Co-intégré : NEMS et circuit CMOS, hybride NEMS et circuit CMOS déporté ; Discret : Instrument de table 3 Nombre de fréquences suivi simultanément 4 Adressage d'un réseau, ) 4.1.2.1 Architecture de l'oscillateur hétérodyne bimode . . . . . . . . 94 4.1.2.2 Validation expérimentale du principe . . . . . . . . . . . . . . . 95 ,
Dans un premier temps, nous avons mis en oeuvre l'architecture d'oscillateur hétérodyne en l'appliquant à plusieurs modes de résonance d'un même NEMS à l'aide d'équipements de laboratoire afin de s'assurer de la viabilité et des performances du schéma de lecture retenu pour les applications de spectrométrie de masse à base de résonateurs mécaniques. Nous avons également profité de ces expériences pour approfondir notre connaissance du fonctionnement [Bardeen Deformation Potentials and Mobilities in Non-Polar Crystals, nous présentons les principaux résultats tirés de nos réalisations physiques, pp.72-80, 1950. ,
Piezoresistance Effect in Germanium and Silicon, In : Physical Review, vol.941, pp.42-49, 1954. ,
Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung, Zeitschrift für Physik 155.2 (21 fév, pp.206-222, 1959. ,
Statistics of atomic frequency standards, Proceedings of the IEEE 54, pp.221-230, 1966. ,
DOI : 10.1109/PROC.1966.4634
A simple model of feedback oscillator noise spectrum, Proceedings of the IEEE 54, pp.329-330, 1966. ,
DOI : 10.1109/PROC.1966.4682
The resonant gate transistor, IEEE Transactions on Electron Devices, vol.14, issue.3, pp.117-133, 1967. ,
DOI : 10.1109/T-ED.1967.15912
1/?? noise is no surface effect, Physics Letters A, vol.29, issue.3, pp.139-140, 1969. ,
DOI : 10.1016/0375-9601(69)90076-0
Surface acoustic wave probe for chemical analysis. I. Introduction and instrument description, Analytical Chemistry, vol.519, pp.1458-1464, 1979. ,
A graphical representation of the piezoresistance coefficients in silicon, IEEE Transactions on Electron Devices, vol.29, issue.1, pp.64-70, 1982. ,
DOI : 10.1109/T-ED.1982.20659
Should the classical variance be used as a basic measure in standards metrology?, IEEE Transactions on Instrumentation and Measurement IM-36, pp.646-654, 1987. ,
DOI : 10.1109/TIM.1987.6312761
cantilevers for enhanced force microscope sensitivity, Journal of Applied Physics, vol.6, issue.2, pp.668-673, 1991. ,
DOI : 10.1063/1.104030
Fast simulation of the steadystate of circuits by the harmonic balance technique, IEEE International Symposium on Circuits and Systems, 1995. ISCAS '95. IEEE International Symposium on Circuits and Systems, 1995. ISCAS '95. T. 2, pp.1388-1391, 1995. ,
Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals, Applied Physics Letters, vol.69, issue.18, pp.2653-2655, 1996. ,
DOI : 10.1063/1.117548
VHF free-free beam high-Q micromechanical resonators, Journal of Microelectromechanical Systems, vol.93, pp.347-360, 2000. ,
Efficient algorithm for steady-state stability analysis of large analog/RF circuits, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157), pp.451-454, 2001. ,
DOI : 10.1109/MWSYM.2001.966928
A Bonded-Micro-Platform Technology for Modular Merging of RF MEMS and Transistor Circuits, Transducers '01 Eurosensors XV : The 11th International Conference on Solid-State Sensors and Actuators, pp.964-967, 2001. ,
Noise processes in nanomechanical resonators, Journal of Applied Physics, vol.134, issue.5, pp.2758-2769, 2002. ,
DOI : 10.1103/PhysRevLett.43.646
URL : https://authors.library.caltech.edu/2950/1/CLEjap02.pdf
Mass spectrometry-based proteomics, Nature, vol.4226928, pp.198-207, 2003. ,
Influence of automatic level control on micromechanical resonator oscillator phase noise, IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003, pp.341-349, 2003. ,
DOI : 10.1109/FREQ.2003.1275113
Series-resonant micromechanical resonator oscillator, IEEE International Electron Devices Meeting 2003, pp.39-43, 2003. ,
DOI : 10.1109/IEDM.2003.1269438
The package integration of RF-MEMS switch and control IC for wireless applications, IEEE Transactions on Advanced Packaging, vol.263, pp.255-260, 2003. ,
Ultrasensitive nanoelectromechanical mass detection, Applied Physics Letters, vol.84, issue.22, pp.4469-4471, 2004. ,
DOI : 10.1038/421496a
URL : https://authors.library.caltech.edu/2555/1/EKIapl04.pdf
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems, Journal of Applied Physics, vol.15, issue.5, pp.2682-2689, 2004. ,
DOI : 10.1116/1.586300
URL : https://authors.library.caltech.edu/2556/1/EKIjap04.pdf
1/f Noise Sources Advanced Experimental Methods For Noise Research in Nanoscale Electronic Devices, Sous la dir. de Josef SIKULA et Michael LEVINSHTEIN. NATO Science Series II : Mathematics, pp.3-10, 2004. ,
Series-resonant VHF micromechanical resonator reference oscillators, IEEE Journal of Solid-State Circuits, vol.39, issue.12, pp.2477-2491, 2004. ,
DOI : 10.1109/JSSC.2004.837086
A tunable carbon nanotube electromechanical oscillator, Nature, vol.4317006, pp.284-287, 2004. ,
1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, pp.641-644, 2004. ,
DOI : 10.1109/MEMS.2004.1290666
URL : https://hal.archives-ouvertes.fr/in2p3-01061037
Sensitive detection of nanomechanical motion using piezoresistive signal downmixing, Applied Physics Letters, vol.86, issue.13, pp.133109-133131, 2005. ,
DOI : 10.1063/1.1499745
Mixing at 50GHz using a single-walled carbon nanotube transistor, Applied Physics Letters, vol.8715, pp.153111-153133, 2005. ,
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit, Journal of Microelectromechanical Systems, vol.14, issue.3, pp.508-519, 2005. ,
DOI : 10.1109/JMEMS.2005.844845
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection, Sensors and Actuators A : Physical, pp.154-164, 2006. ,
Zeptogram-Scale Nanomechanical Mass Sensing, Nano Letters, vol.6, issue.4, pp.583-586, 2006. ,
DOI : 10.1021/nl052134m
URL : http://nanoscience.bu.edu/papers/nl052134m.pdf
Oscillator and frequency-shift measurement circuit topologies for micromachined resonant devices, Sensors and Actuators A : Physical, pp.74-80, 2007. ,
Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators, Applied Physics Letters, vol.90, issue.9, pp.93116-93127, 2007. ,
DOI : 10.1063/1.1948521
Protein Complexes in the Gas Phase : Technology for Structural Genomics and Proteomics, Chemical Reviews, vol.1078, pp.3544-3567, 2007. ,
Mass and position determination of attached particles on cantilever based mass sensors, Review of Scientific Instruments, vol.78, issue.10, pp.103303-103311, 2007. ,
DOI : 10.1016/S0304-3991(99)00123-0
Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators, TRANSDUCERS 2007, 2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp.327-330, 2007. ,
DOI : 10.1109/SENSOR.2007.4300134
Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications, Nature Nanotechnology, vol.2, issue.23, pp.114-120, 2007. ,
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions, Applied Physics Letters, vol.5, issue.1, pp.13501-13540, 2007. ,
DOI : 10.1038/nnano.2006.208
Atomic-Scale Mass Sensing Using Carbon Nanotube Resonators, Nano Letters, vol.812, pp.4342-4346, 2008. ,
In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives, IEEE Electron Device Letters, vol.29, issue.5, pp.494-496, 2008. ,
DOI : 10.1109/LED.2008.919781
URL : https://hal.archives-ouvertes.fr/cea-00320837
A self-sustaining ultrahighfrequency nanoelectromechanical oscillator, Nature Nanotechnology, vol.36, pp.342-346, 2008. ,
Fully monolithic CMOS nickel micromechanical resonator oscillator, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp.10-13, 2008. ,
DOI : 10.1109/MEMSYS.2008.4443580
Nanoelectronics roadmap : evading Moore's law, ResearchGate (1 er jan. 2008) (cf, 2008. ,
CMUT as a chemical sensor for DMMP detection, 2008 IEEE International Frequency Control Symposium, pp.434-439, 2008. ,
DOI : 10.1109/FREQ.2008.4623034
Lateral MOSFET transistor with movable gate for NEMS devices compatible with “In-IC” integration, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.764-769, 2008. ,
DOI : 10.1109/NEMS.2008.4484439
A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout, IEEE Photonics Technology Letters, vol.20, issue.23, pp.1905-1907, 2008. ,
DOI : 10.1109/LPT.2008.2005253
A CMOS-compatible, magnetically actuated resonator for mass sensing applications, Sensors and Actuators B: Chemical, vol.129, issue.1, pp.10-17, 2008. ,
DOI : 10.1016/j.snb.2007.07.081
Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range, IEEE Electron Device Letters, vol.29, issue.2, pp.146-148, 2008. ,
DOI : 10.1109/LED.2007.914085
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies, Journal of Micromechanics and Microengineering, vol.19, issue.1, pp.15002-15041, 2009. ,
DOI : 10.1088/0960-1317/19/1/015002
Sensitive in plane motion detection of NEMS through semiconducting (p+) piezoresistive gauge transducers, 2009 IEEE Sensors, pp.1286-1289, 2009. ,
DOI : 10.1109/ICSENS.2009.5398391
Towards singlemolecule nanomechanical mass spectrometry, Nature Nanotechnology, vol.47, issue.29, pp.445-450, 2009. ,
DOI : 10.1038/nnano.2009.152
URL : https://authors.library.caltech.edu/15095/2/Naiknnano.2009.152-s1.pdf
Phase noise and frequency stability in oscillators. Cambridge, pp.25-27, 2009. ,
100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator IEEE International Frequency Control Symposium, IEEE International Frequency Control Symposium. Juin, pp.2010-174, 2010. ,
FBAR-CMOS Oscillator Array for Mass-Sensing Applications, IEEE Sensors Journal, vol.10, issue.6, pp.1042-1047, 2010. ,
DOI : 10.1109/JSEN.2010.2042711
URL : http://www.bioee.ee.columbia.edu/downloads/2010/5443687.pdf
Université Joseph-Fourier - Grenoble I, 15 oct, Thèse de doct, p.22, 2010. ,
In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection, Nanotechnology, vol.21, issue.16, pp.165504-165515, 2010. ,
DOI : 10.1088/0957-4484/21/16/165504
URL : https://hal.archives-ouvertes.fr/hal-00445261
Systèmes électromécaniques nanométriques a base de nano-fils de silicium et nanotubes de carbone, Thèse de doct. Ecole Polytechnique X, 3 juin 2010 (cf, p.12 ,
Use of a single multiplexed CMOS oscillator as direct frequency read-out for an array of eight AlN Contour-Mode NEMS Resonant Sensors, 2010 IEEE Sensors, pp.2666-2670, 2010. ,
DOI : 10.1109/ICSENS.2010.5689874
VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors, 2011 International Electron Devices Meeting, pp.29-32, 2011. ,
DOI : 10.1109/IEDM.2011.6131637
Comparative advantages of mechanical biosensors, Nature Nanotechnology, vol.711, issue.4, pp.203-215, 2011. ,
DOI : 10.1007/3-540-49522-3_12
Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit, pp.30-35, 2011. ,
Gas sensors based on gravimetric detection???A review, Sensors and Actuators B: Chemical, vol.160, issue.1, pp.804-821, 2011. ,
DOI : 10.1016/j.snb.2011.08.066
50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection, In : Journal of Micromechanics and Microengineering, vol.218, issue.66, pp.85023-85034, 2011. ,
Overview and outlook of through-silicon via (TSV) and 3D integrations, Microelectronics International 28, pp.8-22, 2011. ,
Piezoresistance of top-down suspended Si nanowires, Nanotechnology, vol.22, issue.39, pp.395701-395723, 2011. ,
DOI : 10.1088/0957-4484/22/39/395701
Sustained mechanical selfoscillation of carbon nanotube cantilever by phase locked loop with optomechanical heterodyne, Applied Physics Letters, vol.9813, pp.133103-133114, 2011. ,
VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS, 2012 International Electron Devices Meeting, pp.15-19, 2012. ,
DOI : 10.1109/IEDM.2012.6479048
Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications, 2012 IEEE International Solid-State Circuits Conference, pp.320-322, 2012. ,
DOI : 10.1109/ISSCC.2012.6177005
Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications, Nano Letters, vol.12, issue.3, pp.1269-1274, 2012. ,
DOI : 10.1021/nl2037479
Phase-locked loop based on nanoelectromechanical resonant-body field effect transistor, Applied Physics Letters, vol.101, issue.15, pp.153116-66, 2012. ,
DOI : 10.1103/PhysRevB.85.161410
URL : https://infoscience.epfl.ch/record/181739/files/Phase-locked loop based on nanoelectromechanical resonant-body field effect transistor.pdf
Nanomechanical Silicon Resonators with Intrinsic Tunable Gain and Sub-nW Power Consumption, ACS Nano, vol.6, issue.1, pp.256-264, 2012. ,
DOI : 10.1021/nn203517w
Motion Transduction in Nanoelectromechanical Systems (NEMS) Arrays Using Near-field Optomechanical Coupling, Nano Letters, vol.12, issue.2, pp.534-539, 2012. ,
DOI : 10.1021/nl2031585
3-D Sequential Integration: A Key Enabling Technology for Heterogeneous Co-Integration of New Function With CMOS, IEEE Journal on Emerging and Selected Topics in Circuits and Systems, pp.714-722, 2012. ,
DOI : 10.1109/JETCAS.2012.2223593
A nanomechanical mass sensor with yoctogram resolution, Nature Nanotechnology, vol.69, issue.5, pp.301-304, 2012. ,
DOI : 10.1103/PhysRevB.69.155406
URL : http://arxiv.org/pdf/1204.2758
High performance miniaturized NEMS sensors Toward co-integration with CMOS?, 70th Device Research Conference, pp.15-16, 2012. ,
DOI : 10.1109/DRC.2012.6256937
FPGA implementation of a low-cost method for tracking the resonance frequency and the quality factor of MEMS sensors, 2012 IEEE Sensors, pp.1-4, 2012. ,
DOI : 10.1109/ICSENS.2012.6411033
Single-protein nanomechanical mass spectrometry in real time, Nature Nanotechnology, vol.161, issue.9, pp.602-608, 2012. ,
DOI : 10.1016/j.jasms.2005.02.017
Miniaturisation des capteurs MEMS et NEMS résonants en silicium : dispositifs, transduction, dynamique non-linéaire et applications, Thèse de doct. INSA de Lyon, pp.5-2012, 2012. ,
A CMOS capacitive micromechanical oscillator driven by a phase-locked loop, 2012 IEEE Sensors. 2012 IEEE Sensors, pp.1-4, 2012. ,
Simultaneous self-sustained actuation and parallel readout with MEMS cantilever sensor array, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp.644-647, 2012. ,
DOI : 10.1109/MEMSYS.2012.6170269
3D integration of MEMS and CMOS via Cu-Cu bonding with simultaneous formation of electrical, mechanical and hermetic bonds, 2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International, 2012. ,
DOI : 10.1109/3DIC.2012.6262956
Power-efficient readout circuit for miniaturized electronic nose, 2012 IEEE International Solid-State Circuits Conference, pp.318-320, 2012. ,
DOI : 10.1109/ISSCC.2012.6177030
Power-Efficient Oscillator-Based Readout Circuit for Multichannel Resonant Volatile Sensors, IEEE Transactions on Biomedical Circuits and Systems, vol.6, issue.6, pp.542-551, 2012. ,
DOI : 10.1109/TBCAS.2012.2230629
Modeling RF MEMS Devices, Modeling RF MEMS Devices, pp.83-110, 2012. ,
DOI : 10.1109/MMM.2011.2173984
Heterogeneous integration of MEMS sensor array and CMOS readout IC with Through Silicon Via interconnects, 2012 2nd IEEE CPMT Symposium Japan, pp.1-5, 2012. ,
DOI : 10.1109/ICSJ.2012.6523398
Towards Nanomechanics and Nanoelectronics on a Single Chip, Thèse de doct, pp.2013-2025, 2013. ,
A 1.8 MHz MEMS-based oscillator with synchronous amplitude limiter, 2013 European Conference on Circuit Theory and Design (ECCTD), pp.1-4, 2013. ,
DOI : 10.1109/ECCTD.2013.6662225
Aluminum Nitride nano-plate infrared sensor with self-sustained CMOS oscillator for nano-watts range power detection, European Frequency and Time Forum International Frequency Control Symposium (EFTF/IFC), 2013 Joint. European Frequency and Time Forum International Frequency Control Symposium (EFTF/IFC), pp.62-65, 2013. ,
NEMS-based heterodyne self-oscillator, Sensors and Actuators A: Physical, vol.189, pp.512-518, 2013. ,
DOI : 10.1016/j.sna.2012.10.038
Packaged CMOS???MEMS free???free beam oscillator, Journal of Micromechanics and Microengineering, vol.23, issue.11, pp.115018-70, 2013. ,
DOI : 10.1088/0960-1317/23/11/115018
Integration of NEMS resonators in a 65nm CMOS technology, Microelectronic Engineering, vol.110, pp.246-249, 2013. ,
DOI : 10.1016/j.mee.2013.01.038
Frequency-addressed NEMS arrays for mass and gas sensing applications, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp.665-668, 2013. ,
DOI : 10.1109/Transducers.2013.6626854
New concept of mass spectrometer based on arrays of resonating nanostructures, Thèse de doct, pp.31-47, 2013. ,
A 3V CMOS-MEMS oscillator in 0.35 um CMOS technology In : 2013 Transducers Eurosensors XXVII : The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII). 2013 Transducers Eurosensors XXVII : The 17th International Conference on Solid- State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII) Juin 2013, pp.806-809, 2013. ,
A CMOS MEMS capacitive resonant sensor array utilizing a PLL-based oscillator loop, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013. ,
DOI : 10.1109/Transducers.2013.6626706
An energy-efficient readout circuit for resonant sensors based on ring-down measurement, Review of Scientific Instruments, vol.84, issue.2, pp.25005-63, 2013. ,
DOI : 10.1063/1.1819631
Nanosystems monolithically integrated with CMOS: emerging applications and technologies, 2014 IEEE International Electron Devices Meeting ,
DOI : 10.1109/IEDM.2014.7047098
VHF NEMS-CMOS piezoresistive resonators for advanced sensing applications, Nanotechnology, vol.25, issue.43, pp.435501-435540, 2014. ,
DOI : 10.1088/0957-4484/25/43/435501
12.9 A 1.55×0.85mm2 3ppm 1.0uA 32.768kHz MEMS-Based Oscillator IEEE International Solid-State Circuits Conference Digest of Technical Papers (ISSCC). 2014 IEEE International Solid-State Circuits Conference Digest of Technical Papers (ISSCC). Fév, pp.2014-226, 2014. ,
MEMS Market Tracker -IHS Technology, IHS Technology, 2014. ,
Multi-mode oscillator allowing simultaneous tracking of variations of a plurality of resonance frequencies of a resonator, Déc, vol.97, issue.108, pp.2014-77 ,
Modeling and design of a fully integrated gas analyzer using a ??GC and NEMS sensors, Sensors and Actuators B: Chemical, vol.194, pp.220-228, 2014. ,
DOI : 10.1016/j.snb.2013.12.075
Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1071-1074, 2014. ,
DOI : 10.1109/MEMSYS.2014.6765830
Technology development and analysis of a multiphysic system based on NEMS co-integrated with CMOS for mass detection application, Thèse de doct, pp.37-41, 2014. ,
An Etch Stop and Sacrificial Materials Study for 3D NEMS-CMOS Co-Integration, ECS Transactions, vol.61, issue.2, pp.395-400, 2014. ,
A CMOS?MEMS arrayed resonant-gate field effect transistor (RGFET) oscillator, In : Journal of Micromechanics and Microengineering, vol.2511, pp.115025-68, 2015. ,
URL : http://www.crystek.com/home/ oscillator/clockdetail.aspx?pn=CCSO-914X (cf, p.71, 2015. ,
16.5 A NEMS-array control IC for sub-attogram gravimetric sensing applications in 28nm CMOS technology, 2015 IEEE International Solid-State Circuits Conference, (ISSCC) Digest of Technical Papers, pp.1-3, 2015. ,
DOI : 10.1109/ISSCC.2015.7063044
URL : https://hal.archives-ouvertes.fr/inserm-00661857
CMOS and NEMS Hybrid Architectures, ECS Transactions, vol.6910, pp.253-258, 2015. ,
27.5 A 30ppm <80nJ ring-down-based readout circuit for resonant sensors, 2015 IEEE International Solid-State Circuits Conference, (ISSCC) Digest of Technical Papers, pp.1-3, 2015. ,
DOI : 10.1109/ISSCC.2015.7063136
URL : https://hal.archives-ouvertes.fr/in2p3-00016278
A Monolithic CMOS-MEMS Oscillator Based on an Ultra-Low-Power Ovenized Micromechanical Resonator, Journal of Microelectromechanical Systems, vol.24, issue.2, pp.360-372, 2015. ,
DOI : 10.1109/JMEMS.2014.2331497
Cantilever array oscillators with nonlinear optical readout, 2015 International Conference on Optical MEMS and Nanophotonics (OMN), pp.1-2, 2015. ,
DOI : 10.1109/OMN.2015.7288835
A NEMS-based gauge factor extraction method for nanowires, Journal of Micromechanics and Microengineering, vol.25, issue.11, pp.115003-115025, 2015. ,
DOI : 10.1088/0960-1317/25/11/115003
Neutral particle mass spectrometry with nanomechanical systems, Nature Communications, vol.6, issue.104, p.33, 2015. ,
Compact heterodyne NEMS oscillator for sensing applications, Solid State Device Research Conference (ESSDERC), 2015 45th European. Solid State Device Research Conference (ESSDERC), 2015 45th European, pp.146-148, 2015. ,
DOI : 10.1109/essderc.2015.7324734
CMOS???MEMS resonators: From devices to applications, Microelectronic Engineering, vol.132, pp.58-73, 2015. ,
DOI : 10.1016/j.mee.2014.08.015
A NEMS-Array Control IC for Subattogram Mass Sensing Applications in 28 nm CMOS Technology, IEEE Journal of Solid-State Circuits, vol.51, issue.66, pp.249-258, 2016. ,
A 30 ppm < 80 nJ Ring-Down-Based Readout Circuit for Resonant Sensors, IEEE Journal of Solid-State Circuits, vol.51, issue.1, pp.187-195, 2016. ,
DOI : 10.1109/isscc.2015.7063136
Single-molecule mass spectrometry, Mass Spectrometry Reviews, p.8, 2016. ,
Optomechanical nanoresonator readout with optical downmixing, 2016 IEEE International Frequency Control Symposium (IFCS), pp.2016-2017, 2016. ,
DOI : 10.1109/FCS.2016.7546722
Mass and stiffness spectrometry of nanoparticles and whole intact bacteria by multimode nanomechanical resonators, Nature Communications, vol.6, p.13452, 2016. ,
DOI : 10.1038/srep29627
CMOS- NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology, pp.30-39, 2016. ,
9174 BK005 | Câble coaxial RG174/U, 50 ohms, Noir, en bobine de 30m | Alpha Wire, pp.1119199-1119244, 2016. ,
Design of Analog CMOS Integrated Circuits, p.60, 2016. ,
11.1 Dual-MEMS-resonator temperature-todigital converter with 40 K resolution and FOM of 0.12pJK2, 2016 IEEE International Solid- State Circuits Conference (ISSCC). 2016 IEEE International Solid-State Circuits Conference (ISSCC), pp.200-201, 2016. ,
Compact heterodyne NEMS oscillator for sensing applications, Solid-State Electronics (juil. 2016) (cf, p.75 ,
DOI : 10.1109/essderc.2015.7324734
Frequency fluctuations in silicon nanoresonators, Nature Nanotechnology, vol.85, issue.6, pp.552-558, 2016. ,
DOI : 10.1103/PhysRevB.85.054414
URL : https://authors.library.caltech.edu/65095/2/nnano.2016.19-s1.pdf
Multi-mode oscillator allowing simultaneous tracking of variations of a plurality of resonance frequencies of a resonator, 2014. ,
Dualmode NEMS self-oscillator for mass sensing, Frequency Control Symposium the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International. Frequency Control Symposium the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International. Avr. 2015, pp.222-225 ,
Compact heterodyne NEMS oscillator for sensing applications, Solid State Device Research Conference (ESSDERC), 2015 45th European. Solid State Device Research Conference (ESSDERC), 2015 45th European, pp.146-148, 2015. ,
DOI : 10.1109/essderc.2015.7324734
Large scale integration of silicon nanomechanical resonators above industrial cmos wafers ,
Simultaneous mode tracking for sensing applications with dualmode heterodyne NEMS oscillator, IEEE SENSORS 2016 Conference Proceedings. IEEE SENSORS 2016, pp.29-2016 ,
DOI : 10.1109/icsens.2016.7808662
Compact heterodyne NEMS oscillator for sensing applications, Solid-State Electronics, 2016. ,
A 30 ? 80 MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300 zg mass resolution, IEEE International Solid-State Circuits Conference (ISSCC), p.2017, 2017. ,
Annexe : Solution numériques pour les différents modes des résonateurs 34 ,
SS ) 67 case ' SS ' 68 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.69-71 ,
Clamped Free ) (CF) 75 case 'CF ' 76 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.77-78 ,
Clamped Free With Support ) (CB) 91 case 'CB ' 92 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.93-94 ,
lbn) f (lbn , 1, pin_position ,
Annexe : Solution numériques pour les différents modes des résonateurs 156 end 157 ,
constante de force e l e c t r o s t a t i q u e PP et CCWS 229 %eta = [ eta i n t e g r a l ( matlabFunction ( p2 * n * 10e°6), pp.440-449 ,
e f f o r t excerce sur l e s jauges PP et CCWS 231 %s t r a i n ,
* pi * freq ( i ) * modeshape { i } ( x_plot ) . ^ 2 . /max_modeshape( i ) ,
Annexe : Les cartes électroniques de tests FIGURE B.1 ? Cartes de tests pour l'oscillateur hétérodyne bimode pour NEMS déportés ,