Skip to Main content Skip to Navigation
Theses

Optimisation d'un procédé de dépôt plasma micro-onde pour l'élaboration de substrats de diamant fortement dopés au bore

Abstract : The main objective of this PhD thesis is the optimization of diamond growth conditions in a MPACVD reactor in order to one hand, synthesize single crystal diamond films with low dislocation density, prerequisite to their use in the field of power electronics and on the other hand, synthesize thick intrinsic and boron doped monocrystalline diamond films (>100 microns) on (111)-oriented substrates, crystallographic orientation which is well known to promote twinning. In a first part, a process of inflection and confinement of the dislocations has been developed using (100) pyramidal shape substrates coupled with specific growth conditions. This innovative and original study open the way for the fabrication of single crystal diamond films with low defect density. In a second part, the effect of different growth parameters has been studied to optimize our growth process for (111) orientation. It was thus demonstrated the existence of a narrow window of growth parameters pressure, microwavepower, temperature and methane concentration which ensures a good trade-off between crystalline quality and growth rate, allowing the synthesis of heavily boron-doped diamond thick films on this specific orientation, thus opening the possibility of combining the n-type doping efficiency and achieving vertical bipolar components for applications in hightemperaturehigh-voltage electronics.
Document type :
Theses
Complete list of metadatas

Cited literature [345 references]  Display  Hide  Download

https://tel.archives-ouvertes.fr/tel-02125069
Contributor : Abes Star :  Contact
Submitted on : Friday, May 10, 2019 - 10:07:10 AM
Last modification on : Saturday, February 15, 2020 - 2:03:49 AM
Long-term archiving on: : Wednesday, October 2, 2019 - 10:39:22 AM

File

edgalilee_th_2016_boussadi.pdf
Version validated by the jury (STAR)

Identifiers

  • HAL Id : tel-02125069, version 1

Collections

Citation

Amine Boussadi. Optimisation d'un procédé de dépôt plasma micro-onde pour l'élaboration de substrats de diamant fortement dopés au bore. Autre [q-bio.OT]. Université Sorbonne Paris Cité, 2016. Français. ⟨NNT : 2016USPCD065⟩. ⟨tel-02125069⟩

Share

Metrics

Record views

198

Files downloads

496