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Nouveaux concepts de nano-filtres infrarouges à l’échelle du pixel

Léopold Macé 1
1 LAAS-PHOTO - Équipe Photonique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : In the near-infrared (NIR) and mid-infrared (MIR) spectral domains (3-10µm), requirements and needs evolve toward more complex optical functions and highly-integrated systems. This is especially relevant in the context of space and aeronautics applications for earth observation, where the aim is to increase the number of acquired spectral bands while simultaneously reducing the device footprint. These requirements translate into a pixelization of the filters so that they can be integrated into a mosaic which also performs the spatial filtering and different spectral functions. As of today, conventional thin films filter technologies haven’t been shown to achieve this goal. As a result, different filtering concepts originating from the field of photonics which could overcome these limitations must be investigated. “Zero-contrast gratings” (ZCG) are a kind of guided-mode resonance filters that have proved to implement efficient tunable transmission filters in the MIR, while having a very simple structure. Nevertheless, their narrow transmission linewidth and weak angular acceptance hinder their applicability for pixelated applications in the MIR. We present in this work several structures based on the ZCG concept. On the one hand, we have introduced doubly-corrugated 1D filters with bandwidths ranging from 1 to 200nm, allowing for 100µm pixel sizes and tunable over a domain of 200nm. On the other hand, we have shown a novel filtering concept, which we called “TE/TM ZCG”. This new generation of ZCG is not bound by stringent material requirements inherent to conventionnal ZCGs. Their fabricability have been demonstrated through cleanroom operations. A first doubly-corrugated 1D filter has been fabricated and characterized optically.
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Léopold Macé. Nouveaux concepts de nano-filtres infrarouges à l’échelle du pixel. Micro et nanotechnologies/Microélectronique. Université Toulouse 3 Paul Sabatier (UT3 Paul Sabatier), 2018. Français. ⟨tel-01947238v1⟩

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