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, Pendant ce temps, couvrir le fond et les bords du spin coater avec du papier aluminium (pour récupérer la résine excédente)

. Placer-le-wafer-sur-le-spin and . Coater,

, Pour nettoyer le wafer, recouvrir le wafer d'isopropanol, et lancer un cycle de 30 s à 500 rpm

, Une fois que l'isopropanol est totalement évaporé

, Lancer le cycle de spin coating : 500 rpm pour étaler et une vitesse supérieure pour réduire à l'épaisseur désirée

, A la fin du cycle, sortir le wafer avec la pince à wafer et le déposer sur la plaque à 65°C

, Le laisser le temps indiqué sur le tableau Tableau A.1, et pendant ce temps, retirer le bourrelet de résine situé sur le bord du wafer avec le plat de la spatule

, Déposer ensuite le wafer sur l'autre plaque (95°C)

, Insolation 1. A la fin de la cuisson

L. , UV KUB sur le disque de PDMS puis placer par-dessus le masque puis la plaque de quartz

, Choisir une épaisseur de wafer de 1500 µm et une distance de travail de 0 µm (pour avoir la plaque de quartz et le masque en contact avec la résine)

. Choisir-le-cycle,

, Bake Retirer la plaque de quartz et le masque puis sortir le wafer et cuire la résine suivant les temps indiqués

, Développement 1. Après cuisson, laisser refroidir le wafer

. Le,

, Sinon, sécher à l'azote et observer ma surface au microscope pour vérifier l'état de la texturation

, Postbake Pour durcir la résine, faire chauffer le wafer à 150°C pendant 15 minutes

. Jeter-le-développeur and C. Dans-le-bidon,