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Development of compensated immersion 3D optical profiler based on interferometry

Abstract : Coherence Scanning Interferometry (CSI) or White Light Scanning Interferometry (WLSI) is a well-established optical imaging technique for measuring the surface roughness and the shape of microscopic surfaces. The advantages are the nanometric axial sensitivity, a wide field of view (hundreds of μm to several mm) and the measurement speed (a few seconds to a few minutes). The technique is based on optical interferometry with a Linnik configuration which very difficult to adjust but it offers several advantages: higher numerical aperture objectives to improve spatial resolution; long working distance, because there is no need for any of the components in front of the lens; a polarized light mode configuration; contrasting fringes because of the possibility of modifying the optical pathways and the intensities of the two arms independently. While the use of a water-immersion objective gives the following advantages: to avoid the problems related to the adjustment between the formation of the fringes and the plane of formation of the image; and to minimize the difference in dispersion between the arms of the interferometer. In order to be able to measure in water mode and to obtain high lateral resolution samples of chemical and biological types, several challenges must be overcome such as balancing the OPD on both arms; finding and adjusting the good contrast fringes; finding and adapting a suitable water compensation of water in horizontal reference arm to operate a system in water.
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Submitted on : Tuesday, June 18, 2019 - 5:15:17 PM
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  • HAL Id : tel-02159409, version 1


Husneni Mukhtar. Development of compensated immersion 3D optical profiler based on interferometry. Optics / Photonic. Université de Strasbourg, 2018. English. ⟨NNT : 2018STRAD017⟩. ⟨tel-02159409⟩



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