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Investigation of the enhancement of the performance of the SIMS instruments

Abstract : Secondary ion mass spectrometry (SIMS) instruments need to be improved in order to satisfy the demands of trends in many fields that require analytical tools that can map samples with both excellent resolution and high-sensitivity chemical information, but also with shorter time of analysis. The objectives of this thesis are: investigate the enhancement of the mass resolution of double focusing mass spectrometers by replacing the standard spherical sector with a novel spheroid geometry which has better focusing properties, and to investigate the reduction of the time of analysis in imaging SIMS by the proof-of-concept of the SIMS multi-ion- beam system.A comparison of the main focusing properties of the spherical sector, the spheroid geometry and a hybrid spheroid geometry, was made using the SIMION software. A comparison in a Nier-Johnson configuration between the spherical sector and the spheroid, showed that the beam presents a rotation of 90° at the exit of the magnet harming the mass resolution in the spheroid configuration. By adding an electrostatic element that can rotate the beam 90° the performance of the mass spectrometer could be improved. However, a comparison of the performances between the spherical and hybrid sectors simulated in a Mattauch-Herzog configuration, showed that when the double focusing condition is properly satisfied, better mass resolution could be achieved with the spheroid geometry.A multi-ion-beam system was investigated for SIMS analysis. A simulation through the secondary optics of a Cameca IMS XF showed successful transmission of nine beams through the optics resulting in nine well focussed spots on the multi channel plate (MCP) detector. The proof-of-concept was completed experimentally in the Cameca IMS 6F, where a multi-hole aperture was mounted in the primary column generating 9 and 16 beams of sizes between 4 μm to 10 μm. Images of an AlCu grid were obtained when t the multi-ion-beam system was scanned over the sample. These results showed that the multi-ion-beam system is a feasible technique for imaging SIMS and by optimizing the design multi-nano-ion-beams will be a solution for reducing drastically the time of analysis.
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Marina Verruno. Investigation of the enhancement of the performance of the SIMS instruments. Accelerator Physics [physics.acc-ph]. Université Paris Saclay (COmUE), 2017. English. ⟨NNT : 2017SACLS400⟩. ⟨tel-01823853⟩

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