Développement d'un AFM virtuel pour l'évaluation du bilan d'incertitude de l'AFM métrologique du LNE

Abstract : At present where nanotechnology applications are growing fast and nano products spreading worldwide, measurement accuracy at nanometer scale becomes an essential challenge to improve the performance and the quality of products integrating nano. To meet the specific needs in the field of dimensional nanometrology, LNE (French metrology institute) integrally designed a metrological Atomic Force Microscope (mAFM). Its main objective is to ensure the traceability of nanoscale measurements to the meter as defined by the International System of Units (SI). The mAFM uses four differential interferometers which measure the tip to sample relative position. This instrument will be devoted to the calibration of transfer standards commonly used in scanning probe microscopy (SPM) and scanning electron microscopy (SEM). During this process, a measurement uncertainty is evaluated to determine a confidence level of the calibration realized by the mAFM. This uncertainty is usually evaluated thanks to experimental measurements which determine the impact of some error sources which degrade measurements at the nanoscale. For other components, their evaluation can be more complex and sometimes impossible to estimate experimentally. To overcome this difficulty, the thesis work consisted in the development of a numerical model called "Virtual AFM". It allows producting the measurement uncertainty of the LNE's mAFM and to identify the critical components by using statistic tools such as Monte Carlo Method (MCM), Morris' design and Sobol' indices. The model uses essentially oriented-object programming to take into account a maximum of interactions from about 140 input quantities. It allowed integrating components previously neglected or overestimated due to a lack of information.
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Paul Ceria. Développement d'un AFM virtuel pour l'évaluation du bilan d'incertitude de l'AFM métrologique du LNE. Matériaux. Université Paul Sabatier - Toulouse III, 2017. Français. ⟨NNT : 2017TOU30119⟩. ⟨tel-01887621⟩

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