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Optimisation de dépôts de LIPON par pulvérisation magnétron RadioFréquence pour la fabrication de micro-batteries. Modélisation de l'interaction plasma-surface

Abstract : The scale reduction of batteries is a real technological challenge for the near future. These micro-batteries, about ten micrometers thick, are used to supply the power for small sized systems. LIPON is one of the most suitable electrolytes considered for industrial scale production. It is deposited in thin-film by radiofrequency magnetron sputtering of Li₃PO₄ in nitrogen plasma. This thesis is focused on particles behavior in plasma and during deposition. Optical emission spectroscopy and electron density measurements have been performed, to provide data used as input or validation for several numerical models. The first model describes plasma kinetics in the magnetron reactor, as 0D global model, and helps to identify the main chemical species and important reactions. This information has been useful to define a simplified kinetics for the second model, 2D, dealing with the charged species behavior in the plasma and describing target sputtering by ion bombardment. It provides the sputtered areas, ion energy and impinging angle onto the target. These obtained results have been employed in a 3D model that simulates sputtered atoms transport from the target to the substrate and predicting the thin-film features. Some characteristics of the target during sputtering have been highlighted and confirmed by the direct comparison between numerical and experimental results.
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Submitted on : Monday, September 24, 2018 - 11:51:09 AM
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Steven Arbeltier. Optimisation de dépôts de LIPON par pulvérisation magnétron RadioFréquence pour la fabrication de micro-batteries. Modélisation de l'interaction plasma-surface. Physique des plasmas [physics.plasm-ph]. Université Paris Saclay (COmUE), 2018. Français. ⟨NNT : 2018SACLS170⟩. ⟨tel-01879753⟩

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