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Etude de micro-disques de carbure de silicium sur substrat de silicium, vers une application d’optique non-linéaire intégrée du proche au moyen infrarouge

Abstract : This Ph.D. thesis studies the design, fabrication and characterization of silicon carbide micro-disks on top of silicon designed to operate from the near to the mid-IR. We study a simple but efficient approach leading to the suppression of higher order whispering gallery modes while preserving the fundamental mode's quality factor. This suppression, typically useful for frequency comb generation is simply based of the silicon pillar under etching and can be easily transferred to other material platforms and wavelengths. The first chapter is a general introduction of whispering gallery mode micro-resonator in which we describe the extremely complex and diverse physics of these structures. The second chapter is focused on SiC micro-disks themselves. We begin with a general introduction of the material to continue by simulating light propagation inside these resonators to be able to design innovative structures. Using the higher optical refractive index of silicon compared to the one of silicon carbide, we demonstrate that it is possible to suppress higher radial modes. We then briefly describe the fabrication processes. The third chapter gather the experimental studies lead on the micro-disks. First characterizations by evanescent coupling in the near infrared enable us to identify the whispering gallery modes inside the resonator. Characterization on micro-disks with smaller under-etching then enables us to demonstrate the higher suppression. We finally lead a thermo-optic study of the material to validate its compatibility to high power and high temperature regimes in which SiC stand out from other integrated optics materials. Finally, the last chapter is dedicated to non-linear optics and mid-infrared perspectives. We propose a dispersion study that, we hope, should enable the generation of Kerr frequency combs sources in a near future.
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  • HAL Id : tel-01888323, version 3

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David Allioux. Etude de micro-disques de carbure de silicium sur substrat de silicium, vers une application d’optique non-linéaire intégrée du proche au moyen infrarouge. Electronique. Université de Lyon, 2018. Français. ⟨NNT : 2018LYSEI049⟩. ⟨tel-01888323v3⟩

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