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Amélioration du traitement amont de pixels térahertz, monolithiquement intégrés en technologie CMOS, pour des systèmes d'imagerie en temps réel

Nicolas Monnier 1, 2
2 Lab-STICC_IMTA_MOM_PIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
Abstract : This thesis deals with the development of terahertz imager in CMOS technology with the objectives to make it robust and reliable, with real-time imaging capacity at ambient temperature and with low-cost production. These objectives has to be developed at the same time as the improvement of responses and sensibilities to get the imager functional and ready for industrialization. The characterization of a previous THz imager, done during this thesis, brought the possibility to redefine in a more rigorous way this characterization and to develop a methodology for designing the THz front-end pixel. This front-end includes the reception antenna and its electromagnetic environment and a field effect transistor (FET) rectifying the received THz signal. Various front-end of THz pixels, design for 300 GHz reception, were developed. The whole structure has to be monolithically integrated with the standard CMOS process in a complete circuit and the antenna is co-design with the rectifying MOSFET in order to satisfy the impedance matching. Every pixel includes an antenna, integrated in higher metal levels with a ground plan sometimes coupled with a metasurface. This is in order to isolate the antenna from the signal processing circuit (not investigated in this thesis) and the silicon substrate botth located at the lower levels of the circuit. Finally, 17 crossed test cases (16 of 3 x 3 pixels and one matrix of 9 x 9 pixels) which integrate various antenna topologies and various configurations of electromagnetic surfaces (ground plane and metasurface) with various rectifying transistor were designed and manufactured in CMOS foundry.
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Nicolas Monnier. Amélioration du traitement amont de pixels térahertz, monolithiquement intégrés en technologie CMOS, pour des systèmes d'imagerie en temps réel. Micro et nanotechnologies/Microélectronique. Ecole nationale supérieure Mines-Télécom Atlantique, 2018. Français. ⟨NNT : 2018IMTA0070⟩. ⟨tel-02011564⟩

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