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3D Reconstruction in Scanning Electron Microscope : from image acquisition to dense point cloud

Abstract : The goal of this work is to obtain a 3D model of an object from its multiple views acquired withScanning Electron Microscope (SEM). For this, the technique of 3D reconstruction is used which isa well known application of computer vision. However, due to the specificities of image formation inSEM, and in microscale in general, the existing techniques are not applicable to the SEM images. Themain reasons for that are the parallel projection and the problems of SEM calibration as a camera.As a result, in this work we developed a new algorithm allowing to achieve 3D reconstruction in SEMwhile taking into account these issues. Moreover, as the reconstruction is obtained through cameraautocalibration, there is no need in calibration object. The final output of the presented techniques isa dense point cloud corresponding to the surface of the object that may contain millions of points.
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Submitted on : Wednesday, November 21, 2018 - 4:53:07 PM
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  • HAL Id : tel-01930234, version 1

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Andrey Kudryavtsev. 3D Reconstruction in Scanning Electron Microscope : from image acquisition to dense point cloud. Signal and Image Processing. Université Bourgogne Franche-Comté, 2017. English. ⟨NNT : 2017UBFCD050⟩. ⟨tel-01930234⟩

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