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Matériaux sans plomb micro structurés pour la récupération d'énergie

Baba Wague 1 
1 INL - H&N - INL - Hétéroepitaxie et Nanostructures
INL - Institut des Nanotechnologies de Lyon
Abstract : With the development of ultra-low-power integrated circuits, the need to reduce operating costs for embedded electronic devices, and since used batteries pose a threat to the environment, the concept of energy harvesting has gained a new relevance. Energy harvesting covers the scavenging of many lost ambient energy sources and their conversion into electrical energy. A broad range of energy harvesting devices has been developed to scavenge energy from mechanical vibrations. A common configuration consists of a spring-mass system with a piezoelectric material in parallel with the spring to convert some of the mechanical energy during oscillations into electrical power. So far the most used material for piezoelectric energy harvesting is the Lead Zirconate Titanate (PbZr1-xTixO3) (PZT). PZT is the reference material for MEMS (MechanoElectroMechanicalSystems) applications in the field of energy harvesting. Lead-based piezoelectric materials such as PZT and lead magnesium niobate-lead titanate (PMN-PT) offer incomparable piezoelectric coupling factors to other materials. However, despite its excellent electrical properties (dielectric, ferroelectric and piezoelectric), PZT and other Lead based materials should be replaced shortly by leadfree compounds, due to environmental issues. Our work aims at developing lead-free high performance vibration energy-harvesting. We focus on the fabrication and characterization of aluminum nitride (AlN), Barium titanate BaTiO3 (BTO) and Bismuth ferrite BiFeO3 (BFO) devices for energy harvesting. PZT (as a reference because it’s high piezoelectric coefficients), BTO, BFO and AlN have been deposited using sputtering methods, leading to high homogeneous, large scale thin films with a precisely controlled thickness. The deposition of 300nm-thick films by sputtering or spin coating was performed on SrTiO3 (STO) substrate with SrRuO3 (SRO) bottom electrode, which is the reference substrate for the functional oxides (PZT, BTO and BFO), and platinum coated silicon substrate, which is the classic industrial template. Whatever the piezoelectric materials, we obtained epitaxial films on STO substrate and textured films on silicon substrate. Structural, electrical and piezoelectric measurements on the BTO, AlN and PZT films show that they have good physical properties in agreement with the literature.
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Submitted on : Thursday, October 11, 2018 - 5:50:06 PM
Last modification on : Saturday, September 24, 2022 - 2:58:04 PM
Long-term archiving on: : Saturday, January 12, 2019 - 3:56:13 PM


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  • HAL Id : tel-01893847, version 1


Baba Wague. Matériaux sans plomb micro structurés pour la récupération d'énergie. Autre. Université de Lyon, 2018. Français. ⟨NNT : 2018LYSEC003⟩. ⟨tel-01893847⟩



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