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Développement d'une technique à double Chirp spatio-temporel basée sur des capteurs SAW-IDT : application à la caractérisation de couches minces et de revêtements fonctionnels

Abstract : This work is within the scope of characterization of thin layers, coatings and functional surfaces (thickness, elastic constants,…). Among the characterization methods, the ultrasonic methods using surface acoustic waves are particularly interesting. In order to do this, we chose to make use the dispersion phenomenon of Rayleigh-like surface acoustic waves. Indeed, the propagation of these waves is close to the surface of material and the energy is concentrated within a layer under the surface of about one wavelength thick. In order to characterize these coatings and structures, it is necessary to perform measurements in high frequencies. On the other hand, these coatings can be fragile and transparent, this is why in this study, SAW-IDT sensors are achieved for surface acoustic wave generation. For optimization of these SAW-IDT sensors, particularly their band-width, it is necessary to study various IDT configurations by varying the number of electrodes, dimensions of the electrodes, their shapes and spacings. Finally, to generate the surface acoustic waves over a wide frequency range with sufficient displacement amplitude for the characterization of thin films and coatings, a time-space chirp technique with SAW-IDT sensors was selected. We have shown the potential of this approach by characterizing firstly thin metallic layers, and secondly transparent coatings obtained by the sol-gel process.
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  • HAL Id : tel-01778719, version 1

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Dame Fall. Développement d'une technique à double Chirp spatio-temporel basée sur des capteurs SAW-IDT : application à la caractérisation de couches minces et de revêtements fonctionnels. Micro et nanotechnologies/Microélectronique. Université de Valenciennes et du Hainaut-Cambresis, 2016. Français. ⟨NNT : 2016VALE0011⟩. ⟨tel-01778719⟩

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