Couches nanostructurées par dépôt en incidence oblique : corrélations microstructure et propriétés optiques pour application aux traitements antireflets hautes performances dans le visible étendu et l'infrarouge

Abstract : Anti-reflective (AR) coatings are widely used to improve the transmission of optical systems composed of window, lenses, separating filters,... In this thesis, the spectral ranges targeted are the extended visible [400-1800nm] and the mid infrared [3.7-4.8µm]. Thin film deposition nanostructuring method using oblique angle deposition (oblique angle deposition) PVD technique was chosen because it allows high performance AR to be considered over a wide wavelength range, by an industrial process. The introduction of porosity with the control of deposition angle is used to nanostructure the architecture of each layer and stack; a method for modifying and optimizing the optical properties of the constituent layers for optimal complete design. A mapping of the effective indices accessible by OAD has been identified for the three materials deposited (TiO2, SiO2 and Ge). However optical properties of these nanostructured layers differ greatly from those of dense layers due to the presence of anisotropy, index gradient, diffusion and absorption. Based on advanced microstructural, chemical and optical characterizations (AFM, SEM, TEM, FIB tomography, TEM tomography, EDX, EELS, spectrophotometry and generalized ellipsometry) a more complex analytical optical model coupled with finite element analyses (FDTD) is presented. All the work has enabled OAD to develop simple two-layer anti-reflective coatings that already demonstrate high levels of transmission, superior to existing (interferential) or work in progress (Moth-eyes) AR treatments.
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Florian Maudet. Couches nanostructurées par dépôt en incidence oblique : corrélations microstructure et propriétés optiques pour application aux traitements antireflets hautes performances dans le visible étendu et l'infrarouge. Optique / photonique. Université de Poitiers, 2018. Français. ⟨NNT : 2018POIT2295⟩. ⟨tel-02139079⟩

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