en modifiant la largeur d'un guide pour obtenir la dispersion adéquate, la génération d'un supercontinuum, avec une bande spectrale de 425 à 1660nm, a également été réalisée. Ces résultats prometteurs sont actuellement en cours d'analyse avec Christian Lafforgue, et plus particulièrement la photonique SiN, semble particulièrement intéressante pour l'élaboration de systèmes basés sur l'optique non linéaire

, Cisco Global Cloud Index, 2015.

, Datacenterdynamics, p.26, 2018.

E. M. Shaw, VCSEL-Based Interconnects for Current and Future Data Centers, J. Light. Technol, vol.33, issue.4, pp.727-732, 2014.

F. Boeuf, A Multi-wavelength 3D-compatible Silicon Photonics Platform on 300mm SOI wafers for 25Gb / s Applications, pp.353-356, 2013.

C. Sun, Single-chip microprocessor that communicates directly using light, Nature, vol.528, issue.7583, pp.534-538, 2015.

S. Intel and . Photonics, , p.4, 2019.

, IBM, silicon photonics, p.4, 2019.

S. Mellanox and . Photonics, , p.4, 2019.

, Kaiam, silicon photonics, p.4, 2019.

, Finisar, silicon photonics, p.4, 2019.

M. Haitjema, A Survey of the Prominent Quantum Key Distribution Protocols, pp.1-7, 2007.

S. Ramelow, Silicon-Nitride Platform for Narrowband Entangled Photon Generation, pp.1-10, 2015.

Q. Li, M. Davanço, and K. Srinivasan, Efficient and low-noise single-photon-level frequency conversion interfaces using silicon nanophotonics, Nat. Photonics, vol.10, issue.6, pp.406-414, 2016.

V. Y. Venediktov, Y. Filatov, and E. Shalymov, Passive ring resonator micro-optical gyroscopes, Quantum Electron, vol.46, issue.5, p.437, 2016.

S. Srinivasan, R. Moreira, D. Blumenthal, and J. E. Bowers, Design of integrated hybrid silicon waveguide optical gyroscope, Opt. Express, vol.22, issue.21, p.24988, 2014.

M. Calvo, Ring Resonator Designed for Biosensing Applications Manufactured on 300 mm SOI in an Industrial Environment, Japanese Journal of Applied Physics, pp.3-4
URL : https://hal.archives-ouvertes.fr/hal-02074726

P. Suni, J. Bowers, L. A. Coldren, and B. Yoo, Photonic Integrated Circuits for Coherent Lidar, 18th Coherent Laser Radar Conf. (CLRC 2016, pp.132-137, 2016.

S. , Integration of an optical ring resonator biosensor into a self-contained microfluidic cartridge with active, single-shot micropumps, vol.7, pp.1-14, 2016.

C. A. Barrios, Slot-waveguide biochemical sensor, Opt. Lett, vol.32, issue.21, p.3080, 2007.

, Genalyte, p.4, 2019.

S. Malhouitre, D. Fowler, S. Garcia, O. Lemonnier, N. Tyler et al., Silicon Nitride photonic platform for LIDAR applications, 2018 IEEE 15th Int. Conf. Gr. IV Photonics, pp.1-2, 2018.

, Analog Photonics, p.4, 2019.

Y. K. Chembo, Kerr optical frequency combs: Theory, applications and perspectives, Nanophotonics, vol.5, issue.2, pp.214-230, 2016.

S. Arafin, Power-Efficient Kerr Frequency Comb Based Tunable Optical Source, IEEE Photonics J, vol.9, issue.3, 2017.

P. Manurkar, Fully self-referenced frequency comb consuming 5 watts of electrical power, OSA Contin, vol.1, issue.1, p.274, 2018.

P. Marin-palomo, Microresonator-based solitons for massively parallel coherent optical communications, Nature, vol.546, issue.7657, pp.274-279, 2017.

B. Stern, X. Ji, Y. Okawachi, A. L. Gaeta, and M. Lipson, Battery-operated integrated frequency comb generator, Nature, 2018.

J. Pfeifle, Coherent terabit communications with microresonator Kerr frequency combs, Nat. Photonics, vol.8, issue.5, pp.375-380, 2014.

&. Mir-spec, , 2019.

K. Li, H. Ting, M. A. Foster, and A. C. Foster, High-speed all-optical NAND/AND logic gates using four-wave mixing Bragg scattering, Opt. Lett, vol.41, issue.14, p.3320, 2016.

F. Li, Error-free all-optical demultiplexing at 160Gb/s via FWM in a silicon nanowire, Opt. Express, vol.18, issue.4, pp.3905-3910, 2010.

S. B. Papp, A microresonator frequency comb optical clock, Optica, vol.1, issue.1, pp.10-14, 2013.

M. Lezius, Space-borne frequency comb metrology, Optica, vol.3, issue.12, p.1381, 2016.

K. J. Ooi, Optical Parametric Amplification in Ultra -Silicon Rich Nitride Waveguides, 2016.

I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, Rapid and precise absolute distance measurements at long range, Nat. Photonics, vol.3, issue.6, pp.351-356, 2009.

P. Trocha, Ultrafast optical ranging using microresonator soliton frequency combs, Science, vol.359, issue.6378, pp.887-891, 2018.

Z. Zhang, M. Yako, K. Ju, N. Kawai, and K. Wada, A silicon nitride platform by physical vapor deposition for dense wavelength division multiplexing on chip, IEEE Int. Conf. Gr. IV Photonics GFP, vol.25, pp.193-194, 2014.

B. Pezeshki, High performance MEMS-based micro-optic assembly for multi-lane transceivers, J. Light. Technol, vol.32, issue.16, pp.2796-2799, 2014.

B. Pezeshki, Multi-wavelength 100Gb / s Silicon Photonics Based Transceiver with Silica mux / demux and MEMS-coupled InP Lasers, Proc. IEEE, vol.106, pp.4-5, 2018.

, G.695 Optical interfaces for coarse wavelength division multiplexing applications

C. Xiong, W. H. Pernice, X. Sun, C. Schuck, K. Y. Fong et al., Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics, New J. Phys, vol.14, 2012.

W. H. Pernice, C. Xiong, C. Schuck, and H. X. Tang, Second harmonic generation in phase matched aluminum nitride waveguides and micro-ring resonators, Appl. Phys. Lett, vol.100, issue.22, 2012.

H. Jung, Green , red , and IR frequency comb line generation from single IR pump in AlN microring resonator, Optica, vol.1, issue.6, pp.396-399, 2014.

C. Xiong, W. H. Pernice, and H. X. Tang, Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing, pp.1-19, 2012.

C. Wang, Highly sensitive optical temperature sensor based on a SiN micro-ring resonator with liquid crystal cladding, Opt. Express, vol.24, issue.2, p.1002, 2016.

R. Baets, Silicon Photonics: Silicon Nitride Versus Silicon-on-insulator, Opt. Fiber Commun. Conf, 2016.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Silicon Nitride in Silicon Photonics, Proc. IEEE, vol.106, pp.2209-2231, 2018.

A. Rahim, Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits, J. Light. Technol, vol.35, issue.4, pp.639-649, 2017.

D. T. Spencer, J. F. Bauters, M. J. Heck, and J. E. Bowers, Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime, Optica, vol.1, issue.3, p.153, 2014.

T. A. Huffman, G. M. Brodnik, C. Pinho, S. Gundavarapu, D. Baney et al., Integrated resonators in an ultralow loss Si3N4/SiO2 platform for multifunction applications, IEEE J. Sel. Top. Quantum Electron, vol.24, issue.4, 2018.

D. Dai, Low-loss Si_3N_4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides, Opt. Express, vol.19, issue.15, p.14130, 2011.

W. D. Sacher, Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices, Proc. IEEE, pp.1-14, 2018.

Q. Wilmart, A CMOS compatible 200mm SOI-SiN photonic platform for CWDM applications, Opt. Express, vol.22, issue.6, pp.283-293, 2017.

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. Poon, Multilayer silicon nitride-on-silicon integrated photonic platforms and devices, J. Light. Technol, vol.33, issue.4, pp.901-910, 2015.

Y. Huang, J. Song, X. Luo, T. Liow, and G. Lo, CMOS compatible monolithic multi-layer Si_3N_4-on-SOI platform for low-loss high performance silicon photonics dense integration, Opt. Express, vol.22, issue.18, p.21859, 2014.

W. D. Sacher, Tri-layer silicon nitride-on-silicon photonic platform for ultra-low-loss crossings and interlayer transitions, Opt. Express, vol.25, issue.25, p.30862, 2017.

C. Palmer, Diffraction grating handbook, 1996.

D. Benedikovic, L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography, Opt. Lett, vol.42, issue.17, p.3439, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01800599

L. Carroll, D. Gerace, I. Cristiani, S. Menezo, and L. C. Andreani, Broad parameter optimization of polarization-diversity 2D grating couplers for silicon photonics, Opt. Express, vol.21, issue.18, pp.3592-3598, 2013.

G. B. Hocker and W. K. Burns, Mode dispersion in diffused channel waveguides by the effective index method, Appl. Opt, vol.16, issue.1, p.113, 1977.

F. Lumerical,

Z. M. Zhu and T. G. Brown, Full-vectorial finite-difference analysis of microstructured optical fibers, Opt. Express, vol.10, issue.17, pp.853-864, 2002.

E. Lumerical,

F. Lumerical,

S. D. Gedney, Introduction to the Finite-Difference Time-Domain (FDTD) Method for Electromagnetics, Synth. Lect. Comput. Electromagn, vol.6, issue.1, pp.1-250, 2011.

, Matlab

R. Sproull, R. Lyon, and S. Trimberger, The Caltech Intermediate Form for LSI Layout Description, p.16, 1980.

, Klayout

S. Pathak, Silicon nano-photonics based arrayed waveguide gratings, 2014.

J. Durel, Intégration d'un laser hybride DBR III-V / Si en face arrière d'une puce photonique, 2018.

Q. Li, A. A. Eftekhar, M. Sodagar, Z. Xia, A. H. Atabaki et al., Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform, Opt. Express, vol.21, issue.15, p.18236, 2013.

M. H. Pfeiffer, J. Liu, A. S. Raja, T. Morais, B. Ghadiani et al., Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins, Optica, vol.5, issue.7, p.884, 2018.

M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Fabrication techniques for low-loss silicon nitride waveguides, Proc. SPIE, p.109, 2005.

M. A. Porcel, Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths, Opt. Express, vol.25, issue.2, pp.1596-1603, 2017.

H. Zhao, Visible-to-near-infrared octave spanning supercontinuum generation in a partially underetched silicon nitridewaveguide, CLEO Sci. Innov. CLEO-SI, vol.40, issue.10, pp.2177-2180, 2015.

Y. Xuan, High-Q silicon nitride microresonators exhibiting low-power frequency comb initiation, Optica, vol.3, issue.11, p.1171, 2016.

J. Epping, Dispersion engineering silicon nitride waveguides for broadband nonlinear frequency conversion, 2015.

J. M. Boggio, Dispersion engineered silicon nitride waveguides by geometrical and refractive-index optimization, 2014.

M. H. Pfeiffer, Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics, Optica, vol.3, issue.1, pp.1-6, 2016.

P. V. Lambeck and A. Driessen, Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices, J. Light. Technol, vol.17, issue.8, p.1401, 1999.

F. Ay and A. Aydinli, Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides, Opt. Materials, vol.26, issue.1, pp.33-46, 2004.

S. C. Mao, Low hydrogen component SiN films by PECVD for low propagation loss waveguide, IEEE PhotonicsGlobal Singapore, pp.2-5, 2008.

W. D. Sacher, Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices, Proc. IEEE, pp.1-14, 2018.

T. Dom, Low-temperature NH3-free Silicon Nitride Platforms for Integrated Photonics, pp.119-120, 2018.

L. Wang, W. Xie, D. Van-thourhout, Y. Zhang, H. Yu et al., Nonlinear silicon nitride waveguides based on PECVD deposition platform, Opt. Express, vol.26, issue.8, p.9645, 2018.

A. Rahim, T. Spuesens, R. Baets, and W. Bogaerts, Open-Access Silicon Photonics: Current Status and Emerging Initiatives, Proc. IEEE, vol.106, pp.2313-2330, 2018.

T. and D. Bucio, Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications, J. Phys. D.: Appl. Phys, vol.50, issue.2, 2017.

E. Ohmura, Internal modified-layer formation mechanism into silicon with nanosecond laser, J. Ach. Mat. Man. Eng, vol.17, issue.1-2, 2014.

S. K. Selvaraja, W. Bogaerts, P. Absil, D. Van-thourhout, and R. Baets, Record Low-Loss Hybrid Rib/Wire Waveguides for Silicon Photonic Circuits, 6th IEEE Int. Conf. Gr. IV Photonics, p.1, 2010.

S. M. Lindecrantz and O. G. Helleso, Estimation of propagation losses for narrow strip and rib waveguides, IEEE Photonics Technol. Lett, vol.26, issue.18, pp.1836-1839, 2014.

N. Nourshargh, D. Ph, E. M. Starr, and B. Sc, Interference effects between modes of planar optical waveguides, Proc. IEEE, vol.133, pp.303-305, 1986.

G. Z. Mashanovich, M. Milosevic, and P. Matavulj, A unified approach for radiative losses and backscattering in optical waveguides, Journal of Optics, vol.16, 2014.

B. D. Marcuse, Mode Conversion Caused by Surface Imperfections of a Dielectric Slab Waveguide, 1969.

K. Shang, S. Pathak, C. Qin, and S. J. Yoo, Low-Loss Compact Silicon Nitride Arrayed Waveguide Gratings for Photonic Integrated Circuits, IEEE Photonics J, vol.9, issue.5, 2017.

T. Y. Ang, Versatile bezier bends for silicon photonics, Conf. Lasers ElectroOptics Pacific Rim, CLEO-PR 2017, pp.1-2, 2017.

V. M. Passaro, C. De-tullio, B. Troia, M. L. Notte, G. Giannoccaro et al., Recent advances in integrated photonic sensors, Sensors (Switzerland), vol.12, issue.11, pp.15558-15598, 2012.

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, Guiding and confining light in void nanostructure, Opt. Lett, vol.29, issue.11, pp.1209-1211, 2004.

L. Vivien, Vertical multiple-slot waveguide ring resonators in silicon nitride, Opt. Express, vol.16, issue.22, pp.17237-17242, 2008.

W. Zhang, S. Serna, X. L. Roux, C. Alonso-ramos, L. Vivien et al., Analysis of silicon-on-insulator slot waveguide ring resonators targeting high Q -factors, Opt. Lett, vol.40, issue.23, pp.5566-5569, 2015.

Z. Wang, N. Zhu, Y. Tang, L. Wosinski, D. Dai et al., Ultracompact low-loss coupler between strip and slot waveguides, Opt. Lett, vol.34, issue.10, pp.1498-1500, 2009.

Y. Liu, T. Baehr-jones, J. Li, A. Pomerene, and M. Hochberg, Efficient strip to strip-loaded slot mode converter in silicon-on-insulator, IEEE Photonics Technol. Lett, vol.23, issue.20, pp.1496-1498, 2011.

Q. Deng, L. Liu, X. Li, and Z. Zhou, Strip-slot waveguide mode converter based on symmetric multimode interference, Opt. Lett, vol.39, issue.19, p.5665, 2014.

Q. Deng, Q. Yan, L. Liu, X. Li, J. Michel et al., Robust polarization-insensitive stripslot waveguide mode converter based on symmetric multimode interference, Opt. Express, vol.24, issue.7, pp.5665-5668, 2016.

N. C. Harris, Efficient, compact and low loss thermo-optic phase shifter in silicon, Opt. Express, vol.22, issue.9, 2014.

A. Arbabi and L. L. Goddard, Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiOx using microring resonances, Opt. Lett, vol.38, issue.19, p.3878, 2013.

W. Bogaerts, Silicon microring resonators, Laser Photonics Rev, vol.6, issue.1, pp.47-73, 2012.

S. Guerber, Integrated SiN on SOI dual photonic devices for advanced datacom solutions, Proc. SPIE, 2018.

B. E. Saleh and M. C. Teich, Fundamental of Photonics, 2007.

Y. Zhang, A compact and low loss Y-junction for submicron silicon waveguide, Opt. Express, vol.21, issue.1, p.1310, 2013.

A. Bekasiewicz, S. Koziel, and S. Ogurtsov, Rapid Simulation-Driven Design of Compact Photonic Y-Junction By Variable-Dimensional Sequential Approximate Optimization, IEEE, vol.21, issue.2, pp.2-3, 2016.

L. B. Soldano and E. C. Pennings, Optical multi-mode interference devices based on selfimaging: principles and applications -Lightwave Technology, Journal of, J. Light. Technolgoy, vol.13, issue.4, pp.615-627, 1995.

T. T. Le, Design of a polarization-independent MMI SOI coupler based microresonator using sandwich structures, J. Eng. Sci. Technol, vol.8, issue.2, pp.120-130, 2013.

R. Halir, Colorless directional coupler with dispersion engineered sub-wavelength structure, Opt. Express, vol.20, issue.12, p.13470, 2012.

Z. Lu, Broadband silicon photonic directional coupler using asymmetric-waveguide based phase control, Opt. Express, vol.23, issue.3, p.3795, 2015.

M. Tran, T. Komljenovic, J. Hulme, M. Davenport, and J. Bowers, A Robust Method for Characterization of Optical Waveguides and Couplers, IEEE Photonics Technol. Lett, issue.99, pp.1-1, 2016.

K. Jinguji, Mach-Zehnder interferometer type optical waveguide coupler with wavelength-flattened coupling ratio, Electron. Lett, vol.26, issue.17, 1990.

G. T. Reed and A. P. Knights, Silicon Photonics, An Introduction, 2004.

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. De-la-rue et al., A compact two-dimensional grating coupler used as a polarization splitter, IEEE Photonics Technol. Lett, vol.15, issue.9, pp.1249-1251, 2003.

W. Bogaerts, A polarization-diversity wavelength duplexer circuit in silicon-oninsulator photonic wires, Opt. Express, vol.15, issue.4, pp.1567-1578, 2007.

S. Pathak, M. Vanslembrouck, P. Dumon, D. Van-thourhout, and W. Bogaerts, Compact SOIbased polarization diversity wavelength de-multiplexer circuit using two symmetric AWGs, Opt. Express, vol.20, issue.26, p.493, 2012.

S. P. Anderson and M. Webster, Silicon Photonic Polarization-Multiplexing Nanotaper for Chip-to-Fiber Coupling, J. Light. Technol, vol.34, issue.2, pp.372-378, 2016.

J. M. Mendinueta, S. Shinada, H. Furukawa, and N. Wada, Ultra-high-capacity optical packet switching networks with coherent polarization division multiplexing modulation formats and related technologies, Int. Conf. Transparent Opt. Networks, 2017.

A. Nespola, Real-Time Demonstration of Polarization-Multiplexed PAM using a Compact Silicon Photonics Device, Opt. Fiber Commun. Conf. Expo, pp.1-3, 2018.

N. Matsuda, H. Fukuda, T. Tsuchizawa, W. J. Munro, K. Shimizu et al., Monolithic Integration of Polarization-entangled Photon Pair Source Using Silicon Photonics Technology, 2013.

E. Heemskerk, On-chip polarization beam splitter design for optical coherence tomography, Opt. Express, vol.26, issue.25, pp.33349-33355, 2018.

Y. Shani, C. H. Henry, R. C. Kistler, R. F. Kazarinov, and K. J. Orlowsky, Integrated Optic Adiabatic Devices on Silicon, IEEE J. Quantum Electron, vol.27, issue.3, pp.556-566, 1991.

H. Fukuda, K. Yamada, T. Tsuchizawa, T. Watanabe, H. Shinojima et al., Ultrasmall polarization splitter based on silicon wire waveguides, Opt. Express, vol.14, issue.25, p.12401, 2006.

D. Dai and J. E. Bowers, Novel ultra-short and ultra-broadband polarization beam splitter based on a bent directional coupler, Opt. Express, vol.19, issue.19, p.18614, 2011.

F. Zhang, H. Yun, Y. Wang, Z. Lu, L. Chrostowski et al., Compact broadband polarization beam splitter using a symmetric directional coupler with sinusoidal bends, Opt. Lett, vol.42, issue.2, p.235, 2017.

H. Wu, Y. Tan, and D. Dai, Ultra-broadband high-performance polarizing beam splitter on silicon, Opt. Express, vol.25, issue.6, p.6069, 2017.

D. Dai, Z. Wang, and J. E. Bowers, Ultrashort broadband polarization beam splitter based on an asymmetrical directional coupler, Opt. Lett, vol.36, issue.13, p.2590, 2011.

Z. Su, Four-port integrated polarizing beam splitter, Opt. Lett, vol.39, issue.4, pp.965-973, 2014.

B. M. Rahman, N. Somasiri, C. Themistos, and K. T. Grattan, Design of optical polarization splitters in a single-section deeply etched MMI waveguide, Appl. Phys. B Lasers Opt, vol.73, issue.5-6, pp.613-618, 2001.

E. L. Jung-moo, H. Hong, . Ho-ryoo, O. Beom-hoan, and S. Lee, Novel Design of Polarization Splitter Based on a Quasi-state Multimode Interference Coupler, CLEO, pp.194-195, 2002.

M. Yin, W. Yang, Y. Li, X. Wang, and H. Li, CMOS-compatible and fabrication-tolerant MMIbased polarization beam splitter, Opt. Commun, vol.335, pp.48-52, 2015.

P. Splitter, Mach-Zehnder interferometer polarization splitter in InGaAsP/InP, IEEE Photonics Technol. Lett, vol.6, issue.3, pp.402-405, 1994.

D. Dai, Z. Wang, J. Peters, and J. E. Bowers, Compact polarization beam splitter using an asymmetrical Mach-Zehnder interferometer based on silicon-on-insulator waveguides, IEEE Photonics Technol. Lett, vol.24, issue.8, pp.673-675, 2012.

B. Shen, P. Wang, R. Polson, and R. Menon, An integrated-nanophotonics polarization beamsplitter with 2.4 × 2.4 ?m2 footprint, Nat. Photonics, vol.9, issue.6, pp.378-382, 2015.

S. J. Savory, Digital Coherent Optical Receivers: Algorithms and Subsystems, IEEE J. Sel. Top. Quantum Electron, vol.16, issue.5, pp.1164-1179, 2010.

V. P. Tzolov and M. Fontaine, A passive polarization converter free of longitudinallyperiodic structure, Opt. Commun, vol.4018, issue.96, 1996.

Y. Fei, L. Zhang, Y. Cao, X. Lei, and S. Chen, A novel polarization rotator based on an asymmetric slot waveguide, Opt. Commun, vol.324, pp.22-25, 2014.

K. Goi, Low-loss partial rib polarization rotator consisting only of silicon core and silica cladding, Opt. Lett, vol.40, issue.7, pp.1410-1413, 2015.

D. Dai and J. E. Bowers, Novel concept for ultracompact polarization splitter-rotator based on silicon nanowires, Opt. Express, vol.19, issue.11, p.10940, 2011.

Y. Xiong, D. Xu, J. H. Schmid, P. Cheben, S. Janz et al., Fabrication tolerant and broadband polarization splitter and rotator based on a taper-etched directional coupler, Opt. Express, vol.22, issue.14, p.17458, 2014.

W. D. Sacher, T. Barwicz, B. J. Taylor, and J. K. Poon, Polarization rotator-splitters in standard active silicon photonics platforms, Opt. Express, vol.22, issue.4, p.3777, 2014.

K. Tan, C. Yu, and C. Lee, Compact CMOS-compatible polarization splitter and rotator based on 90° bends, Int. Conf. Opt. MEMS Nanophotonics, vol.2016, issue.13, pp.14506-14512, 2016.

Z. Lu, Y. Wang, F. Zhang, N. A. Jaeger, and L. Chrostowski, Wideband silicon photonic polarization beamsplitter based on point-symmetric cascaded broadband couplers, Opt. Express, vol.23, issue.23, p.29413, 2015.

X. Sun, J. S. Aitchison, and M. Mojahedi, Realization of an ultra-compact polarization beam splitter using asymmetric MMI based on silicon nitride / silicon-on-insulator platform, Opt. Express, vol.25, issue.7, p.8296, 2017.

D. A. Hen, Highly efficient silicon optical polarization rotators based on mode order conversions, Opt. Lett, vol.41, issue.5, pp.1070-1073, 2016.

H. Xu and Y. Shi, Ultra-broadband silicon polarization splitter-rotator based on the multimode waveguide, Opt. Express, vol.25, issue.15, p.18485, 2017.

K. Tan, Y. Huang, G. Lo, C. Yu, and C. Lee, Experimental realization of an O-band compact polarization splitter and rotator, Opt. Express, vol.25, issue.4, p.3234, 2017.

W. D. Sacher, Polarization rotator-splitters and controllers in a Si_3N_4-on-SOI integrated photonics platform, Opt. Express, vol.22, issue.9, p.11167, 2014.

, G.694.1 Spectral grids for WDM applications: DWDM frequency grid

, G.694.2 Grilles spectrales pour les applications de multiplexage par répartition en longueur d'onde: grille espacée CWDM

G. Gao, Silicon nitride O-band (de)multiplexers with low thermal sensitivity, Opt. Express, vol.25, issue.11, p.12260, 2017.

J. C. Ikkelsen, A. B. Ois, T. L. Ordello, D. M. Ahgerefteh, S. M. Enezo et al., Polarization-insensitive silicon nitride Mach-Zehnder lattice wavelength demultiplexers for CWDM in the O-band, Opt. Express, vol.26, issue.23, pp.16-20, 2018.

P. Orlandi, Silicon photonics : from present status to future developments, Eur. Conf. Integr. Opt. ECIO, 2017.

S. Dwivedi, P. De-heyn, P. Absil, J. Van-campenhout, and W. Bogaerts, Coarse wavelength division multiplexer on silicon-on-insulator for 100 GbE, IEEE Int. Conf. Gr. IV Photonics GFP, 2015.

W. Bogaerts, Silicon-on-insulator spectral filters fabricated with CMOS technology, IEEE J. Sel. Top. Quantum Electron, vol.16, issue.1, pp.33-44, 2010.

C. Palmer, Diffraction Grating Handbook, Sixth Edition, 2005.

H. A. Rowland, Preliminary notice of the results accomplished in the manufacture and theory of gratings for optical purposes, Philos. Mag. J. Sci, vol.13, issue.84, pp.469-474, 1882.

G. R. Harrison, The Production of Diffraction Gratings : II . The Design of Echelle Gratings and Spectrographs, J. Opt. Soc. Am, vol.39, issue.7, 1949.

J. Brouckaert, W. Bogaerts, P. Dumon, J. Schrauwen, D. Van-thourhout et al., Planar concave grating demultiplexer on a nanophotonic silicon-on-insulator platform, Conf. Proc. -Lasers Electro-Optics Soc. Annu. Meet, vol.25, issue.5, pp.312-313, 2007.

M. S. Smith and K. A. Mcgreer, Diffraction Gratings Utilizing Total Internal Reflection Facets in Littrow Configuration, IEEE Photonics Technol. Lett, vol.11, issue.1, pp.84-86, 1999.

N. Zhu, J. Song, L. Wosinski, and S. He, Total internal reflection type echelle grating demultiplexer based on amorphous silicon nanowire platform, SPIE 7134, Passive Components and Fiber-based Devices V, 2008.

S. Bidnyk, Silicon-on-Insulator-Based Planar Circuit for Passive Optical Network Applications, IEEE Photonics Technol. Lett, vol.18, issue.22, pp.2392-2394, 2006.

C. Sciancalepore, Low-crosstalk fabrication-insensitive echelle grating demultiplexers on silicon-on-insulator, IEEE Photonics Technol. Lett, vol.27, issue.5, pp.494-497, 2015.

M. Kaschel, F. Letzkus, J. Butschke, P. Skwierawski, M. Schneider et al., Echelle grating for silicon photonics applications: integration of electron beam lithography in the process flow and first results, Proc. SPIE, vol.9891, p.98911, 2016.

J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets et al., Planar concave grating demultiplexer with high reflective bragg reflector facets, IEEE Photonics Technol. Lett, vol.20, issue.4, pp.309-311, 2008.

&. Lumerical and . Stack,

D. Chowdhury, Design of low-loss and polarization-insensitive reflection grating-based planar demultiplexers, IEEE J. Sel. Top. Quantum Electron, vol.6, issue.2, pp.233-239, 2000.

C. Sciancalepore, O-band echelle grating demultiplexers on SiNOI featuring low-loss and reduced thermal sensitiveness, Proc. SPIE, 2018.

S. Pathak, P. Dumon, D. Van-thourhout, and W. Bogaerts, Comparison of AWGs and Echelle Gratings for Wavelength Division Multiplexing on Silicon-on-Insulator, IEEE Photonics J, vol.6, issue.5, 2014.

M. K. Smit, New focusing and dispersive planar component based on an optical phased array, Electron. Lett, vol.24, issue.7, p.385, 1988.

C. Dragone, Efficient NxN star coupler based on fourier optics, Electron. Lett, vol.24, issue.15, pp.942-944, 1988.

N. Ismail, Improved arrayed-waveguide-grating layout avoiding systematic phase errors, Opt. Express, vol.19, pp.8781-8794, 2011.

M. K. Smit and C. Van-dam, PHASAR-based WDM-devices: Principles, design and applications, IEEE J. Sel. Top. Quantum Electron, vol.2, issue.2, pp.236-250, 1996.

S. Pathak, D. Van-thourhout, and W. Bogaerts, Design trade-offs for silicon-on-insulatorbased AWGs for (de)multiplexer applications, Opt. Lett, vol.38, issue.16, p.2961, 2013.

C. Van-dam, Loss reduction for phased-array demultiplexers using a double etch technique, pp.52-56, 1996.

J. H. Den-besten, Low-loss, compact, and polarization independent PHASAR demultiplexer fabricated by using a double-etch process, IEEE Photonics Technol. Lett, vol.14, issue.1, pp.62-64, 2002.

P. J. Bock, Sub-wavelength grating mode transformers in silicon slab waveguides, Opt. Express, vol.17, issue.21, pp.19120-19153, 2009.

H. Takaiashi, S. Suzuki, K. Kato, and I. Nishi, Arrayed-Waveguide Grating for Wavelength Division Multi/Demultiplexer With Nanometre Resolution, Electron. Lett, vol.26, issue.2, pp.87-88, 1990.

H. Takahashi, Y. Hibino, and I. Nishi, Polarization-insensitive arrayed-waveguide grating wavelength multiplexer on silicon, Opt. Lett, vol.17, issue.7, pp.499-501, 1992.

Y. Inoue, Polarization Mode Converter With Polyimide Half Waveplate in Silica-Based Planar Lightwave Circuits, IEEE Photonics Technol. Lett, vol.6, issue.5, pp.626-628, 1994.

C. R. Doerr, L. Chen, L. L. Buhl, and Y. Chen, Eight-Channel SiO / Si N / Si / Ge CWDM Receiver, IEEE Photonics Technol. Lett, vol.23, issue.17, pp.1201-1203, 2011.

Y. Inoue, M. Itoh, Y. Hashizume, Y. Hibino, . Sugita et al., Novel birefringence compensating AWG design, Opt. Fiber Commun. Conf, vol.3, pp.4-6, 2001.

M. R. Amersfoort, Phased-array wavelength demultiplexer with flattened wavelength response, Elec. Lett, 2017.

P. Demeester, Phased-array wavelength demultiplexer with flattened wavelength response, Electron. Lett, vol.30, issue.4, pp.300-302, 1994.

Y. Doi, Flat and high responsivity CWDM photoreceiver using silica-based AWG with multimode output waveguides, Electron. Lett, vol.39, issue.22, 2003.

A. Rigny, A. Bruno, and H. Sik, Double-Phased Array for a Flattened Spectral Response, IEEE, vol.4, issue.448, pp.79-82, 1997.

Y. P. Ho, H. Li, and Y. J. Chen, Flat channel-passband-wavelength multiplexing and demultiplexing devices by multiple-rowland-circle design, IEEE Photonics Technol. Lett, vol.9, issue.3, pp.342-344, 1997.

M. R. Amersfoort, J. B. Soole, H. P. Leblanc, N. C. Andreadakis, A. Rajhel et al., Passband broadening of integrated arrayed waveguide filters using multimode interference couplers, Electron. Lett, vol.32, issue.5, pp.449-451, 1996.

S. Pathak, M. Vanslembrouck, P. Dumon, D. Van-thourhout, and W. Bogaerts, Optimized silicon awg with flattened spectral response using an MMI aperture, J. Light. Technol, vol.31, issue.1, pp.87-93, 2013.

T. Shibata, S. Kamei, T. Kitoh, T. Tanaka, and M. Kohtoku, Compact and low insertion loss (approximately 1.0 dB) Mach-Zehnder interferometer-synchronized arrayed-waveguide grating multiplexer with flat-top frequency response, Opt. Express, vol.16, issue.21, pp.16546-16551, 2008.

S. Kamei, T. Kitoh, T. Goh, A. Mori, and H. Takahashi, Low-loss, wide and low-ripple passband arrayed-waveguide grating with tandem MZI-synchronized configuration, Eur. Conf. Opt. Commun, pp.5-6, 2009.

N. Juhari, P. Menon, A. A. Ehsan, S. Shaari, A. Jalar et al., Performance on optical properties of AWG based on SOI demultiplexer and receiver sensitivity in CWDM system, Conf. Comput. Commun. Control Technol, pp.157-161, 2015.

P. Pan, Compact 4-channel AWGs for CWDM and LAN WDM in data center monolithic applications, Opt. Laser Technol, vol.75, pp.177-181, 2015.

J. Pyo, Investigation of 18-channel CWDM arrayed waveguide grating with silicabased waveguide, Opt. Eng, vol.55, issue.8, p.87110, 2016.

&. Yilut and P. Awg, , p.27, 2019.

P. Wayoptics and . Awg, , p.27, 2019.

C. H2020,

T. H. Maiman, Stimulated Optical Radiation in Ruby, Nature, vol.187, 1960.

R. J. Collins, D. F. Nelson, A. L. Schawlow, W. Bond, C. G. Garrett et al., Coherence, narrowing, directionality, and relaxation oscillations in the light emission from ruby, Phys. Rev. Lett, vol.5, issue.7, pp.303-305, 1960.

P. A. Franken, A. E. Hill, C. W. Peters, and G. Weinreich, Generation of optical harmonics, Phys. Rev. Lett, vol.7, issue.4, 1961.

R. W. Boyd, Nonlinear optics, 2008.

C. Lundström, Fiber optic parametric amplifier with 10-dB net gain without pump dithering, IEEE Photonics Technol. Lett, vol.25, issue.3, pp.234-237, 2013.

D. Y. Oh, D. Sell, H. Lee, K. Y. Yang, S. A. Diddams et al., Supercontinuum generation in an on-chip silica waveguide, Opt. Lett, vol.39, issue.4, pp.1046-1048, 2014.

D. Duchesne, Efficient self-phase modulation in low loss, high index doped silica glass integrated waveguides, Opt. Express, vol.17, issue.3, p.1865, 2009.

X. Gai, S. Madden, D. Choi, D. Bulla, and B. Luther-davies, Dispersion engineered Ge11.5As24Se64.5 nanowires with a nonlinear parameter of 136Wm at 1550nm, Opt. Express, vol.18, issue.18, pp.9314-9322, 2010.

J. J. Wathen, P. Apiratikul, C. J. Richardson, G. A. Porkolab, G. M. Carter et al., Efficient continuous-wave four-wave mixing in bandgap-engineered AlGaAs waveguides, Opt. Lett, vol.39, issue.11, pp.3161-3164, 2014.

H. K. Tsang and Y. Liu, Nonlinear optical properties of silicon waveguides, Semic. Science and Tech, vol.23, 2008.

C. Grillet, Amorphous silicon nanowires combining high nonlinearity, FOM and optical stability, Opt. Express, vol.20, issue.20, pp.22609-22615, 2012.

D. T. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, Group velocity dispersion and self phase modulation in silicon nitride waveguides, Appl. Phys. Lett, vol.96, issue.6, pp.6-8, 2010.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-foster, A. L. Gaeta et al., CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects, Nat. Photonics, vol.4, issue.1, pp.37-40, 2010.

M. H. Pfeiffer, Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics, Optica, vol.3, issue.1, pp.1-6, 2015.

X. Xue, Thermal tuning of Kerr frequency combs in silicon nitride microring resonators, Opt. Express, vol.24, issue.1, p.687, 2016.

H. Guo, Mid-infrared frequency comb via coherent dispersive wave generation in silicon nitride nanophotonic waveguides, Nat. Photonics, vol.12, issue.6, pp.330-335, 2018.

H. E. Dirani, Crack-free silicon-nitride-on-insulator nonlinear circuits for continuum generation in the c-band, IEEE Photonics Technol. Lett, vol.30, issue.4, pp.355-358, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02006890

X. Liu, Octave-spanning supercontinuum generation in a silicon-rich nitride waveguide, Opt. Lett, vol.41, issue.12, pp.1-4, 2016.

H. Zhao, Visible-to-near-infrared octave spanning supercontinuum generation in a silicon nitride waveguide, Opt. Lett, vol.40, issue.10, pp.2177-2180, 2015.

J. P. Epping, On-chip visible-to-infrared supercontinuum generation with more than 495 THz spectral bandwidth, Opt. Express, vol.23, issue.15, p.19596, 2015.

J. M. Boggio, T. Fremberg, R. Eisermann, R. Haynes, L. Zimmermann et al., Dispersion Flattened Silicon Nitride Waveguide for Supercontinuum Generation, OSA, vol.1, pp.3-4, 2014.

L. I. Ang, Nonlinear silicon nitride waveguides based on a PECVD deposition platform, Opt. Express, vol.26, issue.8, pp.9645-9654, 2018.

M. A. Uckett, Observation of second-harmonic generation in silicon nitride waveguides through bulk nonlinearities, Opt. Express, vol.24, issue.15, pp.597-607, 2016.

J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, Harmonic generation in silicon nitride ring resonators, Opt. Express, vol.19, issue.12, pp.4881-4887, 2011.

R. R. Alfano and S. L. Shapiro, Observation of Self-Phase Modulation and Small-Scale Filaments in Crystals and Glasses, Phys. Rev. Lett, vol.24, issue.11, 1970.

C. Lin and R. H. Stolen, New nanosecond continuum for excited-state spectroscopy, Appl. Phys. Lett, vol.28, issue.4, pp.216-218, 1976.

O. Boyraz, T. Indukuri, and B. Jalali, Self-phase-modulation induced spectral broadening in silicon waveguides, Opt. Express, vol.12, issue.5, p.829, 2004.

M. A. Foster, A. L. Gaeta, M. Lipson, J. S. Levy, R. Halir et al., Ultrabroadband supercontinuum generation in a CMOS-compatible platform, Opt. Lett, vol.37, issue.10, p.1685, 2012.

A. R. Johnson, Octave-spanning coherent supercontinuum generation in a silicon nitride waveguide, Opt. Lett, vol.40, issue.21, p.5117, 2015.

T. Wang, Supercontinuum generation in bandgap engineered, back-end CMOS compatible silicon rich nitride waveguides, Laser Photonics Rev, vol.9, issue.5, pp.498-506, 2015.

Y. Kodama and A. Hasegawa, Nonlinear Pulse Propagation in a Monomode Dielectric Guide, IEEE J. Quantum Electron, vol.23, issue.5, pp.510-524, 1987.

J. M. Dudley, G. Genty, and S. Coen, Supercontinuum generation in photonic crystal fiber, Rev. Mod. Phys, vol.78, issue.4, pp.1135-1184, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00268071

P. K. Wai, C. R. Menyuk, Y. C. Lee, and H. H. Chen, Nonlinear pulse propagation in the neighborhood of the zero-dispersion wavelength of monomode optical fibers, Opt. Lett, vol.11, issue.7, p.464, 2008.

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson et al., Octave-spanning frequency comb generation in a silicon nitride chip, ArXiv, pp.2-4, 2011.

D. R. Carlson, Self-referenced frequency combs using high-efficiency silicon-nitride waveguides, ArXiv, pp.1-8, 2017.

D. Benedikovic, C. Alonso-ramos, D. Pérez-galacho, S. Guerber, V. Vakarin et al., L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep UV lithography, Optics Letters, vol.42, issue.17, pp.3439-3442, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01800599

. Simone, A. P. Iadanza, . Bakoz, J. K. Praven, D. Singaravelu et al.,

G. C. Schulz, S. Devarapu, C. Guerber, F. Baudot, S. Boeuf et al., Thermally Stable Hybrid Cavity Laser Based on Silicon Nitride Gratings, Applied Optics, vol.57, issue.22, pp.218-223, 2018.

S. Guerber, C. Alonso-ramos, D. Benedikovic, E. Durán-valdeiglesias, X. L. Roux et al., Broadband polarization beam splitter on a silicon nitride platform for O-band operation, Photonics Technology Letters, vol.30, issue.19, pp.1679-1682, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01940099

M. Calvo, S. Guerber, G. Beaudin, M. Canva, P. R. Romeo et al., Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment, Japanese Journal of Applied Physics, vol.58, 2019.
URL : https://hal.archives-ouvertes.fr/hal-02074726

C. Conférences, M. Baudot, S. Douix, S. Guerber, N. Crémer et al., Developments in 300mm silicon photonics using traditional CMOS fabrication methods and materials, 2017.

S. Guerber, C. Alonso-ramos, D. Perez-galacho, X. Leroux, N. Vulliet et al., Design and Integration of an O-band Silicon Nitride AWG for CWDM Applications, 14th International Conference on Group IV Photonics, 2017.

C. Baudot, S. Crémer, N. Vulliet, M. Douix, S. Guerber et al., Advanced R&D addressing future trends in integrated silicon photonics, Photonics West, SPIE Proceedings, vol.10109, 2017.

M. Calvo, S. Guerber, G. Beaudin, M. Canva, C. Baudot et al., Silicon Nitride ring resonator for biosensing fabricated on 300mm SOI industrial environment, 20th Photonics North Conference, 2018.

M. Calvo, S. Guerber, G. Beaudin, M. Canva, C. Baudot et al., Ring Resonator Designed for Biosensing Applications Manufactured on 300 mm SOI in an Industrial Environment, 50th International Conference on Solid State Devices and Materials, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02074726

D. Benedikovic, C. A. Alonso-ramos, S. Guerber, D. Pérez-galacho, V. Vakarin et al., Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography, Photonics Europe, SPIE Proceedings 10686, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01800594

S. Guerber, C. Alonso-ramos, D. Benedikovic, D. Perez-galacho, X. L. Roux et al., Integrated SiN on SOI dual photonic devices for advanced datacom solutions, Photonics Europe, SPIE Proceedings, vol.10686, 2018.

C. A. Alonso-ramos, D. Benedikovich, D. Pérez-galacho, S. Guerber, V. Vakarin et al., High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deepultraviolet lithography, Photonics West Opto, vol.10535, 2018.

E. Durán-valdeiglesias, C. Alonso-ramos, S. Guerber, D. Oser, X. L. Roux et al., Dual-polarization O-band silicon nitride Bragg filters with high extinction ratio, European Conference on Integrated Optics, 2018.

C. Baudot, M. Douix, S. Guerber, S. Crémer, N. Vulliet et al., Advanced solutions in silicon photonics using traditional fabrication methods and materials of CMOS technologies, Photonics West Opto, vol.10537, 2018.

C. Baudot, I. Charlet, M. Douix, S. Guerber, S. Crémer et al., Developments in 300mm Low-Power Si Capacitive Modulators, European Conference on Integrated Optics, 2018.

J. Rönn, W. Zhang, A. Autere, X. L. Roux, E. Durán-valdeiglesias et al., On-chip optical amplification at C-band in silicon nitride slot waveguides, 2018.

A. Ruiz-caridad, G. Marcaud, J. M. Ramírez, L. Largeau, T. Maroutian et al., Optical gain evaluation on rare-earth doped Yttria-stabilized zirconia for hybrid integration on silicon photonics platforms, Optics+Optoelectronics, Proceedings 11031-25, 2019.

D. Benedikovic, M. Berciano, C. Alonso-ramos, X. L. Roux, S. Guerber et al., Enhanced performance of integrated silicon nanophotonic devices engineered by subwavelength grating structures, Optics+Optoelectronics, Proceedings 11031-2, 2019.

A. Ruiz-caridad, G. Marcaud, J. M. Ramirez, L. Largeau, T. Maroutian et al., Erbium-doped Yttria-stabilized Zirconia thin layers for photonic applications, 2019.

D. Benedikovic, C. Alonso-ramos, S. Guerber, V. Vakarin, G. Marcaud et al., L-shaped grating couplers engineered with subwavelength metamaterial for sub-decibel coupling loss, 2019.

C. Brevets-sylvain-guerber, F. Baudot, and . Domengie, Optical coupling device with a wide bandwidht and reduced power losses, vol.3063151, pp.20180239088-1

S. Guerber, C. Baudot-;-sylvain, C. Guerber, . Baudot-;-sylvain, P. L. Guerber et al., Suppression of parasitic signals in Silicon Nitride waveguides, Charles Baudot