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La photolithographie cylindrique sur revêtement sol-gel photogravable

Abstract : The aim of this thesis is to analyze the photolithography tools used to print diffraction gratings and to identify those that are sufficiently flexible to be adapted to unconventional substrates such as cylinders or tubes. The photolithography tools developed have also been adjusted in order to write directly a diffraction grating in a functional layer of TiO2, supplied by the sol-gel pathway. This thesis is a prospective study because the periodicity or the pattern of the registered diffracting structures has not been defined for a specific application. Two photolithography tools have been successfully adapted to cylindrical substrates. They will be presented here and will be accompanied with a perspective for a specific application. Finally, the last chapter is distinct from the previous ones because it does not concern the development of a photolithography tool but on the chemical transformation of TiO2 (dielectric) into TiN (metal), it nevertheless remains in the continuity of its thesis because this transformation is adapted to all types of substrates
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Submitted on : Wednesday, April 17, 2019 - 4:53:58 PM
Last modification on : Monday, January 13, 2020 - 5:46:07 PM


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  • HAL Id : tel-02102844, version 1


Loïc Berthod. La photolithographie cylindrique sur revêtement sol-gel photogravable. Optique / photonique. Université de Lyon, 2017. Français. ⟨NNT : 2017LYSES009⟩. ⟨tel-02102844⟩



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