, Watching ripples on crystals, Phys. Rev. Lett, vol.88, issue.18, p.185504, 2002.
, Laser-generated ultrasound: its properties, mechanisms and multifarious applications, J. Phys. D: Appl. Phys, vol.26, issue.3, p.329, 1993.
, Compression of amplified chirped optical pulses, Opt. Commun, vol.56, issue.3, pp.219-221, 1985.
, Stretching of short pulses through transmission in non-linear photonic crystal fibers, Telecommunications Forum Telfor (TELFOR), pp.613-616, 2014.
, Negative dispersion using pairs of prisms, Opt. Lett, vol.9, issue.5, pp.150-152, 1984.
, Large temporal stretching of ultrashort pulses, Appl. Opt, vol.31, issue.9, pp.1225-1228, 1992.
, Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer, Applied Physics Letters, vol.92, issue.9, p.94104, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00201067
, Optical detection of ultrasound, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.33, pp.485-499, 1986.
, Imaging of Surface Vibrations Using Heterodyne Interferometry, 2014.
, Analytical modeling of the periodic nonlinearity in heterodyne interferometry, Appl. Opt, vol.37, issue.28, pp.6696-6700, 1998.
, Scanning heterodyne laser interferometer for phasesensitive absolute-amplitude measurements of surface vibrations, Applied Physics Letters, vol.92, issue.6, p.63502, 2008.
, Dual differential interferometer, US Patent, vol.4, p.661, 1985.
, Phonon attenuation and velocity measurements in transparent materials by picosecond acoustic interferometry, J. Appl. Phys, vol.69, issue.7, pp.3816-3822, 1991.
, Analysis of optical interferometric measurements of guided acoustic waves in transparent solid media, J. Appl. Phys, vol.77, issue.11, pp.5528-5537, 1995.
, Generation of terahertz acoustic waves in semiconductor quantum dots using femtosecond laser pulses, Phys. Rev. B, vol.81, issue.11, p.113305, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00549068
, Scanning Michelson interferometer for imaging surface acoustic wave fields, Opt. Lett, vol.25, issue.9, pp.613-615, 2000.
, Detection of acoustic oscillations of single gold nanospheres by time-resolved interferometry, Phys. Rev. Lett, vol.95, issue.26, p.267406, 2005.
, Characterisation of thin film piezoelectric materials by differential interferometric techniques. NSTI-Nanotech, 2006.
, Application of the differential Fabry-Perot interferometer in angle metrology, Science and Technology, vol.27, issue.3, p.35201, 2016.
, Optical probing of acoustic emission waves, Nondestructive evaluation of materials, pp.347-378, 1979.
, Generating acoustic waves by laser: theoretical and experimental study of the emission source, Ultrason, vol.26, issue.5, pp.245-255, 1988.
, Evaluation of ultrasonic inspection procedures by field mapping with an optical probe, Canadian Metallurgical Quarterly, 2013.
, Evert Jan Post. Sagnac effect. Reviews of Modern Physics, vol.39, issue.2, p.475, 1967.
, Quantum enhancement of the zero-area Sagnac interferometer topology for gravitational wave detection, Physical review letters, vol.104, issue.25, p.251102, 2010.
, Polarization Sagnac interferometer with postmodulation for gravitational-wave detection, Opt. Lett, vol.24, issue.16, pp.1112-1114, 1999.
, Sagnac"effect: A century of Earth-rotated interferometers, American Journal of Physics, vol.62, pp.975-985, 1994.
, A laser probe based on a Sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.58, issue.1, pp.187-194, 2011.
, Real-time imaging of surface acoustic waves in thin films and microstructures on opaque substrates, Review of scientific instruments, vol.74, issue.1, pp.519-522, 2003.
, Watching ripples on crystals, Phys. Rev. Lett, vol.88, issue.18, p.185504, 2002.
, On waves propagated along the plane surface of an elastic solid, vol.1, pp.4-11, 1885.
, Surface acoustic wave devices and applications: 1. Introductory review, Ultrasonics, vol.11, issue.3, pp.121-131, 1973.
, Implementation of guiding layers of surface acoustic wave devices: A review, Biosensors and Bioelectronics, vol.99, pp.500-512, 2018.
, Behavior of platinum/tantalum as interdigital transducers for SAW devices in high-temperature environments, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.58, issue.3, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00783914
, Investigations on AlN/sapphire piezoelectric bilayer structure for high-temperature SAW applications, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.59, issue.5, pp.999-1005, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00783993
, Sezawa mode SAW pressure sensors based on ZnO/Si structure, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.51, issue.11, pp.1421-1426, 2004.
, Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.29, issue.2, p.21010, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00783916
, A Rayleigh surface acoustic wave (rSAW) resonator biosensor based on positive and negative reflectors with sub-nanomolar limit of detection, Sensors and Actuators B: Chemical, vol.254, pp.1-7, 2018.
, Multiharmonic FrequencyChirped Transducers for Surface-Acoustic-Wave Optomechanics, Physical Review Applied, vol.9, issue.1, p.14004, 2018.
, Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications, Applied Physics Letters, vol.96, issue.20, p.203503, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00783913
, Development of interdigital transducer sensors for non-destructive characterization of thin films using high frequency Rayleigh waves, Review of Scientific Instruments, vol.82, issue.6, p.64905, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00639936
, Patterned microstructure array fabrication by using a novel standing surface acoustic wave device, Journal of Micro and NanoManufacturing, vol.6, issue.2, p.21002, 2018.
, In situ high-temperature characterization of AlNbased surface acoustic wave devices, J. Appl. Phys, vol.114, issue.1, p.14505, 2013.
URL : https://hal.archives-ouvertes.fr/hal-00923012
, Combination of e-beam lithography and of high velocity AlN/diamondlayered structure for SAW filters in X band, IEEE Trans. Ultrason., Ferroelec., Freq. Control, vol.54, issue.7, 2007.
, Imaging of microwave-induced acoustic fields in LiNbO3 by high-performance Brillouin microscopy, Journal of Physics D: Applied Physics, vol.38, issue.12, p.2026, 2005.
URL : https://hal.archives-ouvertes.fr/hal-01568029
, Enhanced sensitivity of SAW-based pirani vacuum pressure sensor, IEEE Sensors Journal, vol.11, issue.6, pp.1458-1464, 2011.
, Wireless SAW sensor for high temperature applications: Material point of view, Smart Sensors, Actuators, and MEMS V, vol.8066, p.806602, 2011.
URL : https://hal.archives-ouvertes.fr/hal-01948763
, Effective and rapid technique for temporal response modeling of surface acoustic wave interdigital transducers, Ultrasonics, vol.82, pp.371-378, 2018.
, Development of a high-sensitive electrochemical detector with microstirrer driven by surface acoustic waves, Sensors and Actuators B: Chemical, 2018.
, Development of SAW-based multi-gas sensor for simultaneous detection of CO2 and NO2, Sensors and Actuators B: Chemical, vol.154, issue.1, pp.9-16, 2011.
, Pierre Curie (1859-1906): pour une biographie intellectuelle, 1999.
, Principe de la conservation de l'´ electricité, ou second principe de la théorie des phénomènesphénomènesélectriques, Journal de Physique Théorique et Appliquée, vol.10, issue.1, pp.381-394, 1881.
, Piezoelectric energy harvesting utilizing human locomotion, 2010.
, OndesélastiquesOndesélastiques guidées, pp.2017-2026, 2016.
, Surface acoustic wave devices and their signal processing applications, 2012.
DOI : 10.1121/1.400569
, Surface-wave devices for signal processing, 1985.
, Elastic waves in solids II: generation, acousto-optic interaction, applications, 1999.
, Direct piezoelectric coupling to surface elastic waves, Appl. Phys. Lett, vol.7, issue.12, pp.314-316, 1965.
DOI : 10.1063/1.1754276
, Impulse model design of acoustic surface-wave filters, IEEE Transactions on Microwave Theory and Techniques, vol.21, issue.4, pp.162-175, 1973.
, Analysis of interdigital surface wave transducers by use of an equivalent circuit model, IEEE Transactions on Microwave Theory and Techniques, vol.17, issue.11, pp.856-864, 1969.
, A Comparison of Surface Acoustic Wave Modeling Methods, chapter 5, Nano Science and Technology Institute, 2009.
, Surface acoustic wave devices in telecommunications, 2000.
DOI : 10.1007/978-3-662-04223-6
, A new generalized modeling of SAW transducers and gratings, Proceedings of the 43rd Annual Symposium on, pp.596-605, 1989.
DOI : 10.1109/freq.1989.68920
, A coupling-of-modes analysis of chirped transducers containing reflective electrode geometries, Ultrasonics Symposium, 1989. Proceedings., IEEE 1989, pp.129-134, 1989.
, Overview of design challenges for single phase unidirectional SAW filters, Ultrasonics Symposium, 1989. Proceedings., IEEE 1989, pp.79-89, 1989.
DOI : 10.1109/ultsym.1989.66963
, On the calculation of charge, electrostatic potential and capacitance in generalized finite SAW structures. na, 1984.
, Higher harmonic surface transverse wave filters, Ultrasonics Symposium, 1989. Proceedings., IEEE 1989, pp.235-239, 1989.
DOI : 10.1109/ultsym.1989.66988
, A fast green's function method for calculating bulk wave frequency responses from SAW frequency responses, Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, pp.411-415, 1990.
DOI : 10.1109/ultsym.1990.171398
, Scattering matrix approach to SAW resonators, Ultrasonics Symposium, pp.266-271, 1976.
DOI : 10.1109/ultsym.1976.196680
, Pertes Ohmiques et Matrice Mixte, 2001.
, Simulation de dispositifsàdispositifsà ondesélectroondesélectro-acoustiques de surface par la méthode de la matrice mixte, 2001.
, SPUDT-based filters: Design principles and optimization, Ultrasonics Symposium, 1995. Proceedings, vol.1, pp.39-50, 1995.
, Etude théorique et expérimentale de dispositifsàdispositifsà ondes de surfacè a haute vitesse et fort couplage : application aux filtres télécom haute fréquence, 2001.
, Pulse compression in radar systems. Principles of Modern Radar, pp.465-501, 1987.
, CapteursàCapteursà ondesélastiquesondesélastiques de surfacè a codage spectral Ultra Large Bande, 2014.
, Stoichiometric LiNbO3 single crystal growth by double crucible Czochralski method using automatic powder supply system, Journal of crystal growth, vol.116, issue.3-4, pp.327-332, 1992.
, Grating based plasmonic band gap cavities, Opt. Express, vol.17, issue.18, pp.15541-15549, 2009.
, Evaluation of the P-matrix parameters frequency variation using periodic FEM/BEM analysis
, Ultrasonics Symposium, vol.1, pp.80-84, 2004.
, Surface acoustic wave filters: With applications to electronic communications and signal processing, 2010.
, A differential optical interferometer for measuring short pulses of surface acoustic waves, Ultrasonics, vol.80, pp.72-77, 2017.
URL : https://hal.archives-ouvertes.fr/hal-02131429
, Weighting interdigital surface wave transducers by selective withdrawal of electrodes, Ultrasonics Symposium, pp.423-426, 1973.
, Low sidelobe SAW filters using overlap and withdrawal weighted transducers, Ultrasonics Symposium, pp.757-762, 1977.
, Dynamic visualization of subangstrom high-frequency surface vibrations, Appl. Phys. Lett, vol.78, issue.2, pp.159-161, 2001.
, Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization, J. Appl. Phys, vol.108, issue.11, p.114510, 2010.
, A sensitive ultrasonics method for measuring transient motions of a surface, Appl. Phys. Lett, vol.67, pp.3248-3250, 1995.
, New structures for heterodyne interferometric probes using double-pass, Opt. Commun, vol.132, issue.1-2, pp.19-23, 1996.
, Wide frequency range measurements of absolute phase and amplitude of vibrations in micro-and nanostructures by optical interferometry, Opt. Express, vol.15, issue.18, pp.11370-11384, 2007.
, Scattering of surface acoustic waves by a phononic crystal revealed by heterodyne interferometry, Appl. Phys. Lett, vol.91, p.83517, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00173880
, Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations, Appl. Phys. Lett, vol.92, issue.6, p.63502, 2008.
, Detection of ultrafast phenomena by use of a modified Sagnac interferometer, Opt. Lett, vol.24, issue.18, pp.1305-1307, 1999.
, Scanning ultrafast Sagnac interferometry for imaging twodimensional surface wave propagation, Rev. Sci. Instrum, vol.77, issue.4, p.43713, 2006.
, Métamatériaux acoustiques actifs, vol.6, 2014.
, Real-time load impedance optimization for radar spectral mask compliance and power efficiency, IEEE Transactions on Aerospace and Electronic Systems, vol.51, issue.1, pp.591-599, 2015.
, An efficient multi-objective pulse radar compression technique using RBF and NSGA-II, Nature & Biologically Inspired Computing, pp.1291-1296, 2009.
, Introduction to radar. Radar Handbook, 2, 1962. List of Figures
, A Schematic illustration of the chirped pulse amplification technique, p.4
,
,
, Unit Cell of a piezoelectric material with the center ion in black, (a) when the material is not electrically or mechanically excited, and (b) when the material is either mechanically stressed to produce an electric field or is excited by an electric field and physically deformed
, Although the illustration relates to a piezoelectric solid, this is not a requirement for SAW propagation
, A schematic of a basic saw device
, A schematic showing voltage applied across the two comb-shaped electrodes produces stresses near the solid surface
, A Schematic of a surface acoustic wave device for generating a short pulse where p is the pitch of the IDT and a is the acoustic aperture, p.16
, A schematic of SAW devices with (a) a linear up-chirp CIDT and (b)a linear down-chirp CIDT [54]
, A schematic of a first order model of an IDT in which the IDT is modelled by an array of discrete sources at the centres of interdigital intervals
, A Schematic representation of a single period transducer with the acoustic and electric ports
, Plots showing a variation in (a) the SAW velocity, (b) |?| and (c) the directivity ( ? ), for a variation in h ? (%), for LiNbO 3 with cut(YXl) 128, p.25
, Plots showing a variation in (a) the SAW velocity, (b) |?| and (c) directivity ( ? ), for a variation in h ? (%), for LiNbO 3 with cut(YZ)
, Measurement of the transmitted signal of the reference SAW device [74] using a network analyser
, Modulus of the spectral amplitude (in arbitrary units) for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, obtained using a delta function model, p.35
, Waveforms (amplitude in arbitrary units) obtained for a (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, obtained using a delta function model, p.35
, Group delay of the CIDT response obtained for a (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, obtained using a delta function model, p.35
, Modulus of the spectral amplitude for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, obtained using a p-matrix model
, Waveforms obtained for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, using a p-matrix model
, Group delay obtained for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, using a p-matrix model
, S11 measurement (b) S21 measurement (c) admittance measurement and (d) group delay measurement of the reference sample
, 8 (a) S11 measurement (b) S21 measurement (c) admittance measurement and (d) group delay measurement of the reference sample with a metal plate, p.38
, LiNbO 3 ), layer (2) is the photo resist and layer (3) is the metal (aluminium) deposited on the substrate. Steps of the lift-off process : (I) substrate prepared for lithography, (II) photoresist added on the substrate, (III) the SAW design deposited using photo-lithography with a negative mask, (IV) metal deposited by evaporation, and (V) lift-off completed by cleaning the resist and removing the unwanted metal deposited on the substrate. 40 3.10 SEM images showing the photoresist profile of the designed electrodes at the end of the lithography process
, b) the maximum pitch, and (c) a SEM image with the pitch measurement of the output, SEM images of a linearly chirped input IDT showing (a) the minimum pitch
, 12 (a) An image of a fabricated SAW device with a hyperbolic chirp IDT after dicing and (b) a picture of the SAW device wire-bonded on a PCB, p.43
, 13 (a) S11 measurement and (b) S21 measurement of the SAW device with a linearly chirped IDT fabricated using the specification mentioned in Table. 3.3. The chirp bandwidth is 200 MHz-400 MHz
, 14 (a) S11 measurement and (b) S21 measurement of the SAW device with a hyperbolically chirped IDT fabricated using the specification mentioned in Table. 3.3. The chirp bandwidth is 200 MHz-400 MHz
, 15 (a) S11 measurement and (b) S21 measurement of the SAW device with a mean chirped IDT fabricated using the specification mentioned in Table. 3.3. The chirp bandwidth is 200 MHz-400 MHz
, A comparison between the (a) conductance and (b) susceptance of the SAW device responses with the three differently chirped IDTs, fabricated using the specification mentioned in Table. 3.3. The chirp bandwidth is
, 44 3.17 Admittance measurements for the transmission, obtained from the fabricated SAW devices with (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp. The chirp bandwidth is 200 MHz-400 MHz
, Group delay measurements, obtained from the fabricated SAW devices with (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, Chirp bandwidth is 200 MHz-400 MHz
, Appearance of band gaps for a (a) single period IDT and (b) chirped IDT. (a) shows the dispersion relation of the Rayleigh wave in the periodic grating with the wavenumber k. (b) shows the variation of the band gap frequency range with the position within the CIDT
, The power response at each electrode within the IDT with 500 electrodes (el) for a pitch p = 6.4 µm in (a) linear scale (b) log scale
, The power response at each electrode within the IDT with 1000 electrodes (el) for a pitch p = 6.4 µm in (a) linear scale (b) log scale
, The power response at each electrode within the IDT with 2000 electrodes (el) for a pitch p = 6.4 µm in (a) linear scale (b) log scale
, The power response at each electrode within the IDT with 3000 electrodes (el) for a pitch p = 6.4 µm in (a) linear scale (b) log scale
, The power response at each electrode within the IDT with 5000 electrodes (el) for a pitch p = 6.4 µm in (a) linear scale (b) log scale
, 3D plots of the power response at each electrode within the CIDTs with 300 electrodes generating (a) linear (b) hyperbolic and (c) mean chirps respectively, p.50
, 26 3D plots of the power response at each electrode within the CIDTs with 3000 electrodes generating (a) linear (b) hyperbolic and (c) mean chirps respectively, p.51
, Plots of the power response of the waves exiting on the left and the right of the down chirped IDT with 300 electrodes generating (a) linear (b) hyperbolic and (c) mean chirps respectively
, Plots of the power response of the waves exiting on the left and the right of the down chirped IDT with 3000 electrodes generating (a) linear (b) hyperbolic and (c) mean chirps respectively
, 3D plots of the power response at each electrode within the up-chirped CIDTs with 300 electrodes, designed using the p-matrix model, corresponding the fabricated devices, generating (a) linear (b) hyperbolic and (c) mean chirps respectively
, 3D plots of the power response at each electrode within the up-chirped CIDTs with 3000 electrodes, designed using the p-matrix model, corresponding the fabricated devices, generating (a) linear (b) hyperbolic and (c) mean chirps respectively
, Plots of the power response of the waves exiting on the left and the right of the up chirped IDT with 300 electrodes generating (a) linear (b) hyperbolic and (c) mean chirps respectively
, A plot showing the total voltage span of the interferometer obtained by varing the path difference between the beams along the two reference arms using a phased mirror
, Plot of ?u(x, t) at a given position as a function of ?t, for a 10-ns Gaussian pulse. (b) Experimental result as a function of ?t obtained by changing the path length difference in the interferometer, Dependence of the pulse measurement with the time-delay ?t. (a)
, Measurement of the SAW pulse at various positions along the chirped interdigital transducer
, b) a hyperbolic chirp and (c) a mean chirp, obtained using a p-matrix model, |H(?)| for (a) a linear chirp
, b) a hyperbolic chirp and (c) a mean chirp, by performing an inverse Fourier transform on the responses calculated using a p-matrix model as shown in figure 5.1
, Normalized input chirp waveforms obtained by performing an inverse Fourier transform on the response of filter 1 (H(?) I1 ) for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, p.81
, A plot showing the inverse of the H(?) function for a linear CIDT, and (b) a window function G(f ) obtained using equation 5.4
, 5 Normalized inverse chirp waveforms for filter 2, obtained for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, using a p-matrix model, p.83
, 6 Normalized input chirp waveforms obtained for filter 3, by windowing the transmission response of filter 1 for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp
, obtained for the three chirp cases, by using filter 1, when the threshold condition is applied on the input chirp waveform, p.85
, obtained for the three chirp cases, by using filter 2, when the threshold condition is applied on the input chirp waveform, p.85
, obtained for the three chirp cases, by using filter 3 when the threshold condition is applied on the input chirp waveform, p.86
, Admittance measurements for the transmission, obtained from the fabricated SAW devices with (a) A linear chirp, (b) A hyperbolic chirp and (c) A mean chirp, Chirp bandwidth is 200 MHz-400 MHz
, Chirp waveforms obtained for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, using a the admittance measurements shown in figure 5.10, p.88
, Normalized inverse chirp waveforms obtained for (a) a linear chirp, (b) a hyperbolic chirp and (c) a mean chirp, using a the admittance measurements shown in figure 5
, A schematic of the pulse compression experiment to measure the responses of the fabricated SAW devices
, b) a hyperbolic chirp and (c) a mean chirp
, b) a hyperbolic chirp and (c) a mean chirp, for B 0 =12.5 MHZ-142
, MHz and (b)The pulse amplitude |P (?)| shown in the frequency domain, p.93
, List of Tables
, Piezoelectric materials used for SAW generation, where SAW is surface acoustic wave, R is Rayleigh wave, P SAW is the pseudo SAW waves and BG is the Bleustein-Gulyaev wave
, Design parameters used for the fabricated SAW devices, p.42
, The h ? values for different heights (h) used to study the variation in the directivity of the CIDTs
, Amplitude measurements of the chirp with different attenuations for SNR estimations
, 2 SNR and displacement calculations using measurement values from Table
, Amplitude measurements at the output of every optical component of the interferometer
, A p values obtained on application of the threshold condition, for the short pulses generated using different types of input chirps described in section 5.1.1, vol.87
, Amplitude gain factor of the short pulse generated using different types of input chirps described in section 5, vol.87