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Synthèse de couches minces de polymères par dépôt chimique en phase vapeur par une polymérisation amorcée in-situ (iCVD) : mécanisme de croissance et application aux capteurs de gaz

Abstract : Miniaturization of microelectronic devices is mandatory for cost, space and performance benefits. Easy-to-use gas sensors can then be designed and detection of low level of toxic gases can be achieved. The sensor performances are closely dependent on the sensitivity of the thin film towards the targeted gas. This study focuses on sensitive polymer thin films deposited by initiated Chemical Vapor Deposition (iCVD). This innovative deposition method has the advantage to be solvent-free and does not require high reaction temperatures, which allows its use in many fields, including nanocomponent fabrication. The iCVD process parameters are investigated and their influence on the thin film properties discussed. The study of the growth mechanism reveals an unexpected two-regime growth of the deposited films. The first regime, in the early stage of the deposition process, is characterized by a relatively slow growth. In the second regime, the growth rate slightly increases and the film thickness increases linearly with the deposition time. Based on microscopic and macroscopic data gained on poly(neopentyl methacrylate) thin films, a model for the growth mechanism of the polymer thin film is proposed. The change of regime appears to be correlated to the thin film thick-ness. This study shows the presence of a critical thickness. Moreover, the monomer concentration building up where the polymerization takes place is the most significant parameter to understand the film growth. It is also the key parameter to enable the deposition of reproducible and thickness controlled films, which is required for gas sensor applications. Finally, polymethacrylate films, obtained by iCVD, are tested as sensitive layers and low toluene gas concentration (ppm) can be detected, while the gas sensors are reversible
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Laetitia Bonnet. Synthèse de couches minces de polymères par dépôt chimique en phase vapeur par une polymérisation amorcée in-situ (iCVD) : mécanisme de croissance et application aux capteurs de gaz. Polymères. Université de Lyon, 2017. Français. ⟨NNT : 2017LYSE1258⟩. ⟨tel-01729355⟩

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