Implémentation d'un générateur de nanoparticules en phase gazeuse fondé sur la pulvérisation cathodique magnétron pour la synthèse de films minces nanocomposities céramique/nanoparticules métalliques

Abstract : This thesis is dedicated to the study of free nanoparticles (NPs) source based on magnetron sputtering. Setting up an optical emission spectrometer and a quartz microbalance allowed to observe the influence of the process parameters (gas composition and flow rate, cathodic current, magnetic configuration) on the plasma species and the NPs deposition rate. This lead to a better understanding of the process and the establishment of a process operating windows. Transmission Electron Microscopy (TEM) analysis revealed crystallized silver NPs whose size increased (from 2.5 ± 0.5 nm to 5.2 ± 0.5 nm in diameter) when the aggregation length increased. The free NPs source coupled to a conventional magnetron sputtering chamber allowed the deposition of nanocomposites thin films consisting of metallic NPs (Cu ou Ag) embedded in dielectric transparent amorphous matrix (aluminum nitride or oxide). A red shift of the Surface Plasmon Resonance (SPR) was observed with the increase of the matrix permittivity value. A broadening of the SPR with the decrease of the NPs size was also evidenced. Finally, the electrical properties of the nanocomposites have been studied by means of a Metal/Insulator/Metal capacitor pointing out a modulation of the permittivity with the silver NPs content (5% and 10% vol.).
Keywords : MIM capacitors
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Maileth Orozco Montes. Implémentation d'un générateur de nanoparticules en phase gazeuse fondé sur la pulvérisation cathodique magnétron pour la synthèse de films minces nanocomposities céramique/nanoparticules métalliques. Micro et nanotechnologies/Microélectronique. Université de Limoges, 2017. Français. ⟨NNT : 2017LIMO0082⟩. ⟨tel-01757284⟩

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