Caractérisation spectrale locale à l'aide de la microscopie interférométrique : simulations et mesures

Abstract : White light interference microscopy is a measurement method based on the acquisition and processing of the signal coming from the interaction between two wave fronts, known as the “object” and “reference” wave-fronts. These waves come from the reflection of the light on a reference mirror and the sample studied. Usually used for topographic or tomographic analysis of a sample, the interferometric data can be exploited for spectroscopic purposes. The resulting spectral characterizations are spatially resolved in the three directions of space. In this project, we have studied the performance of this technique, as well as the associated limitations when the sample becomes more complex (degradation of the interferometric signal). The analysis has been first applied to reflective materials for surface measurements and subsequently to transparent and scattering layers for probing within the depth of the medium and then extracting the individual spectral response of the buried structures.
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Rémy Claveau. Caractérisation spectrale locale à l'aide de la microscopie interférométrique : simulations et mesures. Optique / photonique. Université de Strasbourg, 2017. Français. ⟨NNT : 2017STRAD037⟩. ⟨tel-01730792⟩

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