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Conception de circuit intégré pour les applications gravimétriques basées sur l’utilisation de résonateurs mécaniques arrangés en réseau

Abstract : The extreme sensitivity of nano electro mechanical system (NEMS) to atomic scale physical variations has led to the breakthrough development of NEMS- based mass spectrometry sys- tems capable of measuring a single molecule. Parallel sensing using thousands of devices will help to circumvent the small effective sensing area while opening new perspectives for applica- tions which require spatial mapping. While the development of NEMS CMOS co-integration technology is of paramount importance to achieve high density sensor arrays (>1000 devices), the readout circuitry capable of tracking NEMS resonator frequency shifts is still the limiting factor for the very large scale integration of individually addressed sensors. Moreover, in order to resolve the mass and position of an adsorbed analyte, single particle mass sensing appli- cations require to track simultaneously and in real time at least two modes of the resonators. This requirement adds complexity to the design of the overall system. To respond to the size, power consumption and resolution constraints linked to NEMS array measurement, this work focuses on the development of a new readout architecture based upon a dual mode heterodyne oscillator. This work also emphasis the effort made on the modelization and co-simulation of the NEMS devices with their readout electronics. Then, the manuscript describe the first results of the CEA/LETI CMOS co-integraton process developed to tackle the sensor density challenge of mass spectrometry application. Finally, present the two integrated circuit that were designed during this thesis. The first one was a proof of concept for the aforementioned oscillator architecture while the second one combine the architecture with the co-integration processus developed.
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  • HAL Id : tel-01765780, version 1

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Guillaume Gourlat. Conception de circuit intégré pour les applications gravimétriques basées sur l’utilisation de résonateurs mécaniques arrangés en réseau. Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2017. Français. ⟨NNT : 2017GREAT089⟩. ⟨tel-01765780⟩

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