Caractérisation et modélisation des propriétés mécaniques des couches minces pour l'intégration 3D - Application aux matériaux plastiques et aux grandes déformations

Abstract : The fabrication of devices in microelectronics today involves a three-dimensional architecture: "3D integration". The implementation of this technology may be limited by issues of mechanical integrity of the devices during manufacturing processes. Indeed, the deposit of several layers with distinct thermomechanical properties and at different temperatures or thinning the silicon substrate to achieve interconnections are all steps to control in order to prevent decohesions along interfaces, distortions of wafers or too high induced stresses and to guarantee the reliability of the components.In this work we have approached these questions by considering deposits of various nature (metal, oxide or polymer) for which a thermoelastic response is considered, depending on the temperature if necessary. A semi-analytical model "Sigmapps", exploitable in a clean room, was developed to predict the deformation induced during the deposition processes and to predict the stresses induced in each layer, also enabling the identification of thermoelastic properties of a layer by "reverse approach". In this case, experimental measurements are necessary and were conducted at LETI. In a second part, we studied the phenomenon of instability of a multilayer structure, including internal stresses. Here, the thermal loading of a bilayer has been considered as a "case study" and we have predicted the temperature at which instability appeared until the prediction of the "post-critical" state. Here too, the approach is semi-analytical to ensure its simple use in a clean room environment. The problem of the criticality of a deposit on the stability of a wafer can also be addressed. It is thus possible to orient the choice of materials to be integrated and their thicknesses to guarantee the integrity of the devices and to optimize the production sequences.
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Kossi Assigbe. Caractérisation et modélisation des propriétés mécaniques des couches minces pour l'intégration 3D - Application aux matériaux plastiques et aux grandes déformations. Mécanique des matériaux [physics.class-ph]. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAI023⟩. ⟨tel-02169747⟩

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