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Caractérisation de la nano-porosité de couches minces de nitrure de silicium. Une approche multi-échelles

Abstract : Silicon nitride is widely used in glass industry embedded in stacks of thin layers applied to functionalize glass for thermal, optical (antireflection) or self-cleaning applications. The deposition of these layers is made by magnetron sputtering on large surfaces with a great versatility. However, nanometric pores can be produced in these amorphous layers deposited with this technique which is detrimental for the durability of the products containing theses layers. This PhD thesis presents the development of a multiscale approach in order to characterize this nano-porosity combining two techniques: Transmission Electron Microscopy (TEM/STEM) and Electrochemical Impedance Spectroscopy (EIS). This analysis route is applied to study silicon nitride layers of different thicknesses. Furthermore, the impact of several parameters like the deposition pressure, the nitrogen partial pressure or the nature of the seed layer has been investigated.The nano-porosity of these layers is strongly dependent on the deposition conditions: pressure and thickness seem to be crucial for their nanostructure. For most of the cases, the morphology of this silicon nitride layer is divided in two main areas: a homogeneous area near the substrate and a columnar structure in the upper part of the layer. A quantitative description of the columnar area porosity is proposed and includes the estimation of the pores diameter and density, their change in morphology with the layer thickness, their percolation and the substrate accessible surface at the bottom of the through pores.
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Submitted on : Thursday, April 5, 2018 - 1:53:07 PM
Last modification on : Tuesday, October 20, 2020 - 10:23:10 AM


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  • HAL Id : tel-01759351, version 1


Thomas Barrès. Caractérisation de la nano-porosité de couches minces de nitrure de silicium. Une approche multi-échelles. Physique [physics]. Université Pierre et Marie Curie - Paris VI, 2017. Français. ⟨NNT : 2017PA066407⟩. ⟨tel-01759351⟩



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