Multi-dimensional Teager-Kaiser signal processing for improved characterization using white light interferometry

Abstract : The use of white light interference fringes as an optical probe in microscopy is of growing importance in materials characterization, surface metrology and medical imaging. Coherence Scanning Interferometry (CSI, also known as White Light Scanning Interferometry, WSLI) is well known for surface roughness and topology measurement [1]. Full-Field Optical Coherence Tomography (FF-OCT) is the version used for the tomographic analysis of complex transparent layers. Both techniques generally make use of some sort of fringe scanning along the optical axis and the acquisition of a stack of xyz images. Image processing is then used to identify the fringe envelopes along z at each pixel in order to measure the positions of either a single surface or of multiple scattering objects within a layer.In CSI, the measurement of surface shape generally requires peak or phase extraction of the mono dimensional fringe signal. Most of the methods are based on an AM-FM signal model, which represents the variation in light intensity measured along the optical axis of an interference microscope [2]. We have demonstrated earlier [3, 4] the ability of 2D approaches to compete with some classical methods used in the field of interferometry, in terms of robustness and computing time. In addition, whereas most methods only take into account the 1D data, it would seem advantageous to take into account the spatial neighborhood using multidimensional approaches (2D, 3D, 4D), including the time parameter in order to improve the measurements.The purpose of this PhD project is to develop new n-D approaches that are suitable for improved characterization of more complex surfaces and transparent layers. In addition, we will enrich the field of study by means of heterogeneous image processing from multiple sensor sources (heterogeneous data fusion). Applications considered will be in the fields of materials metrology, biomaterials and medical imaging.
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Gianto Gianto. Multi-dimensional Teager-Kaiser signal processing for improved characterization using white light interferometry. Signal and Image Processing. Université de Strasbourg, 2018. English. ⟨NNT : 2018STRAD026⟩. ⟨tel-02162077⟩

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