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Nanostructured W-O thin films by reactive sputtering : application as gas sensors

Abstract : This thesis is focused on the reactive sputter deposition of W-O thin films. In order to play with their composition, the Reactive Gas Pulsing Process (RGPP) is implemented and allows tunable oxygen and tungsten concentrations. Similarly, the GLancing Angle Deposition (GLAD) technique is developed to produce various architectures, namely inclined columns, zigzags and spirals, and increases the surface-to-volume ratio of the films. The GLAD co-sputtering approach is also investigated by means of two inclined and separated W and WO3 targets. Relationships between microstructure, composition, electronic and optical properties of W-O films are systematically studied. They are finally applied as active layers for resistive sensors in order to improve detection of dodecane vapor and ozone gas. The high porous microstructure of inclined columns produced by GLAD combined to the suitable composition adjusted by RGPP leads to define a range of W-O films attractive for sensing performances.
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Submitted on : Friday, August 31, 2018 - 4:03:07 PM
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  • HAL Id : tel-01865498, version 1

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Xiaolong Xu. Nanostructured W-O thin films by reactive sputtering : application as gas sensors. Micro and nanotechnologies/Microelectronics. Université Bourgogne Franche-Comté, 2018. English. ⟨NNT : 2018UBFCA003⟩. ⟨tel-01865498⟩

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