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A. Annexe, Annexe : Solution numériques pour les différents modes des résonateurs 34

%. Suported-suported, SS ) 67 case ' SS ' 68 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.69-71

%. Cantilever and ). , Clamped Free ) (CF) 75 case 'CF ' 76 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.77-78

%. Crossbeam and ). , Clamped Free With Support ) (CB) 91 case 'CB ' 92 [ syst , coeff ] = equationsToMatrix ( [ subs (p1, pp.93-94

{. Case and . Ccws-',-'pp-'}, lbn) f (lbn , 1, pin_position

A. Annexe, Annexe : Solution numériques pour les différents modes des résonateurs 156 end 157

%. V-e-r-i, constante de force e l e c t r o s t a t i q u e PP et CCWS 229 %eta = [ eta i n t e g r a l ( matlabFunction ( p2 * n * 10e°6), pp.440-449

%. V-e-r-i, e f f o r t excerce sur l e s jauges PP et CCWS 231 %s t r a i n

=. 249-resp_modeshape, * pi * freq ( i ) * modeshape { i } ( x_plot ) . ^ 2 . /max_modeshape( i )

B. Annexe, Annexe : Les cartes électroniques de tests FIGURE B.1 ? Cartes de tests pour l'oscillateur hétérodyne bimode pour NEMS déportés