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. En-supposant and . Dans-le, que tout le polymère (d'une densité de 1) est mis en solution et une épaisseur de dépôt de 200 nm, la masse de polymère correspondante est de 6 mg. En pratique

. Dans-le-domaine-de-la-microélectronique, et en particulier pour les équipements industriels de CVD, les débits des précurseurs sont donnés en sccm « standart cubic centimeters per minute » ou centimètre cube par minute dans les conditions standards de pression (10 5 Pa) et de température (273K), soit noté cm 3 /min. Pour convertir cette unité en g.min -1 , cela revient à convertir des cm 3 en g, et l'équation des gaz parfaits est utilisée

P. Avec and . Pression, V le volume (m 3 ), n la quantité de matière (mol), R la constante des gaz parfaits (J.K -1 .mol -1 ) et T la température (K)

. Dans-notre-cas, échantillon analysé est le substrat de silicium sur lequel a été synthétisée la couche mince de polymère

R. Scarazzini, Thèse de doctorat " ToF-SIMS characterisation of fragile materials used in microelectronic and microsystem devices: validation and enhancement of the chemical information, p.2016