Nanostructures de carbone dédiées aux interconnexions hautes fréquences

Philippe Roux-Levy 1
1 XLIM-SRF - Systèmes RF
XLIM - XLIM : SRF
Abstract : At extremely high frequency, electronic applications will have to challenge problems born from the size reduction and compactification of the systems. Physical limits of conventional materials will be reached and so new alternatives are necessary in the nano-packaging field. New materials have been studied to replace conventional materials. Among them, carbon nanotubes have shown extremely high electrical and thermal conductivity as well as extraordinary physical resistance. And so carbon nanotubes are a good candidate for applications such as interconnects, thermal management, electromagnetic shielding or structural reinforcement. All of those applications are capital for modern nano-packaging. In this manuscript, carbon nanotubes will be studied in depths to demonstrate again their incredible electronic and thermal properties. We will then focus on the study of two types of carbon nanotubes based interconnects: carbon nanotubes bumps based interconnects for Flip-Chip applications and wireless interconnects based on carbon nanotubes monopole antenna. Finally, we will study the possibility of creating passive RF components using carbon nanotubes structures. New ways of fabricating the carbon nanotubes structure were used in order to get a fabrication process of the prototype completely compatible with CMOS technologies.
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Philippe Roux-Levy. Nanostructures de carbone dédiées aux interconnexions hautes fréquences. Micro et nanotechnologies/Microélectronique. Université de Limoges, 2018. Français. ⟨NNT : 2018LIMO0102⟩. ⟨tel-02018707⟩

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