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Advances in quantitative micro/nanoscale thermometry using scanning thermal microscopy

Abstract : Thermal characterizations at nano-scale remain a challenge since the emergence of nano-structured devices. Having advantages in term of lateral resolution compared to far field techniques, the scanning thermal microscopy has become an essential tool for local materials heat transport characterization. In the frame of the European Quantiheat Project, several laboratories have worked together trying to figure out and to obtain quantitative thermal measurements covering spatial scales from the micrometre to the nanometre.This document contains six chapters with four main parts, in which micro-wire thermocouple based SThM probes have been used to enhance our knowledge in quantitative thermometry at this scale. This kind of probe has been developed and improved for several years. We demonstrate that it is adapted for measuring temperature of active samples as well as thermal conductivity of passive samples.Through the dissertation, the last version of the microscope (hardware, software) and probe design are presented. Attached on a quartz tuning fork, the tip-sample contact force can be quantified. Placed in a vacuum chamber, this system permits a full control of predominant parameters on the measurement such as air pressure and contact force. Thanks to samples provided by Quantiheat partners, measurements in active and passive modes have been performed to demonstrate that quantitative measurements are feasible. By changing ambient conditions from primary vacuum to ambient pressure, the tip-sample heat transfer mechanisms have been analysed in detail to reveal the preponderant role of air and solid-solid contact conductions.
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  • HAL Id : tel-02096873, version 1

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Tran Phong Nguyen. Advances in quantitative micro/nanoscale thermometry using scanning thermal microscopy. Thermics [physics.class-ph]. Université Bourgogne Franche-Comté, 2018. English. ⟨NNT : 2018UBFCD010⟩. ⟨tel-02096873⟩

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